[특허]Systems and methods for detecting contaminants

Entegris, Inc.

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특허 상세정보

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Systems and methods for detecting contaminants

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01N-001/22
미국특허분류(USC)	073/023.2; 073/028.01; 073/028.04; 073/031.02; 073/031.03; 073/031.05
출원번호	US-0001669 (2004-12-01)
등록번호	US-7430893 (2008-10-07)
발명자 / 주소	Grayfer,Anatoly Lobert,J��rgen Michael Goodwin,William Belanger,Frank Vincent Sergi,John E. Phelps,Mark C.
출원인 / 주소	Entegris, Inc.
대리인 / 주소	Hamilton, Brook, Smith & Reynolds, P.C.
인용정보	피인용 횟수 : 8 인용 특허 : 9

초록

The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

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What is claimed: 1. A method for detecting contaminants in a gas flow in a semiconductor processing facility, using a gas sampling unit, said method comprising the steps of: providing a gas sampling unit comprising an entry manifold for dividing said gas flow into at least a first sample flow and a second sample flow; an exit manifold having an input end for receiving said at least the first sample flow and the second sample flow after passing through a plurality of sampling devices, and an output end, wherein the plurality of sampling devices comprises a first dry sampling device and a second sampling device; a first wet impinger having an input coupled to at least the first or the second sample flow on the entry manifold, said first wet impinger further having an output; and a second wet impinger having an input coupled to said output of said first wet impinger and further having an output coupled to the exit manifold; receiving a gas flow associated with a semiconductor processing tool, the gas flow containing at least one contaminant; dividing said gas flow into a first sample flow and a second sample flow; passing said first sample flow through a first dry sampling device for detecting said contaminant; passing the second sample flow through a second sampling device; and determining a contaminant within the gas flow. 2. The method of claim 1 wherein the method further comprises: passing at least one sample flow through a first trap for trapping a contaminant including a condensable compound, or an organic compound or a refractory compound. 3. The method of claim 1 further comprising: passing said first sample flow and said second sample flow through a first dry trap and a first fibrous media trap, respectively, followed by receiving said first sample flow and second sample flow by the input end of the exit manifold. 4. The method of claim 3 wherein said gas sampling unit further comprises: a second dry trap for receiving a third sample flow from the entry manifold, said second dry trap further coupled to said exit manifold for facilitating passage of said third sample flow therethrough; and a second fibrous media trap for receiving a fourth sample flow from said entry manifold, said second fibrous media trap further coupled to said exit manifold for facilitating passage of said fourth sample flow therethrough. 5. The method of claim 1 wherein said gas sampling unit further comprises: a pump coupled to said unit, said pump causing said at least first sample flow and said second sample flow to pass through said sampling devices. 6. The method of claim 1 wherein said first wet impinger and said second wet impinger are used to produce a result indicative of the difference between a measured value of NO, in said first wet impinger and a measured value of NO, in said second wet impinger, said difference representing an amount of ionic NO, present in said gas flow. 7. The method of claim 6 wherein said first sampling device contains a dry collection material selected from the group consisting of acid treated quartz fibrous media, ion exchange resin, zeolites, silica gel, and acid treated pad. 8. The method of claim 1 wherein said gas sampling unit further comprises a controller. 9. The, method of claim 1 further comprising: shipping said gas sampling unit to an analysis facility after a sampling interval. 10. The method of claim 1 further comprising connecting said gas sampling unit to a communications network. 11. A system for measuring a contaminant in a gas flow associated with a semiconductor processing tool, said system comprising: an input in fluid communication with said gas flow associated with a semiconductor processing tool; a plurality of sampling devices, said plurality of sampling devices comprising a first dry sampling device and a second sampling devices, each said sampling device comprising an input end coupled to the input and an output port; an exit manifold having an input end in fluid communication with at least the first dry sampling device and the second sampling device; a vacuum pump coupled to an exit manifold output port for causing said gas flow to pass through said first dry sampling device; a pressure regulator coupled to said exit manifold, said pressure regulator for maintaining a determined pressure of said gas flow within said system; and a collection media that retains a contaminant removed from the gas flow. 12. The system of claim 11 further comprising: a first fibrous media trap comprising: an input end coupled to an entry manifold output port that receives said gas flow; and a trap collection media for retaining contaminants. 13. The system of claim 11 further comprising: a first bypass/purge valve; and a second bypass/purge valve, said first and second bypass/purge valves operating cooperatively for allowing said gas flow to bypass an entry manifold when said valves are in a bypass position, respectively, and for allowing said gas flow to pass through said entry manifold when said valves are in a run position, respectively. 