초록 ▼

The object is to provide a thin film having high barrier properties and high translucency with no safety and health problems, which is capable of suppressing degradation due to moisture, oxygen and carbon dioxide gas and degradation due to the diffusion of impurities such as alkali metals and alkali

The object is to provide a thin film having high barrier properties and high translucency with no safety and health problems, which is capable of suppressing degradation due to moisture, oxygen and carbon dioxide gas and degradation due to the diffusion of impurities such as alkali metals and alkali earth metals, a deposition apparatus of the thin film, and products coated with the thin film by the deposition apparatus. Another object is to provide an extended usable range of the products of an environmentally friendly biodegradable material and a prolonged quality preservation period. The feature is that a single layer or laminated layer of a layer expressed by AlNxOy or layer expressed by AlxNy is deposited (coated) over the inner surface of a packaging film. The single layer or laminated layer thereof has high translucency, being capable of enhancing the barrier properties against moisture, oxygen and carbon dioxide gas, the heat resisting properties, and the mechanical strength. When the biodegradable material is used for the packaging film, the usable range of the products can be extended and the quality preservation period can be prolonged as well.

대표청구항 ▼

What is claimed is: 1. A packaging material comprising: a layer comprising Al, N, and O deposited over an outer surface or an inner surface of a bag made of a plastic material, wherein the layer contains nitrogen at a concentration of 2.5 to 47.5 atm %, wherein the layer contains oxygen at a concen

