Radiation sensitive refractive index changing composition, pattern forming method and optical material
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G03F-007/00
G03F-007/004
G03F-007/029
출원번호
US-0874391
(2004-06-24)
등록번호
US-7320854
(2008-01-22)
우선권정보
JP-2003-180855(2003-06-25)
발명자
/ 주소
Hanamura,Masaaki
Nishikawa,Michinori
Kumano,Atsushi
출원인 / 주소
JSR Corporation
대리인 / 주소
Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보
피인용 횟수 :
0인용 특허 :
15
초록▼
There is provided a radiation sensitive refractive index changing composition containing an inorganic oxide particle, a polymerizable compound, a radiation sensitive decomposer and an escapable compound. The radiation sensitive decomposer decomposes upon exposure to radiation to form an acid, base o
There is provided a radiation sensitive refractive index changing composition containing an inorganic oxide particle, a polymerizable compound, a radiation sensitive decomposer and an escapable compound. The radiation sensitive decomposer decomposes upon exposure to radiation to form an acid, base or radical, and this decomposed product increases the molecular weight of the polymerizable compound.
대표청구항▼
What is claimed is: 1. A radiation sensitive refractive index changing composition, comprising: (A) an inorganic oxide particle, (B) a polymerizable compound whose cross-linking density is increased by an acid, base or radical, each formed from a radiation sensitive decomposer (C), (C) said radiati
What is claimed is: 1. A radiation sensitive refractive index changing composition, comprising: (A) an inorganic oxide particle, (B) a polymerizable compound whose cross-linking density is increased by an acid, base or radical, each formed from a radiation sensitive decomposer (C), (C) said radiation sensitive decomposer, and (D) 5 to 99 parts by weight of an escapable compound, based on 100 parts by weight of the total components (A) and (B); wherein a film of said radiation sensitive refractive index changing composition exhibits a difference between a refractive index of an unexposed portion and a refractive index of an exposed portion of said film of larger than 0.02. 2. The radiation sensitive refractive index changing composition according to claim 1, wherein the component (C) decomposes upon exposure to radiation to form a decomposed product selected from the group consisting of an acid, a base and a radical, and said decomposed product increases the molecular weight of the component (B). 3. The radiation sensitive refractive index changing composition according to claim 1, wherein said inorganic particle has a particle diameter smaller than the wavelength of light used for the composition. 4. The radiation sensitive refractive index changing composition according to claim 1, wherein said inorganic oxide particle has a particle diameter of 2 μm or less. 5. The radiation sensitive refractive index changing composition according to claim 1, wherein said inorganic oxide particle has a surface modified by a silane coupling agent, a surfactant or a coordination compound having coordination capability to a metal atom of said oxide. 6. The radiation sensitive refractive index changing composition according to claim 1, wherein said component (B) has an ethylenically unsaturated bond, epoxy group, episulfide group, oxetanyl group, oxazolyl group, oxazinyl group or maleimide group, or said component (B) is a polysiloxane having the residual alkoxy group. 7. The radiation sensitive refractive index changing composition according to claim 1, wherein said component (C) is a trichloromethyl-s-triazine, diaryl iodonium salt, triaryl sulfonium salt, quaternary ammonium salt or sulfonic acid ester. 8. The radiation sensitive refractive index changing composition according to claim 1, wherein said component (C) is an optically active carbamate, an amide, an oxime ester, α-aminoacetophenone or cobalt complex. 9. The radiation sensitive refractive index changing composition according to claim 1, wherein said component (C) is an α-diketone, an acyloin ether, a benzophenone, an acetophenone, a quinine, a halogen compound, an acylphosphine oxide or a peroxide. 10. The radiation sensitive refractive index changing composition according to claim 1, wherein said component (D) is a compound which decomposes, sublimes or evaporates to escape through volatilization when it is heated. 11. The radiation sensitive refractive index changing composition according to claim 1, wherein a refractive index of said component (D) is 1.3 to 1.9. 12. A method of forming a refractive index pattern, comprising: applying a refractive index changing composition to a substrate to obtain a coating film, said composition comprising (A) an inorganic oxide particle, (B) a polymerizable compound, (C) a radiation sensitive decomposer, and (D) 5 to 99 parts by weight of an escapable compound, based on 100 parts by weight of the total components (A) and (B), applying radiation to at least part of the coating film, and heating the film to polymerize the polymerizable compound (B) of an exposed portion so as to confine the escapable compound (D) by crosslinking and escape the escapable compound (D) of an unexposed portion. 13. The method according to claim 12, wherein pores are formed in the unexposed portion by the escape of the escapable compound (D) of the unexposed portion through volatilization. 14. A refractive index pattern formed by the method of claim 12 or 13. 15. The refractive index pattern according to claim 14, comprising a first region having or not having pores, and a second region having no pores and a higher refractive index than the first region. 16. An optical material having a refractive index pattern formed by the method of claim 12 or 13. 17. The method according to claim 3, wherein said component (B) is a polymerizable compound whose cross-linking density is increased by an acid, base or radical, each formed from the radiation sensitive decomposer (C). 18. The method according to claim 3, wherein said film exhibits a difference between a refractive index of said unexposed portion and a refractive index of said exposed portion of said film of larger than 0.02. 19. The method according to claim 3, wherein said inorganic oxide particle has a particle diameter of 2 μm or less. 20. The method according to claim 3, wherein a refractive index of said component (D) is 1.3 to 1.9.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (15)
Yasuda Tomokazu,JPX ; Nakamura Kenichi,JPX ; Nakamura Taku,JPX ; Nakamura Kazuhiro,JPX, Anti-reflection film and display device using the same.
Nishimura, Isao; Bessho, Nobuo; Kumano, Atsushi; Shimokawa, Tsutomu; Yamada, Kenji, Composition having refractive index sensitively changeable by radiation and method for forming refractive index pattern.
Pai Daniel Y. (Millbury MA) Rodriguez Stephen S. (Monument Beach MA) Cheetham Kevin J. (Millbury MA) Calabrese Gary S. (North Andover MA) Sinta Roger F. (Woburn MA), Photoimageable resist compositions containing photobase generator.
Chandross, Edwin Arthur; Galvin-Donoghue, Mary Ellen; Neenan, Thomas Xavier; Patel, Sanjay, Photorecording medium, process for fabricating medium, and process for holography using medium.
Noel Stephen Brabbs GB; Andrew Charles Street GB; Karen Goodchild GB; Cornell Chappel, Jr. ; Junaid Ahmed Siddiqui ; Stephen Derek Rogers GB, Polymeric film having a coating layer of a phosphonic acid group containing polymer.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.