초록 ▼

An electronic device is moved into a first position such that terminals of the electronic device are adjacent probes for making electrical contact with the terminals. The electronic device is then moved horizontally or diagonally such that the terminals contact the probes. Test data are then commun

An electronic device is moved into a first position such that terminals of the electronic device are adjacent probes for making electrical contact with the terminals. The electronic device is then moved horizontally or diagonally such that the terminals contact the probes. Test data are then communicated to and from the electronic device through the probes.

대표청구항 ▼

What is claimed is: 1. A method of probing an electronic device, said electronic device comprising a surface comprising a plurality of terminals, said method comprising: positioning said electronic device and a plurality of probes in a first relative position in which said probes are spaced apart f

What is claimed is: 1. A method of probing an electronic device, said electronic device comprising a surface comprising a plurality of terminals, said method comprising: positioning said electronic device and a plurality of probes in a first relative position in which said probes are spaced apart from said electronic device and each contact tip of ones of said probes is offset in a direction parallel to said surface of said electronic device from a corresponding terminal of said electronic device that said contact tip is to contact; and effecting relative movement of said electronic device and said probes, said relative movement resulting in said electronic device and said probes being in a second relative position in which said contact tips of said ones of said probes physically contact said corresponding terminals, wherein said relative movement from said first relative position to said second relative position comprises a first directional component and a simultaneous second directional component, wherein said first directional component is parallel to said surface of said electronic device and said second directional component is perpendicular to said surface of said electronic device. 2. A method of probing an electronic device, said electronic device comprising a surface comprising a plurality of terminals, said method comprising: positioning said electronic device and a plurality of probes in a first relative position in which said probes are spaced apart from said electronic device; and effecting relative movement of said electronic device and said probes, said relative movement resulting in said electronic device and said probes being in a second relative position in which ones of said probes physically contact ones of said terminals, wherein: said relative movement comprises a first directional component that is parallel to said surface of said electronic device, and said effecting relative movement comprises moving at least one of said probes or said electronic device without reversing a direction of movement of said at least one of said probes or said electronic device, wherein said ones of said terminals extend from said surface of said electronic device by a distance "d," and said positioning said electronic device and a plurality of probes comprises positioning contact portions of said probes less than said distance "d" from said surface of said electronic device. 3. The method of claim 1, wherein said terminals comprise elements raised above the surface of the electronic device. 4. The method of claim 1, wherein said terminals comprise flat pads. 5. The method of claim 1, wherein said terminals comprise partial spheres. 6. The method of claim 1, wherein each said probe comprises a plurality of tips. 7. The method of claim 1 further comprising testing said electronic device while said ones of said probes are in contact with said ones of said terminals. 8. The method of claim 1, wherein said electronic device comprises a semiconductor device. 9. The method of claim 1, wherein said electronic device comprises a semiconductor wafer. 10. The method of claim 1, wherein said electronic device comprises a package for a semiconductor device. 11. The method of claim 1, wherein said electronic device comprises a package for a plurality of semiconductor devices. 12. The method of claim 1, wherein said electronic device comprises a semiconductor die. 13. The method of claim 1, wherein said electronic device comprises a plurality of semiconductor dies. 14. The method of claim 1, wherein said electronic device comprises a printed circuit board. 15. The method of claim 1, wherein said electronic device comprises a ceramic space transformer. 16. The method of claim 1, wherein said electronic device comprises: a wiring board; and a plurality of semiconductor devices electrically connected to said wiring board. 17. A program product for use in conjunction with a probing machine, the program product comprising a readable storage medium and a program mechanism embedded therein, the program mechanism comprising: instructions for generating first signals to position an electronic device and a plurality of probes in a first relative position in which said probes are spaced apart from said electronic device and each contact tip of ones of said probes is offset in a direction parallel to a surface of said electronic device from a corresponding terminal on said surface of said electronic device that said contact tip is to contact; and instructions for generating second signals effecting relative movement of said electronic device and said probes to bring said electronic device and said probes into a second relative position in which said contact tips of said ones of said probes physically contact corresponding terminals, wherein said relative movement from said first relative position to said second relative position comprises a first directional component and a simultaneous second directional component, wherein said first directional component is parallel to said surface of said electronic device and said second directional component is perpendicular to said surface. 18. A program product for use in conjunction with a probing machine, the program product comprising a readable storage medium and a program mechanism embedded therein, the program mechanism comprising: instructions for generating first signals to position an electronic device and a plurality of probes in a first relative position in which said probes are spaced apart from said electronic device; and instructions for generating second signals effecting relative movement of said electronic device and said probes to bring said electronic device and said probes into a second relative position in which ones of said probes physically contact ones of terminals composing a surface of said electronic device, wherein said relative movement comprises a directional component that is parallel to said surface of said electronic device, and said effecting relative movement comprises moving at least one of said probes or said electronic device without reversing a direction of movement of said at least one of said probes or said electronic device, wherein said terminals extend from a surface of said electronic device by a distance "d," and said generating first signals comprises positioning contact portions of said probes less than said distance "d" from said surface of said electronic device. 19. The program product of claim 17, wherein each said probe comprises a plurality of tips. 20. The program product of claim 17, wherein all of said relative movement from said first position to said second position effected by said second signals consists solely of movement of at least one of said probes or said electronic device in a an unchanging direction. 21. The program product of claim 17, wherein all of said relative movement from said first position to said second position effected by said second signals consists solely of movement of said electronic device in an unchanging direction. 22. The program product of claim 17, wherein all of said relative movement from said first position to said second position effected by said second signals consists solely of movement of at least one of said probes or said electronic device in a substantially straight line from said first relative position to said second relative position. 23. The program product of claim 17, wherein all of said relative movement from said first position to said second position effected by said second signals consists solely of movement of said electronic device in a substantially straight line from said first relative position to said second relative position. 24. The program product of claim 17, wherein said first signals and said second signals control movement of a chuck on which said electronic device is disposed, and said probes are not moved. 25. The method of claim 1, wherein all of said relative movement from said first position to said second position consists solely of movement of at least one of said probes or said electronic device in an unchanging direction. 26. The method of claim 1, wherein all of said relative movement from said first position to said second position consists solely of movement of said electronic device in an unchanging direction. 27. The method of claim 1, wherein all of said relative movement from said first position to said second position consists solely of movement of at least one of said probes or said electronic device in a substantially straight line from said first relative position to said second relative position. 28. The method of claim 1, wherein all of said relative movement from said first position to said second position consists solely of movement of said electronic device in a substantially straight line from said first relative position to said second relative position. 29. The method of claim 1, wherein all of said relative movement from said first position to said second position consists solely of movement of at least one of said probes or said electronic without reversing a direction of movement of said at least one of said probes or said electronic. 30. The program product of claim 17, wherein all of said relative movement from said first position to said second position effected by said second signals consists solely of movement of at least one of said probes or said electronic without reversing a direction of movement of said at least one of said probes or said electronic.