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Piezoelectric micro-transducers, methods of use and manufacturing methods for same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/113
출원번호 US-0147031 (2005-06-07)
등록번호 US-7453187 (2008-11-18)
발명자 / 주소
  • Richards,Robert F.
  • Bahr,David F.
  • Richards,Cecilia
출원인 / 주소
  • Washington State University Research Foundation
대리인 / 주소
    Donohue,Michael J.
인용정보 피인용 횟수 : 25  인용 특허 : 55

초록

Various micro-transducers incorporating piezoelectric materials for converting energy in one form to useful energy in another form are disclosed. In one embodiment, a piezoelectric micro-transducer can be operated either as a micro-heat engine, converting thermal energy into electrical energy, or as

대표청구항

We claim: 1. A method of generating electrical energy with a micro-transducer having a chamber containing fluid, wherein a surface of the chamber comprises a piezoelectric generator, the method comprising: transferring heat into the micro-transducer to expand the fluid and cause the piezoelectric g

이 특허에 인용된 특허 (55)

  1. Buchanan Ronnie J. ; Butterfield ; Jr. Charles A., Apparatus and method for generating electricity from energy in a flowing stream of fluid.
  2. Godshalk Kimberly M. (Beaverton OR) Murdock Bruce (Beaverton OR), Application of micromechanical machining to cooling of integrated circuits.
  3. Jacob N. Wohlstadter ; James Wilbur ; George Sigal ; Mark Martin ; Alan Fischer ; Larry R. Helms ; Ramin Darvari, Assay sonication apparatus and methodology.
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  5. Tadayon, Pooya; Monzon, Franklin G.; Dujari, Prateek, Electrical energy-generating heat sink system and method of using same to recharge an energy storage device.
  6. Pelrine, Ronald E.; Kornbluh, Roy D.; Eckerle, Joseph Stephen; Pei, Qibing, Electroactive polymer thermal electric generators.
  7. Taft Charles K. (Durham NH) Burke Timothy S. (Newmarket NH), Electrofluid converters.
  8. Donald R. Moles, Electroosmotic flow controlled microfluidic devices.
  9. Carroll Charles B., Frequency multiplying piezoelectric generators.
  10. Reichel ; Pavel ; Kafunek ; Pavel ; Kovar ; Jiri ; Pokorny ; Oldrich ; Zu na ; Jaroslav ; Kratina ; Jindrich ; Pellant ; Michal, Heat sink cooled, semiconductor device assembly having liquid metal interface.
  11. Hammel Ernst,ATX ; Holzer Hermann,ATX, Heat sink for electric and/or electronic devices.
  12. Spaight ; Ronald Neil, Heat transfer mechanism for integrated circuit package.
  13. Weichart Helmut (Hanover DEX) Technau Manfred (Laatzen DEX), Hydrophone.
  14. Layton Wilber T. (San Diego CA) Morange Blanquita O. (San Diego CA) Torres Angela M. (Vista CA) Roecker James A. (Escondido CA), Integrated circuit package having a liquid metal-aluminum/copper joint.
  15. Rex M Baker, III, Interruptible thermal bridge system.
  16. Dolbear Thomas P. (Austin TX) Mackay Colin A. (Austin TX) Nelson Richard D. (Austin TX), Liquid metal paste for thermal and electrical connections.
  17. Calmidi, Varaprasad V.; Johnson, Eric A.; Stutzman, Randall J., Liquid metal thermal interface for an electronic module.
  18. Walsh Myles A. (Falmouth MA), Method and apparatuses for heat transfer.
  19. Roman M. Katchmar CA, Method and device for heat dissipation in an electronics system.
  20. Young Robert M. (Pittsburgh PA) Freidhoff Carl B. (Murrysville PA) Polla Dennis L. (Brooklyn Park MN) Schiller Peter J. (Plymouth MN), Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases.
  21. Polla Dennis L. (Brooklyn Park MN) Tamagawa Takashi (Minneapolis MN), Microdevice for sensing a force.
  22. Polla Dennis L. (Brooklyn Park MN), Microdevice with ferroelectric for sensing or applying a force.
