A substrate bonding apparatus includes a bonding chamber, lower and upper stages positioned at lower and upper spaces at an interior of the bonding chamber, respectively, the lower stage including a first receiving part, a first lifting system having a first support part for supporting a first subst
A substrate bonding apparatus includes a bonding chamber, lower and upper stages positioned at lower and upper spaces at an interior of the bonding chamber, respectively, the lower stage including a first receiving part, a first lifting system having a first support part for supporting a first substrate, the first receiving part receiving the first support part within the lower stage, and a blowing system formed in the first support part to blow air through the first support part.
대표청구항▼
What is claimed is: 1. A substrate bonding apparatus for a liquid crystal display device, comprising: a bonding chamber; lower and upper stages within the bonding chamber, the lower stage having a receiving part and penetrating holes; and a lifting system having a first support part selectively rec
What is claimed is: 1. A substrate bonding apparatus for a liquid crystal display device, comprising: a bonding chamber; lower and upper stages within the bonding chamber, the lower stage having a receiving part and penetrating holes; and a lifting system having a first support part selectively received within the receiving part for supporting a first substrate and a plurality of elevating axes moving up and down through the penetrating holes so that the first support part extends from a first position within the receiving part of the lower stage to a second position above an upper surface of the lower stage; a blowing mechanism in the first support part, having at least one opening to blow gas or air; a supply tube connected to the first support part to supply the gas or air to the at least one opening; and a blowing system to blow gas or air through the at least one opening in the first support part. 2. The apparatus according to claim 1, wherein an upper surface of the first support part is recessed from the upper surface of the lower stage at the first position. 3. The apparatus according to claim 1, wherein the first support part includes a plurality of first supports extending along a first direction and a plurality of second supports extending along a second direction perpendicular to the first direction. 4. The apparatus according to claim 3, wherein the plurality of first supports and the plurality of second supports are connected at intersections. 5. The apparatus according to claim 4, wherein the lifting system further includes a plurality of driving parts driving the plurality of elevating axis. 6. The apparatus according to claim 3, wherein each of the plurality of first supports include a pair of side portions and central portion that is offset from the side portions along a third direction perpendicular to the first and second directions. 7. The apparatus according to claim 6, wherein the central portion is disposed between adjacent ones of the plurality of elevating axes. 8. The apparatus according to claim 3, wherein the lifting system includes a plurality of second support parts each disposed along opposing side portions of the lower stage. 9. The apparatus according to claim 8, wherein each of the second support parts are positioned within second receiving parts of the lower stage. 10. The apparatus according to claim 8, wherein each of the second support parts disposed along one of the opposing side portions of the lower substrate are interconnected and each of the second support parts disposed along another one of the opposing side portions of the lower substrate are interconnected. 11. The apparatus according to claim 10, wherein each of the second support parts are disposed within recesses along the opposing side portions of the lower stage at a first position of the elevating axis, and each of the second support parts are disposed above an upper surface of the lower stage along the opposing side portions of the lower stage at a second position of the elevating axis. 12. The apparatus according to claim 1, wherein the lifting system includes a first lifting system that extends to a first position above an upper surface of the lower stage from a central portion of the lower stage and a second lifting system that extends to a second position above the upper surface of the lower stage from opposing side portions of the lower stage. 13. The apparatus according to claim 12, wherein the first lifting system retracts to a third position below the upper surface of the lower stage. 14. The apparatus according to claim 13, wherein the second lifting system retracts to a fourth position at the upper surface of the lower stage. 15. The apparatus according to claim 13, wherein the second lifting system operates simultaneously with the first substrate lifting system. 16. The apparatus according to claim 12, wherein the second lifting system includes a clamping system for clamping side portions of the first substrate. 17. The apparatus according to claim 16, wherein the clamping system includes a first driving system having a pair of rack and pinions. 18. The apparatus according to claim 16, wherein the clamping system includes a second driving system having a pair of guide rails. 19. The apparatus according to claim 18, wherein the second driving system is provided within the bonding chamber. 20. The apparatus according to claim 19, wherein the pair of guide rails align the second lifting system to the lower stage. 21. The apparatus according to claim 18, wherein the clamping system is provided within the bonding chamber. 22. The apparatus according to claim 1, wherein the at least one opening includes a plurality of holes. 23. The apparatus according to claim 1, wherein the at least one opening includes a slit.
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