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[미국특허] Partial vacuum environment imprinting 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B28B-011/08
출원번호 US-0695263 (2007-04-02)
등록번호 US-7462028 (2008-12-09)
발명자 / 주소
  • Cherala,Anshuman
  • Lad,Pankaj B.
  • McMackin,Ian M.
  • Choi,Byung Jin
출원인 / 주소
  • Molecular Imprints, Inc.
대리인 / 주소
    Kordzik,Kelly K.
인용정보 피인용 횟수 : 53  인용 특허 : 18

초록

The present invention is directed towards a method and a system to create and maintain a desired environment in the vicinity of a nano-imprint lithography template by creation of a partial vacuum using channels or holes in the template holding the nano-imprint mold.

대표청구항

The invention claimed is: 1. A system for creating a specific environment during a nanolithography imprinting process, comprising: a substrate disposed on a chuck surface; a template stage having an air bearing reference surface; an air bearing surface disposed around the substrate and interfacing

이 특허에 인용된 특허 (18) 인용/피인용 타임라인 분석

  1. Uziel, Yoram, Air bearing-sealed micro-processing chamber.
  2. Fritz Alton L. ; Fritz Michael L. ; Fritz Kenneth A. ; Gasiorek Edward J. ; Case Wayne L., Apparatus for accurately forming plastic sheet.
  3. Kunkel Hans-Achim (Reichelsheim DEX), Apparatus for adhering thermally-softenable plastic particles into a plastic body.
  4. Wymer Robert L. (Poland OH) Prater Perry (Shreveport LA), Apparatus for drying a natural gas stream.
  5. Medwed Emmerich (Wolfertschwenden DEX), Apparatus for producing containers from thermoplastic sheet material.
  6. Choi,Byung J.; Voisin,Ronald D.; Sreenivasan,Sidlgata V.; Watts,Michael P. C.; Babbs,Daniel; Meissl,Mario J.; Bailey,Hillman; Schumaker,Norman E., Chucking system for modulating shapes of substrates.
  7. Alf Springer DE; Frank Reuther DE; Lutz Mueller DE, Device and method for separating a shaped substrate from a stamping tool.
  8. Choi, Byung Jin; Meissl, Mario J.; Sreenivasan, Sidlagata V.; Watts, Michael P. C., Formation of discontinuous films during an imprint lithography process.
  9. Le Touche Roger (Ecquevilly FRX), Hot compacting device for the production of parts requiring simultaneous pressure and temperature rises.
  10. Thein Joe K. (Torrance CA) Mejia Mauricio A. (Los Angeles CA), Method and apparatus for shaping, forming, consolidating and co-consolidating thermoplastic or thermosetting composite p.
  11. Laquer Henry Louis, Method for deforming solids in a controlled atmosphere and at adjustable rates, pressures and temperature.
  12. Motoyuki Tsuihiji JP; Hirofumi Iinuma JP, Method of filtering a fluid.
  13. Davison John E ; Weiner Kurt W, Microchamber.
  14. Siler Todd L. (Cambridge MA), Process of and apparatus for producing design patterns in materials.
  15. Noji, Nobuharu; Sobukawa, Hiroshi; Nagayama, Masami; Ono, Koji; Saito, Mutsumi, Processing apparatus to be sealed against workpiece.
  16. Bae Young C. (Pleasanton CA) Soane David S. (Piedmont CA) Crocker Charles (San Francisco CA), Rapid prototype three dimensional stereolithography.
  17. Engelsberg Audrey C., Removal of surface contaminants by irradiation using various methods to achieve desired inert gas flow over treated surf.
  18. Hudkins Patrick E. ; Parekh Vinod, Vacuum compression method for forming molded thermoplastic floor mat having a "Class A" finish.

