초록 ▼

A novel asymmetric filter membrane, and process for making is disclosed in several exemplary versions. The membrane structure is physically robust and suitable for use in a wide variety of applications. The support membrane is may be comprised of material such as a porous silicon or a silicon oxide

A novel asymmetric filter membrane, and process for making is disclosed in several exemplary versions. The membrane structure is physically robust and suitable for use in a wide variety of applications. The support membrane is may be comprised of material such as a porous silicon or a silicon oxide, and the separation membrane may be comprised of material such as a polymer, zeolite film, or silicon oxide. The process relies on steps adapted from the microelectronics industry.

대표청구항 ▼

We claim: 1. A composite asymmetric microfilter structure comprising at least one separation membrane, the at least one separation membrane comprising a spin-on glass selected from the group consisting of siloxanes, silsesquioxanes, N-silsesquioxanes, and polycabosilanes, atop a support membrane, t

We claim: 1. A composite asymmetric microfilter structure comprising at least one separation membrane, the at least one separation membrane comprising a spin-on glass selected from the group consisting of siloxanes, silsesquioxanes, N-silsesquioxanes, and polycabosilanes, atop a support membrane, the support membrane being selected from the group consisting of silicon, silicon dioxide, silicon nitride, germanium and any combination thereof. 2. An array comprising a plurality of the composite microfilter stucture recited in claim 1. 3. The structure recited in claim 1, wherein the support membrane comprises a porous silicon wafer. 4. The structure recited in claim 1, wherein the separation membrane is about 1 μm thick. 5. The structure recited in claim 1, wherein the separation membrane is lithographically patterned with a plurality of micropores therethrough. 6. The structure recited in claim 5, wherein the support membrane is provided with a plurality of micropores therethrough having broader average diameter than the plurality of micropores of the separation membrane. 7. A composite asymmetric microfilter structure comprising at least one separation membrane, the at least one separation membrane comprising a spin-on glass selected from the group consisting of siloxanes, silsesquioxanes, N-silsesquioxanes, and polycabosilanes, atop a support membrane of silicon. 8. An array comprising a plurality of the composite microfilter stucture recited in claim 7. 9. The structure recited in claim 7, wherein the support membrane comprises a porous silicon wafer. 10. The structure recited in claim 7, wherein the separation membrane is about 1 μm thick. 11. The structure recited in claim 7, wherein the separation membrane is lithographically patterned with a plurality of micropores therethrough. 12. The structure recited in claim 7, wherein the support membrane is provided with a plurality of micropores therethrough having broader average diameter than the plurality of micropores of the separation membrane.