Scanning mechanism for scanning probe microscope and scanning probe microscope
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G21K-005/10
G02B-021/26
G02B-021/24
H01J-037/20
출원번호
US-0262537
(2005-10-28)
등록번호
US-7348571
(2008-03-25)
우선권정보
JP-2004-318352(2004-11-01)
발명자
/ 주소
Ue,Yoshihiro
출원인 / 주소
Olympus Corporation
대리인 / 주소
Frishauf, Holtz, Goodman & Chick, P.C.
인용정보
피인용 횟수 :
13인용 특허 :
3
초록▼
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the insulating board, wires for the application of a voltage to the Z-direction moving actuator, and electr
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the insulating board, wires for the application of a voltage to the Z-direction moving actuator, and electrical connecting portions for electrically connecting the wires to the Z-direction moving actuator. The Z-direction moving actuator has a piezoelectric element that can expand and contract along the X-axis. The object is mounted on the free end of the piezoelectric element. The electrical connecting portions are provided at the fixed end of the piezoelectric element.
대표청구항▼
What is claimed is: 1. A scanning probe microscope scanning mechanism for moving an object to be moved along a Z-axis, comprising: a Z stage to move the object along the Z-axis, wherein the Z stage comprises an insulating board, a Z-direction moving actuator fixed to the insulating board, a conduct
What is claimed is: 1. A scanning probe microscope scanning mechanism for moving an object to be moved along a Z-axis, comprising: a Z stage to move the object along the Z-axis, wherein the Z stage comprises an insulating board, a Z-direction moving actuator fixed to the insulating board, a conductive pattern for the insulating board, and an electrical connecting portion to electrically connect the conductive pattern to the Z-direction moving actuator; wherein the object is mounted on a free end of the Z-direction moving actuator, and the electrical connecting portion is attached at a fixed end of the Z-direction moving actuator. 2. A mechanism according to claim 1, further comprising: a fixed base; an X-Y stage, housed in the fixed base, to move the object alone an X-axis and a Y-axis that are perpendicular to each other and to the Z-axis; an X-direction moving actuator extending along the X-axis between the X-Y stage and the fixed base; and a Y-direction moving actuator extending along the Y-axis between the X-Y stage and the fixed base, wherein the X-Y stage comprises: a movable portion that is movable along the X-axis and the Y-axis, a fixed portion located around the movable portion, a pair of first elastic support portions that are located on both sides of the movable portion along the X-axis and that connect the movable portion and the fixed portion, a pair of second elastic support portions that are located on both sides of the movable portion along the Y-axis and that connect the movable portion and the fixed portion, and a third elastic support portion that is located on one side of the movable portion along the Z-axis and that connects the movable portion and the fixed portion, wherein the X-direction moving actuator extends in contact with the first elastic support portions and the fixed base and is capable of expanding and contracting along the X-axis, and the Y-direction moving actuator extends in contact with the second elastic support portions and the fixed base and is capable of expanding and contracting along the Y-axis, and wherein the insulating board of the Z-stage is held on the movable portion of the X-Y stage. 3. A mechanism according to claim 1, wherein the electrical connecting portion comprises a conductive paste. 4. A mechanism according to claim 1, wherein the electrical connecting portion comprises a conductive adhesive. 5. A mechanism according to claim 1, wherein the electrical connecting portion comprises solder that melts at a low temperature. 6. A mechanism according to claim 1, wherein the insulating board comprises a material having a Young's modulus larger than 7��109 Pa. 7. A mechanism according to claim 1, wherein the insulating board comprises a ceramic material. 8. A mechanism according to claim 1, wherein the Z-direction moving actuator comprises two piezoelectric elements which can expand and contract along the Z-axis, and which are located coaxially and respectively extend from the insulating board to opposite sides along the Z-axis. 9. A mechanism according to claim 1, wherein the object comprises a sample to be observed. 10. A mechanism according to claim 1, wherein the object comprises a cantilever. 11. A scanning probe microscope comprising the scanning mechanism according to claim 1. 12. A mechanism according to claim 1, wherein the Z-direction moving actuator comprises a piezoelectric actuator. 13. A mechanism according to claim 12, wherein a contact area between the electrical connecting portion and the piezoelectric element is not more than �� an area of a surface of the piezoelectric element that is in contact with the electrical connecting portion. 14. A mechanism according to claim 12, wherein the piezoelectric element has a mass of not more than 1 g.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (3)
Ando, Toshio; Toda, Akitoshi, Scanning unit and scanning microscope having the same.
Bandy, William Robert; Jamieson, Brian Glenn; Powell, Kevin James; Salsman, Kenneth Edward; Schober, Robert Charles; Weitzner, John; Arneson, Michael R., Ingestible endoscopic optical scanning device.
Bandy, William Robert; Jamieson, Brian Glenn; Powell, Kevin James; Salsman, Kenneth Edward; Schober, Robert Charles; Weitzner, John; Arneson, Michael R., Ingestible endoscopic optical scanning device.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.