최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0975476 (2007-10-19) |
등록번호 | US-7498829 (2009-03-03) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 5 인용 특허 : 943 |
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and the probe tip.
We claim: 1. A probe comprising: (a) a dielectric substrate having a major surface; (b) an elongate conductor suitable to be electrically interconnected to a test signal supported by a first side of said substrate; (c) a conductive member suitable to be electrically interconnected to a ground signa
We claim: 1. A probe comprising: (a) a dielectric substrate having a major surface; (b) an elongate conductor suitable to be electrically interconnected to a test signal supported by a first side of said substrate; (c) a conductive member suitable to be electrically interconnected to a ground signal supported by said second side of said substrate wherein said conductive member together with said elongate conductor form a controlled impedance transmission structure; (d) a conductive path between said first side of said substrate and said second side of said substrate in a manner free from an air gap between the conductive path and an edge of said substrate for at least a majority of the thickness of said substrate and said conductive path free from electrical interconnection with said conductive member; and (e) a contact electrically interconnected to said conductive path for testing a device under test. 2. The probe of claim 1 wherein said controlled impedance transmission structure is microstrip. 3. The probe of claim 1 wherein said edge is a via through said substrate. 4. The probe of claim 1 wherein said edge is an exterior peripheral edge of said substrate. 5. The probe of claim 1 wherein said elongate conductor is electrically interconnected to a central conductor of a coaxial cable. 6. The probe of claim 5 wherein said conductive member is electrically connected to a conductor surrounding said central conductor of said coaxial cable. 7. The probe of claim 6 wherein said substrate is supported by said coaxial cable. 8. The probe of claim 7 wherein said substrate is supported by a shelf of said coaxial cable. 9. The probe of claim 1 wherein said conductive member is substantially planar. 10. The probe of claim 1 wherein said dielectric substrate is semi-flexible. 11. The probe of claim 10 wherein said dielectric substrate is a membrane. 12. The probe of claim 1 wherein said dielectric substrate has a dielectric constant less than 7. 13. The probe of claim 1 wherein said dielectric substrate has a dielectric constant less than 5. 14. The probe of claim 1 wherein said dielectric substrate has a dielectric constant less than 4. 15. The probe of claim 1 wherein said dielectric substrate has a dielectric constant less than 2. 16. The probe of claim 1 wherein said ground signal is zero volts. 17. The probe of claim 1 wherein said conductive member covers greater than 50% of said second side of said substrate. 18. The probe of claim 1 wherein said conductive member covers greater than 60% of said second side of said substrate. 19. The probe of claim 1 wherein said conductive member covers greater than 70% of said second side of said substrate. 20. The probe of claim 1 wherein said conductive member covers greater than 80% of said second side of said substrate. 21. The probe of claim 1 wherein said conductive member covers greater than 90% of said second side of said substrate. 22. The probe of claim 1 wherein said conductive member, said elongate conductor, and said substrate collectively form a microstrip transmission structure. 23. The probe of claim 1 wherein said conductive member laterally surrounds at least 50% of said contact. 24. The probe of claim 1 wherein said conductive member laterally surrounds at least 75% of said contact. 25. The probe of claim 1 wherein said conductive member laterally surrounds at least 100% of said contact. 26. The probe of claim 1 wherein said contact is in the form of a bump. 27. The probe of claim 1 wherein said substrate has a thickness less than 40 microns. 28. The probe of claim 1 wherein said substrate has a thickness less than 30 microns. 29. The probe of claim 1 wherein said substrate has a thickness less than 20 microns. 30. A probe comprising: (a) a dielectric substrate supporting an elongate conductor on a first side of said substrate and a conductive member supported by said second side of said substrate wherein said conductive member together with said elongate conductor form a controlled impedance transmission structure; (b) a conductive path between said first side of said substrate and said second side of said substrate in a region within the periphery of said substrate for at least a majority of the thickness of said substrate; and (c) a contact electrically interconnected to said conductive path for testing a device under test. 31. The probe of claim 30 wherein said controlled impedance transmission structure is microstrip. 32. The probe of claim 30 wherein said elongate conductor is electrically interconnected to a central conductor of a coaxial cable. 33. The probe of claim 32 wherein said conductive member is electrically connected to a conductor surrounding said central conductor of said coaxial cable. 34. The probe of claim 33 wherein said dielectric substrate is a membrane. 35. The probe of claim 30 wherein said dielectric substrate is flexible. 36. The probe of claim 30 wherein said dielectric substrate has a dielectric constant less than 7. 37. The probe of claim 30 wherein said dielectric substrate has a dielectric constant less than 5. 38. The probe of claim 30 wherein said dielectric substrate has a dielectric constant less than 4. 39. The probe of claim 30 wherein said dielectric substrate has a dielectric constant less than 2. 40. The probe of claim 30 wherein said conductive member covers greater than 50% of said second side of said substrate. 41. The probe of claim 30 wherein said conductive member covers greater than 60% of said second side of said substrate. 42. The probe of claim 30 wherein said conductive member covers greater than 70% of said second side of said substrate. 43. The probe of claim 30 wherein said conductive member covers greater than 80% of said second side of said substrate. 44. The probe of claim 30 wherein said conductive member covers greater than 90% of said second side of said substrate. 45. The probe of claim 30 wherein said substrate has a thickness less than 40 microns. 46. The probe of claim 30 wherein said substrate has a thickness less than 20 microns. 47. The probe of claim 30 wherein said substrate has a thickness less than 10 microns.
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