IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
|
| 국제특허분류(IPC7판) |
|
| 출원번호 |
US-0227944
(2005-09-15)
|
| 등록번호 |
US-7501010
(2009-03-10)
|
|
발명자
/ 주소 |
- Brestovansky,Dennis
- Wodjenski,Michael J.
- Arno,Jose I.
- Carruthers,J. Donald
- Moroco, legal representative,Judith A.
- Moroco,Philip A.
|
| 출원인 / 주소 |
- Advanced Technology Materials, Inc.
|
| 대리인 / 주소 |
|
| 인용정보 |
피인용 횟수 :
14 인용 특허 :
53 |
초록
▼
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. B
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
대표청구항
▼
What is claimed is: 1. A fluid storage and dispensing vessel having an interior volume, a port for dispensing fluid from said interior volume and a valve connected to said port, wherein the fluid storage and dispensing vessel is of rectangular parallelepiped form, said vessel containing monolithic
What is claimed is: 1. A fluid storage and dispensing vessel having an interior volume, a port for dispensing fluid from said interior volume and a valve connected to said port, wherein the fluid storage and dispensing vessel is of rectangular parallelepiped form, said vessel containing monolithic form physical adsorbent defining a cavity therein, and including a valve assembly comprising said valve, wherein the valve assembly includes a downwardly extending portion received in a cavity in the monolithic physical adsorbent. 2. The fluid storage and dispensing vessel of claim 1, wherein the physical adsorbent sorptively retains a fluid thereon, and said fluid is desorbable from the physical adsorbent for dispensing of the fluid from the vessel. 3. The fluid storage and dispensing vessel of claim 1, wherein said monolithic form is selected from the group consisting of blocks, bricks, and boules. 4. The fluid storage and dispensing vessel of claim 1, wherein the monolithic form comprises a single monolithic article. 5. The fluid storage and dispensing vessel of claim 1, wherein the monolithic form comprises a multiplicity of discrete monolithic articles. 6. The fluid storage and dispensing vessel of claim 5, wherein the interior volume of the vessel contains less than 75 discrete monolithic articles of said physical adsorbent. 7. The fluid storage and dispensing vessel of claim 5, wherein the interior volume of the vessel contains less than 20 discrete monolithic articles of said physical adsorbent. 8. The fluid storage and dispensing vessel of claim 1, wherein the monolithic physical adsorbent provides a sorbent mass that is conformed in size and shape to the interior volume of the vessel. 9. The fluid storage and dispensing vessel of claim 8, wherein the sorbent mass occupies at least 60% of the interior volume of the vessel. 10. The fluid storage and dispensing vessel of claim 5, wherein said discrete monolithic articles have a rectangular parallelepiped shape. 11. The fluid storage and dispensing vessel of claim 5, wherein each of the multiplicity of discrete monolithic articles has a solid cylinder form. 12. The fluid storage and dispensing vessel of claim 2, wherein the fluid comprises a fluid having utility in semiconductor manufacturing. 13. The fluid storage and dispensing vessel of claim 2, wherein the fluid comprises a fluid species selected from the group consisting of arsine, phosphine, hydrogen selenide, hydrogen telluride, nitrogen trifluoride, boron trifluoride, boron trichloride, diborane, trimethylsilane, tetramethylsilane, disilane, silane, germane, and organometallic gaseous reagents. 14. The fluid storage and dispensing vessel of claim 2, wherein the fluid has a pressure in said interior volume not exceeding about 1500 torr. 15. The fluid storage and dispensing vessel of claim 2, wherein the fluid has a pressure in said interior volume not exceeding about 700 torr. 16. The fluid storage and dispensing vessel of claim 2, wherein the fluid has a pressure in said interior volume in a range of from about 400 to about 700 torr. 17. The fluid storage and dispensing vessel of claim 1, wherein the vessel comprises a material of construction selected from the group consisting of metals, glasses, ceramics, vitreous materials, polymers, and composite materials. 18. The fluid storage and dispensing vessel of claim 17, wherein the vessel comprises a metal material of construction. 19. The fluid storage and dispensing vessel of claim 18, wherein said metal is selected from the group consisting of steel, stainless steel, aluminum, copper, brass, bronze, and alloys of any of the foregoing materials thereof. 20. The fluid storage and dispensing vessel of claim 1, wherein the physical adsorbent comprises carbon. 21. The fluid storage and dispensing vessel of claim 1, wherein the physical adsorbent comprises activated carbon. 22. The fluid storage and dispensing vessel of claim 1, further comprising a cap detachably secured to the vessel. 23. A fluid storage and dispensing apparatus comprising the fluid storage and dispensing vessel of claim 1 and a dispensing assembly coupled to the valve for dispensing desorbed fluid from the vessel. 24. The fluid storage and dispensing apparatus of claim 23, wherein the dispensing assembly is coupled to an upper portion of the vessel for dispensing desorbed fluid from the vessel. 25. The fluid storage and dispensing apparatus of claim 23, wherein the dispensing assembly is protectively surrounded by a cap. 26. A gas cabinet assembly, comprising: (a) a gas cabinet defining an enclosed interior volume and including flow circuitry in said interior volume arranged for dispensing of gas from the cabinet; and (b) at least one fluid storage and dispensing vessel of claim 1. 27. The gas cabinet assembly of claim 26, wherein the gas cabinet is vented to a house exhaust system of a semiconductor manufacturing facility. 28. A semiconductor manufacturing process comprising dispensing fluid from the fluid storage and dispensing vessel of claim 1 for use in said process. 29. The semiconductor manufacturing process of claim 28, wherein said process is selected from ion implant, chemical vapor deposition, reactive ion etching, and photoresist residue removal. 30. The semiconductor manufacturing process of claim 28, wherein said fluid is selected from the group consisting of arsine, phosphine, nitrogen trifluoride, boron trifluoride, boron trichloride, diborane, trimethylsilane, tetramethylsilane, disilane, silane, germane, organometallic gaseous reagents, hydrogen selenide, and hydrogen telluride. 31. A method of fabricating a gas source package, said method comprising: processing a metal workpiece by a drawing process to form a seamless tube closed at a first end thereof and open at a second end thereof, said tube defining an interior volume therein; introducing into said interior volume at least one block of physical adsorbent material; after introduction of said at least one block of physical adsorbent material into the interior volume of said tube, welding a top plate member to the second end of the tube to enclose the interior volume; and securing a fluid dispensing assembly to the top plate member. 32. The fluid storage and dispensing vessel of claim 1, containing a single monolithic block of physical adsorbent having rectangular parallelepiped form, and including a valve assembly comprising said valve, wherein the valve assembly includes a downwardly extending portion received in a cavity in the single monolithic block of physical adsorbent. 33. A fluid storage and dispensing vessel comprising: at least one vessel wall defining an interior volume; a port for dispensing fluid from said interior volume; a monolithic form physical adsorbent disposed within the interior volume and defining a cavity in the monolithic form physical adsorbent; and a valve assembly connected to said port, wherein the valve assembly includes a downwardly extending portion received in the cavity. 34. The fluid storage and dispensing vessel of claim 33, wherein the vessel is of rectangular parallelepiped form. 35. A semiconductor manufacturing process comprising dispensing fluid from the fluid storage and dispensing vessel of claim 33 for use in said process.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.