최소 단어 이상 선택하여야 합니다.
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다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
---|---|
국제특허분류(IPC7판) |
|
출원번호 | US-0820519 (2007-06-20) |
등록번호 | US-7436170 (2008-10-14) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 3 인용 특허 : 711 |
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between an
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
The invention claimed is: 1. A probe station for probing a test device, said probe station comprising: (a) a chuck having a laterally-extending supporting surface for supporting said test device; (b) a enclosure generally enclosing said supporting surface, said chuck being laterally movable relativ
The invention claimed is: 1. A probe station for probing a test device, said probe station comprising: (a) a chuck having a laterally-extending supporting surface for supporting said test device; (b) a enclosure generally enclosing said supporting surface, said chuck being laterally movable relative to said enclosure; (c) said enclosure including a bendable wall interconnected with said chuck, said wall comprising bendably extensible and retractable material enabling said wall to bendably accommodate movement of said chuck in multiple lateral directions angularly disposed relative to each other so as to operably position said test device for probing, at least major portions of said bendable wall being composed of electrically-conductive material. 2. The probe station of claim 1 wherein at least major portions of said bendable wall are composed of electrically conductive material. 3. The probe station of claim 1 wherein at least major portions of said bendable wall are composed of fluid-impervious material. 4. The probe station of claim 1 said bendably extensible and retractable material enabling said wall to bendably accommodate movement of said chuck assembly in multiple lateral directions perpendicular to each other.
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