초록 ▼

A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparat

A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

대표청구항 ▼

What is claimed is: 1. A purging method for a portable type hermetically sealed container in use of a purging system, comprising: opening said portable type hermetically sealed container connected to said purging system through a sealing member, to communicate an interior of said portable type herm

What is claimed is: 1. A purging method for a portable type hermetically sealed container in use of a purging system, comprising: opening said portable type hermetically sealed container connected to said purging system through a sealing member, to communicate an interior of said portable type hermetically sealed container with an interior of the purging system to thereby form a hermetically sealed space; flushing, during a predetermined time from a start of purge, by supplying a predetermined gas to the interior of said hermetically sealed space at a first supply flow rate and exhausting the gas present in the interior of said hermetically sealed space to the exterior of said hermetically sealed space at a first exhaust flow rate; maintaining, after said predetermined time has elapsed, the supplying of the predetermined gas to the interior of said hermetically sealed space at a second supply flow rate and exhausting the gas present in the interior of said hermetically sealed space to the exterior of said hermetically sealed space at a second exhaust flow rate smaller than said first exhaust flow rate; and closing said portable type hermetically sealed container wherein at said flushing, said first supply flow rate and said first exhaust flow rate is controlled so as to keep a pressure in said hermitically sealed space at a predetermined value, wherein during said maintaining of supplying, said second supply flow rate and said second exhaust flow rate are controlled so as to keep a pressure in said hermitically sealed space at a predetermined value, and controlling said predetermined value of pressure at said flushing step and said predetermined value of pressure at said maintaining step at a constant value. 2. A purging method according to claim 1, wherein said first supply flow rate is greater than said second supply flow rate. 3. A purging method for a portable type hermetically sealed container, comprising: opening said portable type hermetically sealed container to thereby form a hermetically sealed space; supplying a predetermined gas to the interior of said hermetically sealed space and exhausting the gas present in the interior of said hermetically sealed space to the exterior of said hermetically sealed space; and closing said portable type hermetically sealed container; wherein at the supplying of the predetermined gas to the interior of said hermetically sealed space, pressure in the interior of said hermetically sealed space is measured, and a flow rate when the predetermined gas is supplied is controlled on the basis of a result of the measurement of said pressures, wherein the supplying of the predetermined gas to the interior of said hermetically sealed space to the exterior of said hermetically sealed space and exhausting the gas present in the interior of said hermetically sealed space to the exterior of said hermetically sealed space includes: a first operation of supplying the predetermined gas to the interior of said hermetically sealed space at a first supply flow rate and exhausting the gas present in the interior of said hermetically sealed space at a first exhaust flow rate, which is an operation performed for a predetermined time, and a second operation of supplying the predetermined gas to the interior of said hermetically sealed space at a second supply flow rate and exhausting the gas present in the interior of said hermetically sealed space at a second exhaust flow rate smaller than said first exhaust flow rate, which is an operation performed after said predetermined time has elapsed, wherein said first supply flow rate and said second supply flow rate are controlled on the basis of a result of the measurement of said pressure. 4. A purging method according to claim 3, wherein said first supply flow rate is greater than said second supply flow rate.