초록 ▼

The invention includes probe interposers and methods of fabricating pose interposers. In one implementation, a method of fabricating a probe interposer includes providing a substrate having a frontside and a backside. Probe tips are lithographically patterned on the substrate frontside. The probe ti

The invention includes probe interposers and methods of fabricating pose interposers. In one implementation, a method of fabricating a probe interposer includes providing a substrate having a frontside and a backside. Probe tips are lithographically patterned on the substrate frontside. The probe tips have electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed. Mechanical hard stops are lithographically patterned on the substrate frontside. The mechanical hard stops have outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer. The invention includes probe interposers independent of method of fabrication.

대표청구항 ▼

The invention claimed is: 1. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit

The invention claimed is: 1. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising a recess formed therein relative its outer surface and which extends only partially into the at least one mechanical hard stop from its outer surface. 2. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer; and multiple fiducial alignment features received on an individual of the mechanical hard stops, said individual of the mechanical hard stops comprising multiple recesses formed therein relative its outer surface, individual of the multiple fiducial alignment features being received within individual of said multiple recesses. 3. The probe interposer of claim 2 wherein said multiple recesses extend only partially into said individual of the mechanical hard stops from its outer surface. 4. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and a z-axis detection mechanism on the substrate frontside, the z-axis detection mechanism extending elevationally outward on the substrate frontside a greater distance than the probe tips extend elevationally outward on the substrate frontside. 5. The probe interposer of claim 4 wherein the z-axis detection mechanism is normally open. 6. The probe interposer of claim 4 wherein the z-axis detection mechanism comprises an electromechanical switch comprising a first member and a second member, at least one of the first and second members being repeatably moveable towards and away from the other of the first and second members for making mechanical contact with the other to close and open said switch, said at least one of the first and second members being biased to an open position. 7. The probe interposer of claim 4 comprising only a single z-axis detection mechanism. 8. The probe interposer of claim 4 comprising multiple of said z-axis detection mechanisms. 9. The probe interposer of claim 4 comprising mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, the z-axis detection mechanism extending elevationally outward on the substrate frontside a greater distance than the mechanical hard stops extend elevationally outward on the substrate frontside. 10. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising multiple recesses formed therein relative its outer surface. 11. The probe interposer of claim 10 wherein said multiple recesses extend only partially into the at least one of the mechanical hard stops from its outer surface. 12. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising a recess formed therein relative its outer surface, a circuit component received within the recess. 13. The probe interposer of claim 12 wherein the circuit component is received within the recess entirely inwardly of the outer surface. 14. The probe interposer of claim 12 wherein said recess extends only partially into the at least one of the mechanical hard stops from its outer surface. 15. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising a recess formed therein relative its outer surface, an integrated circuit received within the recess. 16. The probe interposer of claim 15 wherein the integrated circuit is received within the recess entirely inwardly of the outer surface. 17. The probe interposer of claim 15 wherein said recess extends only partially into the at least one of the mechanical hard stops from its outer surface. 18. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer; and a fiducial alignment feature received on at least one of the mechanical hard stops, at least one of the mechanical hard stops comprising a recess formed therein relative its outer surface, the fiducial alignment feature being received within the recess. 19. The probe interposer of claim 18 wherein said recess extends only partially into the at least one of the mechanical hard stops from its outer surface. 20. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising a mechanical mount feature, the mechanical mount feature comprising a recess formed relative the outer surface, the recess comprising an elongated trench, the mechanical hard stop in which the elongated trench is received comprising outermost lateral edges, the elongated trench extending to the outermost lateral edges. 21. A probe interposer comprising: a substrate comprising a frontside and a backside; probe tips on the substrate frontside, the probe tips having electrically conductive outer ends configured to mechanically and electrically engage conductive contact surfaces of a circuit substrate to be probed; and mechanical hard stops on the substrate frontside, the mechanical hard stops having outer surfaces configured to mechanically engage some surface of the circuit substrate during probe of the circuit substrate with the probe interposer, at least one of the mechanical hard stops comprising a recess formed therein relative its outer surface, the mechanical hard stop in which the recess is received comprising outermost lateral edges, the recess extending to at least one of said outermost lateral edges. 22. The probe interposer of claim 21 wherein the recess extends to at least two of said outermost lateral edges. 23. The probe interposer of claim 21 wherein the recess extends only partially into the at least one of the mechanical hard stops from its outer surface. 24. The probe interposer of claim 23 wherein the recess extends to at least two of said outermost lateral edges.