이 특허를 인용한 특허 (53) 인용/피인용 타임라인 분석

  1. Choi, Byung-Jin; Sreenivasan, Sidlgata V., Capillary imprinting technique.
  2. Lofy, John D.; Inaba, Masahiko, Climate control assembly.
  3. Brykalski, Michael J.; Marquette, David; Vidojevski, Robert, Climate controlled bed assembly with intermediate layer.
  4. Brykalski, Michael J.; Marquette, David; Vidojevski, Robert, Climate controlled bed assembly with intermediate layer.
  5. Lofy, John, Climate controlled beverage container.
  6. Lofy, John, Climate controlled seating assembly with humidity sensor.
  7. Lofy, John, Climate controlled seating assembly with sensors.
  8. Brykalski, Michael J.; Marquette, David; Terech, John; Vidojevski, Robert, Climate-controlled topper member for beds.
  9. Lofy, John, Condensation and humidity sensors for thermoelectric devices.
  10. Lofy, John D., Condensation and humidity sensors for thermoelectric devices.
  11. Inaba, Masahiko; Lindeman, Keith Alan; Lofy, John D., Conductive convective climate controlled seat.
  12. Petrovski, Dusko; Steele, Barry; Brykalski, Michael; Terech, John; Marquette, David, Control schemes and features for climate-controlled beds.
  13. Walsh, Ryan, Convective heater.
  14. Schumaker, Philip D., Drop pattern generation for imprint lithography.
  15. Schumaker, Philip D., Drop pattern generation with edge weighting.
  16. Brykalski, Michael J.; Terech, John; Petrovski, Dusko, Environmentally conditioned bed assembly.
  17. Brykalski, Michael J.; Terech, John; Petrovski, Dusko, Environmentally-conditioned bed.
  18. Brykalski, Michael J.; Terech, John; Petrovski, Dusko, Environmentally-conditioned bed.
  19. Khusnatdinov, Niyaz; Jones, Christopher Ellis; Perez, Joseph G.; LaBrake, Dwayne L.; McMackin, Ian Matthew, Extrusion reduction in imprint lithography.
  20. Brykalski, Michael J.; Clark, Jay C.; Comiskey, Brian D., Heated and cooled bed assembly.
  21. Petrovski, Dusko, Heating and cooling systems for seating assemblies.
  22. Yoshida, Setsuo; Hasegawa, Noriyasu; Shiode, Yoshihiro; Hayashi, Tatsuya, Imprint apparatus and article manufacturing method.
  23. Mori, Sunao, Imprint apparatus and article manufacturing method using same.
  24. Kimura, Masahiro, Imprint apparatus and method of manufacturing article.
  25. Van Santen, Helmar; Kolesnychenko, Aleksey Yurievich, Imprint lithography.
  26. GanapathiSubramanian, Mahadevan; Choi, Byung-Jin; Meissl, Mario Johannes, Imprint lithography system and method.
  27. Choi, Byung-Jin; Choi, Yeong-Jun; Selinidis, Kosta S.; Shackleton, Steven C., Imprint lithography template.
  28. Lofy, John; Walsh, Ryan, Low-profile blowers and methods.
  29. Petrovski, Dusko; Zheng, Sihai; Maass, Michael, Method and system for controlling an operation of a thermoelectric device.
  30. Choi, Byung-Jin; Sreenivasan, Sidlgata V., Method and system for double-sided patterning of substrates.
  31. Xu, Frank; McMackin, Ian; Lad, PanKaj B.; Watts, Michael P. C., Method for controlling distribution of fluid components on a body.
  32. Choi, Byung-Jin; Sreenivasan, Sidlgata V.; McMackin, Ian M.; Lad, Pankaj B., Method for expelling gas positioned between a substrate and a mold.
  33. Brykalski, Michael; Marquette, David, Moisture abatement in heating operation of climate controlled systems.
  34. Wang, Wei; Sun, Zhongyuan, Packaging device and packaging method.
  35. Choi, Byung-Jin; Sreenivasan, Sidlgata V., Patterning substrates employing multiple chucks.
  36. Nguyen, Houng T.; Xu, Ren; Barnes, Michael S., Process for optimization of island to trench ratio in patterned media.
  37. Schumaker, Philip D., Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placement.
  38. Lofy, John, Segmented thermoelectric device.
  39. Xu, Frank Y.; Khusnatdinov, Niyaz, Single phase fluid imprint lithography method.
  40. Sreenivasan, Sidlgata V.; Choi, Byung J.; Schumaker, Norman E.; Voisin, Ronald D.; Watts, Michael P. C.; Meissl, Mario J., Step and repeat imprint lithography processes.
  41. Terech, John; Marquette, David, Structure based fluid distribution system.
  42. Lofy, John; Marquette, David, System and method for thermoelectrically cooling inductive charging assemblies.
  43. Lofy, John; Marquette, David, Systems and methods for cooling inductive charging assemblies.
  44. Lofy, John; Marquette, David, Systems and methods for thermoelectrically cooling inductive charging stations.
  45. Lofy, John; Marquette, David, Systems and methods for thermoelectrically cooling inductive charging stations.
  46. Petrovski, Dusko, Thermal conditioning system for climate-controlled seat assemblies.
  47. Brykalski, Michael J.; Clark, Jay C.; Comiskey, Brian D., Thermally conditioned bed assembly.
  48. Petrovski, Dusko, Thermoelectric device.
  49. Petrovski, Dusko; Zheng, Sihai; Maass, Michael, Thermoelectric device controls and methods.
  50. Inaba, Masahiko; Clark, Jay Christopher; Comiskey, Brian, Thermoelectric device with internal sensor.
  51. Bell, Lon E., Thermoelectric heat exchanger.
  52. Brykalski, Michael J.; Marquette, David; Terech, John; Vidojevski, Robert, Topper member for bed.
  53. Steinman, Adam Joseph; Bunyak, Kenneth James; Orlando, Bruno Antonio, Vehicle headliner assembly for zonal comfort.

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