What is claimed is: 1. A packaging material comprising: a layer comprising Al, N, and O deposited over an outer surface or an inner surface of a bag made of a plastic material, wherein the layer contains nitrogen at a concentration of 2.5 to 47.5 atm %, wherein the layer contains oxygen at a concentration of 2.5 to 47.5 atm %, and wherein the layer contains nitrogen at a higher concentration than a concentration of oxygen. 2. The packaging material according to claim 1, wherein the layer comprising Al, N, and O has 80 to 90% of translucency in a visible light area. 3. A packaging material comprising: a layer comprising Al, N, and O deposited over an outer surface or an inner surface of a bag made of a biodegradable plastic material, wherein the layer contains nitrogen at a concentration of 2.5 to 47.5 atm %, wherein the layer contains oxygen at a concentration of 2.5 to 47.5 atm %, and wherein the layer contains nitrogen at a higher concentration than a concentration of oxygen. 4. The packaging material according to claim 3, wherein the layer comprising Al, N, and O has 80 to 90% of translucency in a visible light area. 5. A container comprising: a layer comprising Al, N, and O deposited over an outer wall surface or an inner wall surface of the container, wherein the container is made of biodegradable plastic material, wherein the layer contains nitrogen at a concentration of 2.5 to 47.5 atm %, wherein the layer contains oxygen at a concentration of 2.5 to 47.5 atm %, and wherein the layer contains nitrogen at a higher concentration than a concentration of oxygen. 6. The container according to claim 5, wherein the layer comprising Al, N, and O has 80 to 90% of translucency in a visible light area. 7. A recording medium comprising: a layer comprising Al, N, and O deposited over a surface or the recording medium, wherein the layer contains nitrogen at a concentration of 2.5 to 47.5 atm %, wherein the layer contains oxygen at a concentration of 2.5 to 47.5 atm %, and wherein the layer contains nitrogen at a higher concentration than a concentration of oxygen. 8. A film comprising: at least two layers each comprising Al, N, and O; a stress relaxation film between the layers comprising Al, N, and O; and a substrate, wherein at least one of the layers comprising Al, N, and O is deposited on and in direct contact with one surface or both surfaces of the substrate, wherein said at least two layers each comprising Al, N, and O contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each comprising Al, N, and O contain oxygen at a concentration of 2.5 to 47.5 atm %, and wherein said at least two layers each comprising Al, N. and O contain nitrogen at a higher concentration than a concentration of oxygen. 9. The film according to claim 8, wherein said at least two layers each comprising Al, N, and O have 80 to 90% of translucency in a visible light area. 10. A packaging material comprising: at least two of layers each comprising Al, N, and O; and a stress relaxation film between the layers comprising Al, N, and O, wherein at least one of the layers comprising Al, N, and O is deposited over at least one of outer surface and inner surface of a bag made of a plastic material, wherein said at least two layers each contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each contain oxygen at a concentration of 2.5 to 47.5 atm %, and wherein said at least two layers each contain nitrogen at a higher concentration than a concentration of oxygen. 11. The packaging material according to claim 10, wherein said at least two layers each comprising Al, N, and O have 80 to 90% of translucency in a visible light area. 12. A packaging material comprising: at least two layers each comprising Al, N, and O; and a stress relaxation film between the layers comprising Al, N, and O, wherein at least one of the layers comprising Al, N, and O is deposited over an outer surface or an inner surface of a bag made of a biodegradable plastic material, wherein said at least two layers each contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each contain oxygen at a concentration of 2.5 to 47.5 atm %, and wherein said at least two layers each comprising Al, N, and O contain nitrogen at a higher concentration than a concentration of oxygen. 13. The packaging material according to claim 12, wherein said at least two layers each comprising Al, N, and O have 80 to 90% of translucency in a visible light area. 14. A container comprising: at least two layers each comprising Al, N, and O; and a stress relaxation film between the layers comprising Al, N, and O, wherein at least one of the layers comprising Al, N, and O is deposited over an outer wall surface or an inner wall surface of the container, wherein the container is made of a glass material or plastic material, wherein said at least two layers each contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each contain oxygen at a concentration of 2.5 to 47.5 atm %, and wherein said at least two layers each comprising Al, N, and O contain nitrogen at a higher concentration than a concentration of oxygen. 15. The container according to claim 14, wherein said at least two layers each comprising Al, N, and O have 80 to 90% of translucency in a visible light area. 16. A container comprising: at least two layers each comprising Al, N, and O; and a stress relaxation film between the layers comprising Al, N, and O, wherein at least one of the layers comprising Al, N, and O is deposited over an outer wall surface or an inner wall surface of the container made of biodegradable plastic material, wherein said at least two layers each comprising Al, N, and O contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each comprising Al, N, and O contain oxygen at a concentration of 15 to 47.5 atm %, and /wherein said at least two layers each comprising Al, N, and O contain nitrogen at a higher concentration than a concentration of oxygen. 17. The container according to claim 16, wherein said at least two layers each comprising Al, N, and O have 80 to 90% of translucency in a visible light area. 18. A lens or window comprising: at least two layers comprising Al, N, and O; and a stress relaxation film between the layers comprising Al, N, and O, wherein at least one of layers comprising Al, N, and O is deposited on and in direct contact with one surface or both surfaces of the substrate of the lens or the window and wherein said at least two layers each comprising Al, N, and O contain nitrogen at a higher concentration than a concentration of oxygen. 19. The lens or window according to claim 18, wherein the lens or window is made of plastic or glass. 20. Spectacles comprising the lens according to claim 18. 21. The lens or window according to claim 18, wherein said at least two layers each comprising Al, N, and O contain 2.5 to 47.5 atm % of nitrogen. 22. The lens or window according to claim 18, wherein said at least two layers each comprising Al, N, and O contain 2.5 to 47.5 atm % of oxygen. 23. A recording medium comprising: a layer comprising Al and N deposited over a surface of the recording medium, wherein the layer comprising Al and N contains 2.5 to 47.5 atm % of nitrogen, wherein the layer comprising Al and N is deposited on and in direct contact with one surface or both surfaces of the recording medium, and wherein the layer contains nitrogen at a higher concentration than a concentration of oxygen. 24. A recording medium comprising: at least two layers comprising Al, N, and O deposited on and indirect contact with both surfaces of the recording medium; and a stress relaxation film between the layers comprising Al, N, and O, wherein said at least two layers each comprising Al, N, and O contain nitrogen at a concentration of 2.5 to 47.5 atm %, wherein said at least two layers each comprising Al, N, and O contain oxygen at a concentration of 2.5 to 47.5 atm %, and wherein said at least two layers each comprising Al, N, and O contain nitrogen at a higher concentration than a concentration of oxygen.