초록 ▼

Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such t

Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500�� K to about 2000�� K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.

대표청구항 ▼

We claim: 1. A process for producing a series of micro electro mechanical system (MEMS)-based sensors for high temperature flow path applications wherein sensors are fabricated with polymer derived ceramics (PDCs), comprising the steps of: a) selecting a polymer precursor consisting of silicon, car

We claim: 1. A process for producing a series of micro electro mechanical system (MEMS)-based sensors for high temperature flow path applications wherein sensors are fabricated with polymer derived ceramics (PDCs), comprising the steps of: a) selecting a polymer precursor consisting of silicon, carbon and nitrogen with excellent thermo-mechanical properties at high temperatures; b) incorporating in the polymer precursor a sensor for sensing point measurements in environmental conditions; c) incorporating in the polymer precursor a sensor for determining flow path conditions in said environmental conditions; d) shaping and crosslinking the polymer precursor incorporating the point measurements sensor and the flow path conditions sensor to form an infusible network of polymer components; and e) converting the polymer components to a polymer derived ceramic (PDC) by pyrolysis at temperatures from about 800 to about 1200�� C., to provide MEMS-based sensors for use in high temperature flow path applications, that output to a recording device for accurate, real-time, on-line, in-situ condition monitoring while withstanding environmental conditions up to about 2000�� K without external cooling. 2. The process of claim 1, wherein the high temperature flow path is within a structure selected from the group consisting of gas turbine, power generation plant, and turbine engine. 3. The process of claim 1, wherein the high temperature flow path is at a temperature of from about 1500�� K to about 2000�� K. 4. The process of claim 1, wherein the polymer-derived ceramics are fabricated using materials selected from the group consisting of SiCN, SiBCN and SiAlCN. 5. The process of claim 1, wherein the means for sensing point measurements is adapted for real-time condition monitoring. 6. The process of claim 1, wherein the output to a recording device includes a device selected from the group consisting of paper tablet, computer, compact disc, digital pen, and digital video disc. 7. The process of claim 5, wherein the real-time condition monitoring includes measurements of static and stagnation temperature and pressure. 8. The process of claim 5, wherein the real-time condition monitoring is adapted for measurements of wall heat flux. 9. The process of claim 1, wherein the polymer precursors are selected from at least one of poly[hydrazinomethylsilane] and polysilazane. 10. The process of claim 1, wherein boron and aluminum are incorporated into the polymer network to improve physical, chemical and electrical properties of the polymer-derived ceramics.