14. The system of claim 11 further comprising: a controller for controlling operation of said system. 15. The system of claim 11 further comprising: a network interface for communicatively coupling said system to a network. 16. The system of claim 11 further comprising a housing in which the system is housed. 17. The system of claim 11 further comprising: a first wet impinger having an input coupled to a third one of a plurality of entry manifold output ports and further having a first wet impinger output port; and a second wet impinger having an input coupled to said output of said first wet impinger and further having a second wet impinger output coupled to said exit manifold. 18. The method of claim 17 wherein said first wet impinger and said second wet impinger contain deionized water. 19. The system of claim 18 further comprising: a second dry trap; and a second fibrous media trap. 20. The system of claim 11 wherein said first wet impinger and said second wet impinger are used to produce a result indicative of the difference between a measured value of ionic NOx in said first wet impinger and a measured value of ionic NOx in said second wet impinger, said difference representing the actual amount of atmospheric ionic NOx present in a sample of said gas flow. 21. The system of claim 11 wherein said first sampling device includes a dry collection media selected from the group consisting of acid treated quartz fibrous media, ion exchange resin, zeolites, silica gel, and acid treated media. 22. The system of claim 11 further comprising: a detector having an output signal that changes in response to the presence of at least one of said contaminants on a surface of said detector. 23. The system of claim 22 wherein said surface has a coating to facilitate retention of said at least one of said contaminants. 24. The system of claim 22 wherein the detector is an acoustic detector. 25. The system of claim 11 further comprising a detector that initiates operation of the first dry sampling device. 26. The system of claim 11 further comprising a detector that terminates operation of the sampler. 27. The system of claim 11 wherein the system comprises a handheld device having a display. 28. The system of claim 11 further comprising a trap module that is removeably inserted into a system housing. 29. The system of claim 28 wherein the trap module includes an acid trap, a base trap and an organic compound trap. 30. The system of claim 11 further comprising a valve system and a controller connected to the valve system to automatically control gas flow within the system. 31. A method for detecting contaminants in a gas flow in a cleanroom environment, using a gas sampling unit, said method comprising the steps of: receiving a gas flow containing at least one contaminant at an entry manifold; dividing said gas flow into a first sample flow and a second sample flow; passing said first sample flow through a first wet impinger sampling device for detecting said contaminant to an exit manifold; passing the second sample flow through a second sampling device to the exit manifold; and determining a contaminant within the gas flow. 32. The method of claim 31 wherein said method further comprises: passing said second sample flow through a first fibrous media trap for detecting a contaminant. 33. The method of claim 31 wherein said gas sampling method further comprises providing: the exit manifold, the exit manifold having an input end for receiving said first sample flow and said second sample flow after passing through a first dry trap and a further sample flow after passing through a first fibrous media trap, respectively, said exit manifold further having an output end. 34. The method of claim 33 wherein said gas sampling method further comprises: a second dry trap for receiving a third sample flow from the entry manifold, said second dry trap further coupled to said exit manifold for facilitating passage of said third sample flow therethrough; and a second fibrous media sample flow trap for receiving a fourth sample flow from said entry manifold, said second fibrous media trap further coupled to said exit manifold for facilitating passage of fourth sample flow therethrough. 35. The method of claim 31 wherein said gas sampling method further comprises providing: a pump coupled to said unit, said pump causing said first sample flow and said second sample flow to pass through said sampling devices. 36. The method of claim 31 further comprising using said first wet impinger and a second wet impinger to produce a result indicative of the difference between a measured value of NO, in said first wet impinger and a measured value of NO, in said second wet impinger, said difference representing an amount of ionic NO, present in said gas flow. 37. The method of claim 31 wherein said gas sampling method further comprises providing a controller. 38. The method of claim 31 further comprising providing a first dry sampling device with a dry collection material selected from the group consisting of acid treated quartz fibrous media, ion exchange resin, zeolites, silica gel, and acid treated media.

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이 특허를 인용한 특허 피인용횟수: 8

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Systems and methods for detecting contaminants

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이 특허에 인용된 특허 (9)

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