초록 ▼

A non-contact conveying device (10) using superconducting magnetic levitation capable of stably conveying an object (11), including: a conveying table (12) having a bottom with permanent magnets (16-19) to convey the object (11); a conveying guide unit (13) having superconductors (20) immediately be

A non-contact conveying device (10) using superconducting magnetic levitation capable of stably conveying an object (11), including: a conveying table (12) having a bottom with permanent magnets (16-19) to convey the object (11); a conveying guide unit (13) having superconductors (20) immediately below the respective magnets (16-19); distance sensors (21) on the conveying guide unit (13) for detecting a distance between the conveying table (12) and the conveying guide unit (13); damping coils (25) in the conveying guide unit (13) for generating a magnetic field upon energization thereof to damp vibration of the conveying table (12); and a control device (27) for detecting vibration of the conveying table (12) by signals from the distance sensors (21) and for controlling current applied to the damping coils (25). If disturbance occurs on the object (11) conveyed contactlessly by the superconducting magnetic levitation, the vibration is stopped within a short period of time.

대표청구항 ▼

The invention claimed is: 1. A non-contact conveying device using superconducting magnetic levitation, comprising: a conveying table for carrying an object to be conveyed, the conveying table having a plurality of permanent magnets at a bottom thereof; a conveying guide unit having superconductors

The invention claimed is: 1. A non-contact conveying device using superconducting magnetic levitation, comprising: a conveying table for carrying an object to be conveyed, the conveying table having a plurality of permanent magnets at a bottom thereof; a conveying guide unit having superconductors respectively disposed immediately below the permanent magnets of the conveying table; a distance sensor provided in the conveying guide unit for detecting a distance between the conveying table and the conveying guide unit; a damping coil provided in the conveying guide unit for generating a magnetic field upon energization thereof, thereby suppressing vibration of the conveying table; and a control device for detecting displacement of the conveying table by a signal from the distance sensor and regulating electric current applied to the damping coil. 2. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the conveying table is placed inside an airtight container, and the conveying guide unit is placed outside the airtight container. 3. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein each of the superconductors has a ring shape divided into plural parts, and the damping coil is positioned substantially concentrically at a bottom of the each of the ring-shaped superconductors. 4. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the conveying table has a magnetic material at the center thereof, and the damping coil is arranged immediately below the magnetic material. 5. The non-contact conveying device using superconducting magnetic levitation according to claim 4, wherein the magnetic material is a second permanent magnet and the damping coil is an air-cored coil. 6. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the distance sensor comprises a Hall element disposed at a top of the conveying guide unit. 7. The non-contact conveying device using superconducting magnetic levitation according to claim 6, wherein the Hall element is disposed over each of the superconductors. 8. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the permanent magnets provided to the conveying table are arranged in a Halbach array so that magnetic poles of the permanent magnets are directed only downward of the conveying table. 9. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the control device substantially comprises a circuit for performing differential control of a distance between the conveying table and the conveying guide unit detected by the distance sensor. 10. The non-contact conveying device using superconducting magnetic levitation according to claim 1, wherein the superconductors are cooled by a refrigerant or a cryocooler.