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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Projection exposure apparatus

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G02B-017/00   
미국특허분류(USC) 359/642; 359/727; 359/726; 359/732
출원번호 US-0657925 (2007-01-25)
등록번호 US-7463422 (2008-12-09)
발명자 / 주소
  • Kamenow,Vladimir
  • Kraehmer,Daniel
  • Totzeck,Michael
  • Gruner,Toralf
  • Dodoc,Aurelian
  • Shafer,David
  • Ulrich,Wilhelm
  • von Buenau,Rudolf
  • Mann,Hans Juergen
  • Epple,Alexander
출원인 / 주소
  • Carl Zeiss SMT AG
대리인 / 주소
    Fish & Richardson P.C.
인용정보 피인용 횟수 : 16  인용 특허 : 104
초록
▼

A method of determining materials of lenses contained in an optical system of a projection exposure apparatus is described. First, for each lens of a plurality of the lenses, a susceptibility factor KLT/LH is determined. This factor is a measure of the susceptibility of the respective lens to deteriorations caused by at least one of lifetime effects and lens heating effects. Then a birefringent fluoride crystal is selected as a material for each lens for which the susceptibility factor KLT/LH is above a predetermined threshold. Theses lenses are assigned...

대표
청구항
▼

The invention claimed is: 1. An optical system of a projection exposure apparatus, comprising at least one lens that is made of a non-crystalline material and at least one lens that is made of a birefringent crystal, wherein all lenses made of a birefringent crystal have a higher susceptibility factor KLT/LH than the lenses made of a non-crystalline material, wherein KLT/LH is given by description="In-line Formulae" end="lead"KLT/LH =D/* (CA>/CA)2 ,description="In-line Formulae" end="tail" with being the mean value of the thickness D of the pluralit...

인용문헌 (104)

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이 특허를 인용한 특허 (16)

  1. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Buenau, Rudolf Von; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  2. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Buenau, Rudolf Von; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  3. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Buenau, Rudolf Von; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  4. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf M.; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  5. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf M.; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  6. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf; Mann, Hans-Juergen; Epple, Alexander, Catadioptric projection objective.
  7. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf; Mann, Hans-Juergen; Epple, Alexander, Catadioptric projection objective.
  8. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf; Mann, Hans-Juergen; Epple, Alexander, Catadioptric projection objective.
  9. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; Von Buenau, Rudolf; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Catadioptric projection objective.
  10. Dodoc, Aurelian; Ulrich, Wilhelm; Epple, Alexander, Catadioptric projection objective with intermediate images.
  11. Dodoc, Aurelian; Ulrich, Wilhelm; Epple, Alexander, Catadioptric projection objective with intermediate images.
  12. Dodoc, Aurelian; Ulrich, Wilhelm; Epple, Alexander, Catadioptric projection objective with intermediate images.
  13. Dodoc, Aurelian; Ulrich, Wilhelm; Epple, Alexander, Catadioptric projection objective with intermediate images.
  14. Epple, Alexander; Ulrich, Wilhelm; Dodoc, Aurelian; Mann, Hans-Juergen; Shafer, David, Catadioptric projection objective with mirror group.
  15. Shafer, David; Ulrich, Wilhelm; Dodoc, Aurelian; von Buenau, Rudolf Murai; Mann, Hans-Juergen; Epple, Alexander, Catadioptric projection objective with parallel, offset optical axes.
  16. Shafer, David R.; Ulrich, Wilhelm; Dodoc, Aurelian; von Buenau, Rudolf M.; Mann, Hans-Juergen; Epple, Alexander; Beder, Susanne; Singer, Wolfgang, Immersion catadioptric projection objective having two intermediate images.

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