초록 ▼

In an analytical instrument having a radiation detector, such as an electron microscope with an X-ray detector, a thermoelectric element (such as one or more Peltier junctions) is driven by a cooling power supply to cool the detector and thereby decrease measurement noise. Oil condensates and ice c

In an analytical instrument having a radiation detector, such as an electron microscope with an X-ray detector, a thermoelectric element (such as one or more Peltier junctions) is driven by a cooling power supply to cool the detector and thereby decrease measurement noise. Oil condensates and ice can then form on the detector owing to residual water vapor and vacuum pump oil in the analysis chamber, and these contaminants can interfere with measurement accuracy. To assist in reducing this problem, the thermoelectric element can be powered in the reverse of its cooling mode, thereby heating the detector and evaporating the contaminants. After the detector is cleared of contaminants, it may again be cooled and measurements may resume. Preferably, the thermoelectric element is heated by a power supply separate from the one that provides the cooling power, though it can also be possible to utilize a single power supply to provide both heating and cooling modes.

대표청구항 ▼

What is claimed is: 1. A method of operating an analytical instrument which includes: (1) an analysis chamber, (2) a radiation detector coupled to a heat-conductive mount within the analysis chamber, and (3) a thermoelectric element coupled to the mount, the method including the steps of: a. at lea

What is claimed is: 1. A method of operating an analytical instrument which includes: (1) an analysis chamber, (2) a radiation detector coupled to a heat-conductive mount within the analysis chamber, and (3) a thermoelectric element coupled to the mount, the method including the steps of: a. at least substantially evacuating gas from the analysis chamber; b. supplying current to the thermoelectric element suitable to decrease the temperature of the radiation detector to an operating temperature; c. subsequently supplying current to the thermoelectric element to increase the temperature of the radiation detector to a conditioning temperature which is above the operating temperature; d. maintaining the temperature of the radiation detector at or about the conditioning temperature for a discrete conditioning period; and e. supplying current to the thermoelectric element suitable to return the radiation detector to a temperature at or about the operating temperature. 2. The method of claim 1 wherein the conditioning temperature is above the ambient temperature as measured outside the analysis chamber. 3. The method of claim 1 wherein the conditioning period is less than or equal to 15 minutes. 4. The method of claim 1 further including the step of directing an electron beam into the analysis chamber when the radiation detector is at or about the operating temperature. 5. The method of claim 1 proceeded by the step of advancing the mount into the analysis chamber.