IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0199198
(2002-07-19)
|
등록번호 |
US-7426097
(2008-09-16)
|
발명자
/ 주소 |
- Drewes,Joel
- Witcraft,William
|
출원인 / 주소 |
- Honeywell International, Inc.
|
대리인 / 주소 |
McDonnell Boehnen & Hulbert & Berghoff LLP
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
16 |
초록
▼
An enhanced giant magnetoresistive device, and a method of manufacturing the same. The enhanced giant magnetoresistive (GMR) device includes a substrate over which is formed a seed layer. A buffer-oxide layer is formed over the seed layer. Formed over the buffer-oxide layer is a GMR stack. The GMR s
An enhanced giant magnetoresistive device, and a method of manufacturing the same. The enhanced giant magnetoresistive (GMR) device includes a substrate over which is formed a seed layer. A buffer-oxide layer is formed over the seed layer. Formed over the buffer-oxide layer is a GMR stack. The GMR stack is formed as a three layer sandwich in which the two outside layers are fabricated from ferromagnetic materials, and the inner layer or spacer layer is formed from non-magnetic, conducting materials. The GMR stack may also take the form of spin valves, and/or other GMR stacks. The buffer-oxide layer may be various thicknesses and provide desirable texturing or non-waviness, both of which may allow for a thin spacer layer. Further, the buffer-oxide layer may be configured to prevent N��el-type-orange-peel coupling from dominating RKKY coupling in the GMR device, which may allow for a thin spacer layer.
대표청구항
▼
What is claimed is: 1. A giant magnetoresistive (GMR) device comprising: a substrate; a seed layer formed over the substrate; a buffer-oxide layer formed over the seed layer, wherein the buffer-oxide layer has a thickness of greater than 50 angstroms and less than 100 angstroms, and wherein the buf
What is claimed is: 1. A giant magnetoresistive (GMR) device comprising: a substrate; a seed layer formed over the substrate; a buffer-oxide layer formed over the seed layer, wherein the buffer-oxide layer has a thickness of greater than 50 angstroms and less than 100 angstroms, and wherein the buffer-oxide layer comprises a ferromanganese oxide; a first-ferromagnetic layer formed over the buffer-oxide layer; a spacer layer formed over the first-ferromagnetic layer; and a second-ferromagnetic layer formed over the spacer layer. 2. The GMR device of claim 1, wherein the buffer-oxide layer is configured to prevent N��el-type-orange-peel coupling from dominating RKKY coupling in the GMR device. 3. The GMR device of claim 1, wherein the relative thickness of the buffer-oxide layer to the spacer layer produces a giant magnetoresistive effect from about 7% to about 15% ΔR/R. 4. The GMR device of claim 1, wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms. 5. The GMR device of claim 1, wherein locating the buffer-oxide layer over the seed layer and under the first-ferromagnetic layer produces a first substantially smooth interface between the first-ferromagnetic layer and the spacer layer. 6. The GMR device of claim 5, wherein locating the buffer-oxide layer over the seed layer and under the first-ferromagnetic layer produces a second substantially smooth interface between the spacer layer and the second-ferromagnetic layer. 7. The GMR device of claim 1 wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms, and whereby the GMR device provides a magnetic sensitivity from about 5 Oe to about 1 k Oe. 8. The GMR device of claim 7, wherein the spacer layer has a thickness of about 16 angstroms to about 23 angstroms, and wherein the first-ferromagnetic layer ferromagnetically couples with the second-ferromagnetic layer from about 35 Oe to about 0 Oe. 9. The GMR device of claim 1, whereby the buffer-oxide layer provides for a first smooth interface between the first-ferromagnetic layer and the spacer layer. 10. The GMR device of claim 9, whereby the buffer-oxide layer provides for a second smooth interface between the spacer layer and the second-ferromagnetic layer, wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms, and whereby the GMR device provides a giant magnetoresistive effect from about 7% to about 15% ΔR/R. 11. The GMR device of claim 1, whereby the buffer-oxide layer provides for a second smooth interface between the spacer layer and the second-ferromagnetic layer. 12. The GMR device of claim 1, further comprising an antiferromagnetic layer formed over the second-ferromagnetic layer, wherein the second-ferromagnetic layer ferromagnetically couples with the antiferromagnetic layer. 13. The GMR device of claim 12, wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms. 14. The GMR device of claim 12, wherein the relative thickness of the buffer-oxide layer to the spacer layer produces a giant magnetoresistive effect from about 7% to about 15% ΔR/R. 15. The GMR device of claim 12, wherein the buffer-oxide layer is configured to prevent N��el-type-orange-peel coupling from dominating RKKY coupling in the GMR device. 16. The GMR device of claim 12, wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms, whereby the GMR device provides a magnetic sensitivity from about 5 Oe to about 1 k Oe. 17. The GMR device of claim 16, wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms, and wherein the first-ferromagnetic layer ferromagnetically couples with the second-ferromagnetic layer from about 35 Oe to about 0 Oe. 18. The GMR device of claim 12, whereby the buffer-oxide layer provides a first smooth interface between the first-ferromagnetic layer and the spacer layer. 19. The GMR device of claim 18, whereby the buffer-oxide layer provides a second smooth interface between the spacer layer and the second-ferromagnetic layer, and wherein the spacer layer has a thickness of about 16 angstroms to about 60 angstroms, and whereby the GMR device provides a giant magnetoresistive effect from about 7% to about 15% ΔR/R. 20. The GMR device of claim 12, wherein the buffer-oxide layer provides a second smooth interface between the spacer layer and the second-ferromagnetic layer. 21. The GMR device of claim 1, wherein the seed layer is deposited directly on the substrate, the buffer-oxide layer is deposited directly on the seed layer, the first ferromagnetic layer is deposited directly on the buffer-oxide layer, the spacer layer is formed directly on the first ferromagnetic layer, and the second ferromagnetic layer is formed directly on the spacer layer.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.