최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
|
출원번호 | US-0759481 (2004-01-16) |
등록번호 | US-7368925 (2008-05-06) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 11 인용 특허 : 702 |
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.
The invention claimed is: 1. A probe station for testing a device under test, said probe station comprising: (a) a first platen supporting an electrical probe engageable with a first surface of said device under test; (b) a chuck supporting said device under test; (c) a second platen having a top s
The invention claimed is: 1. A probe station for testing a device under test, said probe station comprising: (a) a first platen supporting an electrical probe engageable with a first surface of said device under test; (b) a chuck supporting said device under test; (c) a second platen having a top surface supporting thereon an optical probe to emit light for impingement on said device under test and, alternatively, to detect light emitted by said device under test toward said first platen and propagating on an axis not substantially normal to said first surface; (d) said first platen positioned above said second platen and above said device under test; (e) at least 70% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon. 2. The probe station of claim 1 wherein at least 80% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon. 3. The probe station of claim 1 wherein said first platen is supported for movement relative to said second platen. 4. The probe station of claim 1 wherein at least 85% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon. 5. The probe station of claim 1 wherein at least 90% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon. 6. The probe station of claim 1 wherein at least 95% of the top surface of said second platen terminating in free space when said optical probe is not supported thereon. 7. The probe station of claim 1 wherein said second platen has a greater top surface area than said first platen. 8. The probe station of claim 1 wherein said second platen has a smaller top surface area than said first platen. 9. The probe station of claim 1 wherein said second platen has the same surface area as said first platen. 10. The probe station of claim 1 wherein said first platen is maintained in position with respect to said second platen by gravity such that if said probe station were turned upside down said first platen would freely fall away from said second platen.
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