Vibration damper with nested turbo molecular pump
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B01D-008/00
F04B-017/03
출원번호
US-0622276
(2003-07-18)
등록번호
US-7300261
(2007-11-27)
발명자
/ 주소
Cafri,Hagay
Kotik,Eyal
Pinhasi,Eitan
Krivts,Igor (Krayvitz)
출원인 / 주소
Applied Materials, Inc.
대리인 / 주소
Sughrue Mion PLLC
인용정보
피인용 횟수 :
5인용 특허 :
10
초록▼
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of t
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.
대표청구항▼
What we claimed is: 1. A gas turbo pump assembly for connection to an inlet port, comprising: a turbo pump having a pump body with an external surface and a center axis, a pump inlet port, said pump inlet port being disposed at a first axial end of said pump body and being coupled to a vacuum chamb
What we claimed is: 1. A gas turbo pump assembly for connection to an inlet port, comprising: a turbo pump having a pump body with an external surface and a center axis, a pump inlet port, said pump inlet port being disposed at a first axial end of said pump body and being coupled to a vacuum chamber port, and an exit port disposed proximate a second axial end of said body; and a vibration damping assembly, disposed to enclose a significant portion of said pump body in a nested arrangement, said vibration damping assembly comprising a first nested structure having an outer peripheral surface and an inner peripheral surface, said inner peripheral surface being disposed around and adjacent to the external surface of said significant portion of said pump body, and a second nested structure having an inner peripheral surface, said inner peripheral surface being disposed around and adjacent to the outer peripheral surface of said first nested structure, wherein said second nested structure comprises an arrangement of a flexible bellows and a rubberized support. 2. The turbo pump assembly as recited in claim 1, wherein said turbo pump is coupled to a rigid mounting structure at said pump inlet port via said vibration damping assembly. 3. The turbo pump assembly as recited in claim 2, wherein said vibration damping assembly is coupled between said rigid mounting structure and at least a first coupling portion at said first axial end of said pump body and a second coupling portion on the pump body disposed between said first axial end and said second axial end of said pump body. 4. The turbo pump assembly as recited in claim 3, wherein said second coupling portion comprises a radially extended structure integrally formed on said pump body. 5. The turbo pump assembly as recited in claim 4, wherein said coupling portion comprises a ring extended around said body. 6. The turbo pump assembly as recited in claim 4, wherein said coupling portion comprises a plurality of flanges disposed around said body. 7. The turbo pump assembly as recited in claim 1, wherein said first nested structure is a flexible damping structure having a first distal end and a second distal end and is coupled between said rigid mounting structure at the first distal end and said pump at the second distal end. 8. The turbo pump assembly as recited in claim 7, wherein said first nested structure comprises a flexible bellows. 9. The turbo pump assembly as recited in claim 7, wherein said second nested structure being a flexible structure having a first distal end and a second distal end and being coupled at the first distal end of said flexible structure to said pump at said first axial end and to the second end of said first nested structure at the second distal end of said flexible structure. 10. The turbo pump assembly as recited in claim 9, wherein at least one of said first nested structure and said second nested structure comprises at least one flexible bellows. 11. The turbo pump assembly as recited in claim 10, wherein both said first nested structure and said second nested structure are flexible and are adapted to reduce both compression and extraction forces. 12. The turbo pump assembly as recited in claim 1, wherein at least one of said first nested structure and said second nested structure comprises a flexible bellows. 13. The turbo pump assembly as recited in claim 1, wherein said flexible bellows is connected for extraction by atmospheric pressure. 14. The turbo pump assembly as recited in claim 1, wherein said exit port is disposed proximate said second axial end of said body, and is not covered by said vibration damping assembly. 15. The turbo pump assembly as recited in claim 1, wherein said body external surface further comprises an axial portion and an end portion, said end portion being substantially radially extended from said center axis to said axial portion and being adapted for receiving facilities connections. 16. The turbo pump assembly as recited in claim 1, wherein said significant portion comprises between 50% and 70% of said external side surface. 17. The turbo pump assembly as recited in claim 15, wherein said pump facilities connected though said bottom comprise one or more of a rough pumping port, cooling water inlet and outlet, bearings gas purge and electrical connections. 18. The turbo pump assembly as recited in claim 1 where the vibration damping assembly defined by the first nested structure and the second nested structure is substantially cone shaped. 19. A gas turbo pump assembly for connection to an inlet port, comprising: a turbo pump having a pump body with an external surface and a center axis, a pump inlet port, said pump inlet port being disposed at a first axial end of said pump body and being coupled to a vacuum chamber port, and an exit port disposed proximate a second axial end of said body; and a vibration damping assembly, disposed to enclose a significant portion of said pump body in a nested arrangement, said vibration damping assembly comprising a first nested structure having an outer peripheral surface and an inner peripheral surface, said inner peripheral surface being disposed around and adjacent to the external surface of said significant portion of said pump body, and a second nested structure having an inner peripheral surface, said inner peripheral surface being disposed around and adjacent to the outer peripheral surface of said first nested structure, wherein said first nested structure is a flexible damping structure having a first distal end and a second distal end and is coupled between said rigid mounting structure at the first distal end and said pump at the second distal end, and wherein said second nested structure is a rigid structure having a first distal end and a second distal end and is coupled to said pump body at the first distal end of said rigid structure and the second distal end of said first connecting structure at the second distal end of said rigid structure. 20. The turbo pump assembly as recited in claim 19 where the vibration damping assembly defined by the first connection structure and the second connection structure is substantially cone shaped. 21. A vibration damping assembly for substantially enclosing a gas turbo pump in a nested fashion, and securing the pump to an inlet port, comprising: a vibration damping structure defining an enclosure having at axially opposed ends a first and second opening, respectively, said first opening being adapted for coupling to an inlet port and said second opening being adapted to receive therein a substantial portion of the pump, said vibration damping structure comprising a first nested structure and a second nested structure, said first nested structure being a rigid support structure having first and second ends and being adapted to being coupled between a rigid mounting structure at the first end and said second nested structure at the second end, said second nested structure being flexible and being coupled between said pump body at said first axial end and said first nested structure. 22. The turbo pump assembly as recited in claim 21, wherein said vibration damper comprises a flexible bellows.
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이 특허에 인용된 특허 (10)
Ishikawa, Takaharu; Yamauchi, Akira, Connecting structure for vacuum pump.
Osterstrom Gordon E. (San Diego CA) Livshits Leonid (Morton Grove IL) Renz Mark B. (Northbrook IL), Turbomolecular pump with improved bearing assembly.
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