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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0607398 (2006-12-01) |
등록번호 | US-7304488 (2007-12-04) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 12 인용 특허 : 850 |
A shielded probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe may include a probe tip that extends through a dielectric substrate that supports on a first surface a signal path to test instrumentation and on a sec
A shielded probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe may include a probe tip that extends through a dielectric substrate that supports on a first surface a signal path to test instrumentation and on a second surface a ground path that shields both the signal path and the probe tip.
The invention claimed is: 1. A probe comprising: (a) a dielectric substrate having opposed first and second surfaces and a thickness of less than 40 microns and a dielectric constant of less than 7; (b) an elongate conductor supported by said first surface and suitable to be electrically interconne
The invention claimed is: 1. A probe comprising: (a) a dielectric substrate having opposed first and second surfaces and a thickness of less than 40 microns and a dielectric constant of less than 7; (b) an elongate conductor supported by said first surface and suitable to be electrically interconnected to a test signal supported by a first side of said substrate; (c) a conductive member supported by said second surface and suitable to be electrically interconnected to a ground signal supported by said second side of said substrate wherein said conductive member is under a majority of the length of said elongate conductor; (d) said elongate conductor extending through said dielectric substrate to extend beyond said second surface which surrounds a cross-sectional periphery of said elongate conductor, said elongate conductor free from electrical interconnection with said conductive member and terminating in a contact for testing a device under test.
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