초록 ▼

A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorb

A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.

대표청구항 ▼

What is claimed is: 1. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal c

What is claimed is: 1. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator; and a frontal cryopanel across an opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; the cryopump having at least a 20% capture probability of hydrogen, and the second stage cryopanel comprising an array of baffles carrying an adsorbent, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield, and at least some of the adsorbent having a direct line of sight through the opening in the radiation shield. 2. A cryopump as claimed in claim 1 wherein at least about 90% of the surface area of the second stage cryopanel is coated with adsorbent. 3. A cryopump as claimed in claim 1 wherein the second stage cryopanel comprises flat baffles having edges directed toward the radiation shield. 4. A cryopump as claimed in claim 3 wherein the second stage cryopanel further comprises frontal baffles angled outwardly and toward the opening in the radiation shield. 5. A cryopump as claimed in claim 4 wherein the edges of the frontal baffles define an envelope extending toward the opening of the radiation shield, the envelope having a sloped periphery. 6. A cryopump as claimed in claim 5 wherein the frontal baffles are fanned discs. 7. A cryopump as claimed in claim 5, wherein the frontal baffles comprise concentric frustoconical baffles. 8. A cryopump as claimed in claim 5 further comprising rear baffles angled outwardly and away from the opening of the radiation shield, the edges of the rear baffles defining an envelope extending away from the opening of the radiation shield, the envelope having a sloped periphery. 9. A cryopump as claimed in claim 1 wherein the radiation shield comprises sides and a base closing an end of the sides, a junction of the sides and base being sloped to focus gases toward the second stage cryopanel. 10. A cryopump as claimed in claim 9 wherein the second stage cryopanel further comprises rear baffles angled outwardly and away from the opening of the radiation shield. 11. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator; and a frontal cryopanel across an opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; the cryopump having at least a 20% capture probability of hydrogen, and the second stage cryopanel comprising an array of baffles carrying an adsorbent, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield; wherein the radiation shield comprises sides and a base closing an end of the sides, a junction of the sides and base being sloped to focus gases toward the second stage cryopanel; wherein the second stage cryopanel further comprises rear baffles angled outwardly and away from the opening of the radiation shield; wherein the edges of the rear baffles define an envelope which is sloped along its periphery. 12. A cryopump as claimed in claim 1 wherein the frontal cryopanel coversan area greater than a projection of the second stage cryopanel but less than 50% of the opening in the radiation shield. 13. A cryopump as claimed in claim 1 wherein the diameter of the second stage cryopanel is less than 60% of the diameter of the opening in the radiation shield. 14. A cryopump as claimed in claim 1 wherein when the second stage cryopanel comprises an array of discs, the discs fanning to define a generally ball shaped envelope. 15. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator; and a frontal cryopanel across an opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; the cryopump having at least a 20% capture probability of hydrogen, and the second stage cryopanel comprising an array of baffles carrying an adsorbent, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield; wherein when the second stage cryopanel comprises an array of discs, the discs fanning to define a generally ball shaped envelope; wherein the ball shaped envelope comprises a stack of parallel discs, a fan of discs forming a dome at one end of the stack and a fan of discs forming an inverted dome at the other end of the stack. 16. A cryopump as claimed in claim 1 wherein at least 90% of the adsorbent has a direct line of sight to the radiation shield or to the opening in radiation shield. 17. A cryopump as claimed in claim 1 wherein substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in radiation shield. 18. A cryopump as claimed in claim 1 wherein the cryopump has at least a 25% capture probability of hydrogen. 19. A cryopump as claimed in claim 1 wherein the cryopump has at least a 30% capture probability of hydrogen. 20. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator; and a frontal cryopanel across a frontal opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; the second stage cryopanel comprising an array of baffles carrying an adsorbent, including baffles extending toward the frontal opening, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield, and at least some of the adsorbent having a direct line of sight through the opening in the radiation shield; wherein the cryopump has at least a 25% capture probability of hydrogen. 21. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator; and a frontal cryopanel across a frontal opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; the second stage cryopanel comprising an array of baffles carrying an adsorbent, including baffles extending toward the frontal opening, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield, and at least some of the adsorbent having a direct line of sight through the opening in the radiation shield; wherein the cryopump has at least a 30% capture probability of hydrogen. 22. A cryopanel array comprising an array of discs, the discs fanning to define a generally ball shaped envelope, wherein the array of discs includes a fan of discs forming a dome at one end of the envelope and a fan of discs forming an inverted dome at the other end of the envelope. 23. A cryopanel array as claimed in claim 22 comprising: a stack of parallel discs; 24. A cryopanel array as claimed in claim 23 wherein the discs are mounted to a pair of brackets adapted to be mounted to a cryogenic refrigerator heat station. 25. A cryopump comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense low temperature condensing gases, the second stage cryopanel comprising an array of discs, the discs fanning to define a generally ball shaped envelope; a radiation shield surrounding the second stage cryopanel and in thermal contact with a first stage heat sink; and a frontal cryopanel across an opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases; wherein the second stage cryopanel comprises: a stack of parallel discs; a fan of discs forming a dome at one end of the stack; and a fan of discs forming an inverted dome at the other end of the stack. 26. A cryopump as comprising: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with the second stage of the refrigerator to condense lower temperature condensing gases; and a radiation shield surrounding the second stage cryopanel and in thermal contact with the first stage of the refrigerator, the radiation shield comprising sides and a base closing an end of the sides, a junction of the sides and base being sloped to focus gases toward the second stage cryopanel; a frontal cryopanel across an opening in the radiation shield serving as a cryopumping surface for higher condensing temperature gases, the frontal cryopanel covering an area greater than a projection of the second stage cryopanel but less than 50% of the opening in the radiation shield; and rear baffles angled outwardly and away from the opening of the radiation shield, the rear baffles defining an envelope which is sloped along its periphery; the second stage cryopanel comprising: an array of flat baffles having edges directed toward the radiation shield; and frontal baffles angled outwardly and toward the opening in the radiation shield, the edges of the frontal baffles defining an envelope extending toward the opening of the radiation shield, the envelope having a sloped periphery; baffles of the second stage cryopanel carrying an adsorbent, at least about 80% of the adsorbent having a direct line of sight to the radiation shield or to the opening in the radiation shield.