A heat insulating and shielding glass panel that is capable of maintaining heat shielding performance even if heat treatment is carried out during manufacture. The heat insulating and shielding glass panel 1 is comprised of a pair of glass plates 11 and 12 that are hermetically joined together at th
A heat insulating and shielding glass panel that is capable of maintaining heat shielding performance even if heat treatment is carried out during manufacture. The heat insulating and shielding glass panel 1 is comprised of a pair of glass plates 11 and 12 that are hermetically joined together at their outer peripheral edges via a sealing frame 13 that fluidizes at low temperature, such that respective one surfaces of the glass plates 11, 12 face each other and a hollow layer 14 is formed between the glass plates; and pillars 15 that are substantially cylindrical spacers that are inserted into the hollow layer 14 as atmospheric pressure supporting members and determine the gap between the glass plates 11 and 12. A low-emission transparent multilayer 17 having an emittance of not more than 0.1 is coated by sputtering on each of surfaces 11a and 12a of the respective glass plates 11 and 12 facing the hollow layer 14 so as to realize high heat insulation performance. The low-emission transparent multilayer 17 is comprised of ZnO layers 33 and 35 as dielectric layers separated from each other in the direction of film thickness by an SiNx layer 34 as an amorphous layer, and an Ag--Pd layer 32 as a metal layer containing Ag and Pd.
대표청구항▼
The invention claimed is: 1. A heat insulating and shielding glass panel comprising a pair of glass plates provided separated from each other via pillars by a predetermined gap so as to form a hollow layer therebetween, and an outer peripheral sealing portion that hermetically seals the hollow laye
The invention claimed is: 1. A heat insulating and shielding glass panel comprising a pair of glass plates provided separated from each other via pillars by a predetermined gap so as to form a hollow layer therebetween, and an outer peripheral sealing portion that hermetically seals the hollow layer at a peripheral portion of said pair of glass plates, wherein a low-emission transparent multilayer is formed on a glass plate surface facing the hollow layer, the low-emission transparent multilayer comprising: a first dielectric layer formed on the glass plate surface; a metal layer containing Ag and Pd and formed on the first dielectric layer; a sacrifice layer formed on the metal layer for preventing degradation of the metal layer during formation thereof; a second dielectric layer formed on the sacrifice layer; a first amorphous layer formed on the second dielectric layer; a third dielectric layer formed on the first amorphous layer; a second amorphous layer formed on the third dielectric layer; a fourth dielectric layer formed on the second amorphous layer; and a third amorphous layer formed directly on the fourth dielectric layer. 2. A heat insulating and shielding glass panel as claimed in claim 1, wherein the low-emission transparent multilayer comprises an SiO2 layer as an uppermost layer in contact with the hollow layer and said outer peripheral sealing portion. 3. A heat insulating and shielding glass panel as claimed in claim 1, wherein the low-emission transparent multilayer comprises an SiO2 layer as a lowermost layer in contact with the glass plate surface. 4. A heat insulating and shielding glass panel as claimed in claim 1, wherein each of the dielectric layers comprises an oxide layer containing at least one kind of metal selected from a group of Zn, Sn, Ti, In, and Bi. 5. A heat insulating and shielding glass panel as claimed in claim 4, wherein each of the dielectric layers comprises zinc oxide as a principal component thereof. 6. A heat insulating and shielding glass panel as claimed in claim 1, wherein each of the amorphous layers comprises at least one selected from a group of a nitride, an oxynitride, and an amorphous oxide. 7. A heat insulating and shielding glass panel as claimed in claim 6, wherein the nitride layer comprises a nitride containing at least one kind of metal selected from a group of Si, Al, Ti, and Sn. 8. A heat insulating and shielding glass panel as claimed in claim 6, wherein the oxynitride layer comprises an oxynitride containing at least one kind of metal selected from a group of Si, Al, Ti, and Sn. 9. A heat insulating and shielding glass panel as claimed in claim 6, wherein the amorphous oxide layer comprises an amorphous oxide containing at least one kind of metal selected from a group of Si, Al, Ti, and Sn. 10. A heat insulating and shielding glass panel as claimed in claim 1, wherein an uppermost layer of the low-emission transparent multilayer, the uppermost layer being in contact with the hollow layer and said outer peripheral sealing portion, is implemented by a protective layer comprising a nitride, an oxynitride, or an amorphous oxide containing at least one kind of metal selected from a group of Si, Al, Ti, and Sn. 11. A heat insulating and shielding glass panel as claimed in claim 1, wherein each of the amorphous layers has a film thickness of not less than 3 nm and not more than 30 nm. 12. A heat insulating and shielding glass panel as claimed in claim 11, wherein each of the amorphous layers has a film thickness of not less than 5 nm and not more than 20 nm. 13. A heat insulating and shielding glass panel as claimed in claim 1, wherein at least one of the amorphous layers comprises silicon nitride. 14. A heat insulating and shielding glass panel as claimed in claim 1, wherein each of the dielectric layers has zinc oxide as a principal component thereof. 15. A heat insulating and shielding glass panel as claimed in claim 1, wherein the sacrifice layer comprises an oxide containing Ti. 16. A heat insulating and shielding glass panel as claimed in claim 1, wherein the sacrifice layer comprises an oxide containing Nb. 17. A heat insulating and shielding glass panel as claimed in claim 1, wherein the metal layers have Ag as a principal component thereof. 18. A heat insulating and shielding glass panel as claimed in claim 1, wherein the low-emission transparent multilayer is configured such that an integral width βi of a peak whose maximum lies at 32째≦2θ (angle of diffraction) ≦35째 among X-ray diffraction peaks obtained using a CuKα ray is not less than 0.43 and not more than 1.20. 19. A heat insulating and shielding glass panel as claimed in claim 18, wherein the integral width βi is not less than 0.50 and not more than 1.20. 20. A heat insulating and shielding glass panel as claimed in claim 18, wherein the peak whose maximum lies at 32째≦2θ (angle of diffraction) ≦35째 is a peak based on a (002) diffraction ray of zinc oxide. 21. A heat insulating and shielding glass panel as claimed in claim 1, wherein the first dielectric layer, the metal layer, the sacrifice layer, the second dielectric layer, the first amorphous layer, the third dielectric layer, the second amorphous layer, the fourth dielectric layer, and the third amorphous layer have film thicknesses of 25 to 30 nm, 10 to 20 nm, 1 to 1.0 nm, 1 to 20 nm, 1 to 20 nm, 1 to 20 nm, 1 to 20 nm, 1 to 20 nm, and 1 to 20 nm, respectively.
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이 특허에 인용된 특허 (2)
Schicht Heinz,DEX ; Schmidt Uwe,DEX ; Kaiser Wilfried,DEX ; Hryniw Bodo,DEX, Transparent substrate provided with thin layers having reflection properties in the infrared.
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