  23. John W. Smith, Microelectronic connections with liquid conductive elements.
  24. Smith John W., Microelectronic connections with liquid conductive elements.
  25. Stemme Goran,SEX ; Kalvesten Edvard,SEX, Micromachined gas-filled chambers and method of microfabrication.
  26. Bowman Lyn ; McEntee Jarlath, Microminiature stirling cycle cryocoolers and engines.
  27. Epstein Alan H. ; Senturia Stephen D. ; Waitz Ian A. ; Lang Jeffrey H. ; Jacobson Stuart A. ; Ehrich Fredric F. ; Schmidt Martin A. ; Ananthasuresh G. K. ; Spearing Mark S. ; Breuer Kenneth S. ; Nagl, Microturbomachinery.
  28. Glezer Ari ; Allen Mark G., Miniature reciprocating combustion-driven machinery.
  29. Polla Dennis L. ; Kim Joon Han,KRX, PZT microdevice.
  30. Discenzo Frederick M., Parasitically powered sensing device.
  31. Roberts Walter M. (Buffalo NY), Piezo electric apparatus for generating electricity.
  32. Kolm Henry H. (Wayland MA) Kolm Eric A. (Brookline MA), Piezoelectric acousto-electric generator.
  33. Buschulte Rainer (Bad Schnborn DEX), Piezoelectric actuator.
  34. Uhl Thomas (Selb DEX) Frisch Herbert (Vienna ATX), Piezoelectric bending transducer and the use thereof.
  35. Takeuchi Yukihisa (Nishikamo-Gun JPX) Kimura Koji (Nagoya JPX) Kurashina Mitsuru (Nagoya JPX), Piezoelectric device.
  36. Kolm Eric A. (Brookline MA) Kolm Henry H. (Wayland MA), Piezoelectric fluid-electric generator.
  37. Nilsson Jan (Ronninge SW) Swanson Rune (Ljungsbro SW), Piezoelectric generator operated by fluid flow.
  38. Cragg William D. (Harlow GB2) Lawson Anthony N. (London GB2), Piezoelectric high polymer, multilayer electro-acoustic transducers.
  39. Richards,Robert F.; Bahr,David; Richards,Cecilia, Piezoelectric micro-transducers, methods of use and manufacturing methods for same.
  40. Smits Johannes G. (22 Farrell St. Quincy MA 02169), Piezoelectric micropump with microvalves.
  41. Culp Gordon W. (Van Nuys CA), Piezoelectric pump.
  42. Nakamura Takeshi (Uji JPX) Ando Kenji (Kawasaki JPX) Matsumoto Ikuo (Nagaokakyo JPX), Piezoelectric vibrator and manufacturing method thereof.
  43. Takeuchi Yukihisa,JPX ; Nanataki Tsutomu,JPX, Piezoelectric/electrostrictive film element with a diaphram having at least one stress releasing end section.
  44. Takeuchi Yukihisa,JPX ; Nanataki Tsutomu,JPX ; Kimura Koji,JPX ; Takahashi Nobuo,JPX, Piezoelectric/electrostrictive film-type element and method for producing the same.
  45. Kenny, Jr., Thomas William; Goodson, Kenneth E.; Santiago, Juan G.; Everett, Jr., George Carl, Power conditioning module.
  46. Knecht Thomas A. (Minnetonka MN), Pressure transducer.
  47. Babuka Robert (Vestal Endwell NY) Heath Robert E. (Endwell NY) Saxenmeyer ; Jr. George J. (Apalachin NY) Schultz Lewis K. (Sayre PA), Restorable backbond for LSI chips using liquid metal coated dendrites.
  48. White Richard M. (Berkeley CA) Lee Seung (Berkeley CA) Bustillo James M. (Castro Valley CA) Campbell Gregory A. (Pleasanton CA), Self-excited microelectromechanical device.
  49. Bullock John D. (State College PA), Square and rectangular electroacoustic bender bar transducer.
  50. Gillett John B. (Woodstock NY), Temperature actuated switch for cryo-coolers.
  51. Atwood Eugene R. ; Benenati Joseph A. ; DiGiacomo Giulio ; Quinones Horatio, Thermal enhancement approach using solder compositions in the liquid state.
  52. Trautman, Mark A.; Koeneman, Paul B., Thermal performance enhancement of heat sinks using active surface features for boundary layer manipulations.
  53. Ladd Michael M. (Renton WA), Variable heat conductance heat exchanger.
  54. Boyd Edward S. (Yorba Linda CA), Variable heat transfer device.
  55. Chang David B. (Tustin CA), Wind power generator and velocimeter.

