초록

The present invention is directed to a template that features a control surface extending from a periphery of a mold toward a recessed surface of the template forming an oblique angle between a portion of the control surface disposed proximate to the periphery.

대표청구항 ▼

What is claimed is: 1. A nanoimprint lithography template comprising: a mold, having a periphery, lying in a plane; a sidewall; a recessed surface spaced-apart from said plane; and a control surface extending from said periphery toward said sidewall, with an obtuse angle being defined between said

What is claimed is: 1. A nanoimprint lithography template comprising: a mold, having a periphery, lying in a plane; a sidewall; a recessed surface spaced-apart from said plane; and a control surface extending from said periphery toward said sidewall, with an obtuse angle being defined between said control surface and said plane, said sidewall extending between said control surface and said recessed surface. 2. The nanoimprint lithography template as recited in claim 1 wherein said control surface substantially surrounds said mold. 3. The nanoimprint lithography template as recited in claim 1 wherein said control surface has an arcuate shape. 4. The nanoimprint lithography template as recited in claim 1 wherein said control surface has a linear shape. 5. The nanoimprint lithography template as recited in claim 1 wherein said control surface has a concave shape. 6. The nanoimprint lithography template as recited in claim 1 wherein said control surface has a convex shape. 7. The nanoimprint lithography template as recited in claim 1 wherein said mold has a surface energy associated therewith that is greater than a surface energy of said control surface. 8. A nanoimprint lithography template comprising: a mold, having a periphery, lying in a plane; a recessed surface spaced-apart from said plane; a sidewall surface; and a control surface extending between said periphery and said sidewall surface, with an obtuse angle being defined between said control surface and said plane, said sidewall surface extending between said control surface and said recessed surface, with said recessed surface extending orthogonally to said sidewall surface. 9. The nanoimprint lithography template as recited in claim 8 wherein said control surface substantially surrounds said mold. 10. The nanoimprint lithography template as recited in claim 8 wherein said control surface has an arcuate shape. 11. The nanoimprint lithography template as recited in claim 8 wherein said control surface has a linear shape. 12. The nanoimprint lithography template as recited in claim 8 wherein said control surface has a concave shape. 13. The nanoimprint lithography template as recited in claim 8 wherein said control surface has a convex shape. 14. A nanoimprint lithography template comprising: a mold, having a periphery, lying in a plane; a sidewall; a recessed surface spaced-apart from said plane; and a control surface extending from said periphery toward said sidewall, with said control surface surrounding said mold, with an obtuse angle being defined between said control surface and said plane with said sidewall extending between said control surface and said recessed surface, with said mold having a surface energy associated therewith that is greater than a surface energy of said control surface, said sidewall and said recessed surface. 15. The nanoimprint lithography template as recited in claim 14 wherein said control surface has a shape associated therewith selected from a set of shapes consisting essentially of a linear shape, a concave shape and a convex shape.