이 특허를 인용한 특허 (25)

  1. Yang, Wei; Eickhoff, Steven J.; Zhang, Chunbo; Gu, Alex; Zook, J. David, Apparatus and method for thermal management using vapor chamber.
  2. Hsu, Sean Nean, Apparatus for generating energy from a fluid flow induced movement of a surface structure relative to an opening to a cavity in a frame.
  3. Kurihara, Kazuaki; Hida, Masaharu; Yamanaka, Kazunori, Electric power generation device, electric power generation method, and electric power generation device manufacturing method.
  4. Boland, Justin S.; Ronald, Brian M.; Kwan, Kin Ming; Eber, Jordan H., Electrostatic power generator cell and method of manufacture.
  5. Lim, Ji-hyuk, Energy harvesting device using pyroelectric material.
  6. Sherrit, Stewart; Walkemeyer, Phillip E.; Hall, Jeffrey L.; Lee, Hyeong Jae; Colonius, Tim; Tosi, Phillipe; Kim, Namhyo; Sun, Kai; Corbett, Thomas Gary; Arrazola, Alvaro Jose, Flow energy piezoelectric bimorph nozzle harvester.
  7. Banister, Mark; Fanter, Dale L., Fluid metering device.
  8. Allaei, Daryoush, Fluid power generation system having a generator with an electrical-charge-producing material.
  9. Banister, Mark; Clark, Raymond; Coiner, Erich; Geronov, Yordan M.; McWilliams, Mark D.; Van Veen, Mark A., High surface area polymer actuator with gas mitigating components.
  10. Banister, Mark; Bloom, William G.; Geronov, Yordan M.; McWilliams, Mark D.; Swenson, David; Van Veen, Mark A., Low profile actuator and improved method of caregiver controlled administration of therapeutics.
  11. Bergstedt, Steven W., Microfluidic pump.
  12. Moler, Jeffery B, Mountable arm smart material actuator and energy harvesting apparatus.
  13. Moler, Jeffery B., Multiple arm smart material actuator with second stage.
  14. Xu, Tian-Bing; Siochi, Emilie J.; Zuo, Lei; Jiang, Xiaoning; Kang, Jin Ho, Multistage force amplification of piezoelectric stacks.
  15. Jonckers, Tim Hugo Maria; Raboisson, Pierre Jean-Marie Bernard; Vandyck, Koen; Pelcman, Michael; Sund, Bengt Christian; Wahling, Horst Jurgen; Passos Pinho, Pedro Manuel; Winqvist, Anna; Nilsson, Karl Magnus, Phosphoramidate derivatives of nucleosides.
  16. Xu, Tian-Bing; Kang, Jin Ho; Siochi, Emilie J.; King, Glen C., Pyroelectric sandwich thermal energy harvesters.
  17. Moler, Jeffery B, Small scale smart material actuator and energy harvesting apparatus.
  18. Moler, Jeffery; Dickey, Aaron, Smart material actuator capable of operating in three dimensions.
  19. Moler, Jeffery; Dickey, Aaron, Smart material actuator with enclosed compensator.
  20. Banister, Mark; Geronov, Yordan; McGrath, Dominic, Smart polymer materials with excess reactive molecules.
  21. Kaltenbacher, Dominik; Schäfer, Armin; Schächtele, Jonathan; Zenner, Hans; Goll, Erich; Dahlhoff, Ernst; Muralt, Paul; Conde, Janine, Sound transducer for insertion in an ear.
  22. Kaltenbacher, Dominik; Schäfer, Armin; Schächtele, Jonathan; Zenner, Hans; Goll, Erich; Dalhoff, Ernst; Muralt, Paul; Conde, Janine, Sound transducer for insertion in an ear.
  23. Banister, Mark; McGrath, Dominic, Super elastic epoxy hydrogel.
  24. Penciu, Cristian, Systems and methods for collecting solar energy for conversion to electrical energy with piezoelectric generators.
  25. Skotnicki, Thomas, Thermoelectric generator.
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