In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supplied from the injectors into a pel
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supplied from the injectors into a pellicle space through vent holes of a reticle with a pellicle. In this state, the reticle with the pellicle is transported.
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What is claimed is: 1. A transport apparatus comprising: a transport hand, which holds and transports a mask with a pellicle, said transport hand comprising a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, the ma
What is claimed is: 1. A transport apparatus comprising: a transport hand, which holds and transports a mask with a pellicle, said transport hand comprising a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, the mask with the pellicle having a vent hole which brings an external space and a pellicle space between the pellicle and the mask into communication with each other, and said gas injector injects the gas so as to supply the gas into the pellicle space through the vent hole. 2. The apparatus according to claim 1, wherein said gas injector is arranged to inject the gas toward the vent hole. 3. The apparatus according to claim 1, wherein said transport hand further comprises a gas sucking section. 4. The apparatus according to claim 1, wherein said transport hand further comprises a cover with which a periphery of a pellicle structure of the mask with the pellicle is covered, while holding the mask with the pellicle. 5. The apparatus according to claim 1, wherein a gas to be injected by said gas injector is an inert gas. 6. The apparatus according to claim 1, wherein a gas to be injected by said gas injector contains at least one of nitrogen, helium, and argon. 7. A device manufacturing apparatus comprising: (a) a transport apparatus; and (b) an exposure section which transfers a pattern onto a substrate using a mask with a pellicle, which is transported by the transport apparatus, wherein (i) the transport apparatus has a transport hand and holds and transports the mask with the pellicle by said transport hand, (ii) said transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, (iii) the mask with the pellicle has a vent hole which brings an external space and a pellicle space between the pellicle and the mask into communication with each other, and (iv) said gas injector injects the gas so as to supply the gas into the pellicle space through the vent hole. 8. A device manufacturing method comprising: (a) a step of transferring a pattern onto a substrate coated with a photosensitive agent using a device manufacturing apparatus; and (b) a step of developing the substrate, the device manufacturing apparatus comprising: (i) a transport apparatus; and (ii) an exposure section which transfers the pattern onto the substrate using a mask with a pellicle which is transported by the transport apparatus, wherein the transport apparatus has a transport hand and holds and transports the mask with the pellicle by the transport hand, the transport hand includes a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, the mask with the pellicle has a vent hole which brings an external space and a pellicle space between the pellicle and the mask into communication with each other, and the gas injector injects the gas so as to supply the gas into the pellicle space through the vent hole. 9. A transport apparatus comprising: a transport hand, which holds and transports a mask with a pellicle by said transport hand, said transport hand comprising a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section, the mask with the pellicle having a first vent hole and a second vent hole which bring an external space and a pellicle space between the pellicle and the mask into communication with each other, said gas injector is arranged to supply the gas into the pellicle space through the first vent hole, and said gas sucking section is arranged to suck the gas in the pellicle space through the second vent hole. 10. The apparatus according to claim 9, wherein said gas injector has a first closing section which closes the first vent hole and is arranged to supply the gas into the pellicle space through the first vent hole while closing the first vent hole by said first closing section, and said gas sucking section has a second closing section which closes the second vent hole and is arranged to suck the gas in the pellicle space through the second vent hole while closing the second vent hole by said second closing section. 11. A device manufacturing apparatus comprising: (a) a transport apparatus; and (b) an exposure section which transfers a pattern onto a substrate using a mask with a pellicle which is transported by the transport apparatus, wherein (i) the transport apparatus has a transport hand and holds and transports the mask with the pellicle by said transport hand, (ii) said transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section, (iii) the mask with the pellicle having a first vent hole and a second vent hole which bring an external space and a pellicle space between the pellicle and the mask into communication with each other, (iv) said gas injector is arranged to supply the gas into the pellicle space through the first vent hole, and (v) said gas sucking section is arranged to suck the gas in the pellicle space through the second vent hole. 12. A device manufacturing method comprising: (a) a step of transferring a pattern onto a substrate coated with a photosensitive agent using a device manufacturing apparatus; and (b) a step of developing the substrate, the device manufacturing apparatus comprising: (i) a transport apparatus; and (ii) an exposure section which transfers the pattern onto the substrate using a mask with a pellicle which is transported by the transport apparatus, wherein the transport apparatus has a transport hand and holds and transports the mask with the pellicle by said transport hand, the transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section, the mask with the pellicle having a first vent hole and a second vent hole which bring an external space and a pellicle space between the pellicle and the mask into communication with each other, the gas injector is arranged to supply the gas into the pellicle space through the first vent hole, and the gas sucking section is arranged to suck the gas in the pellicle space through the second vent hole. 13. A transport apparatus comprising: a transport hand, which hold and transports a mask with a pellicle by said transport hand, said transport hand comprising a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, wherein the apparatus is arranged to transport the mask with the pellicle at least between a first chamber and a second chamber. 14. The apparatus according to claim 13, wherein the apparatus can be arranged in a transport space whose at least one of (i) oxygen concentration and (ii) moisture concentration is higher than at least one of (i) an oxygen concentration and (ii) a moisture concentration of each of said first and second chambers. 15. The apparatus according to claim 14, wherein, in transport procedures for inserting said transport hand into said first chamber to make said transport hand hold the mask with the pellicle in said first chamber, and making said transport hand transport the mask with the pellicle through the transport space into said second chamber, a gas is injected from said gas injector before inserting said transport hand into said first chamber. 16. The apparatus according to claim 14, wherein, in transport procedures for inserting said transport hand into said first chamber to make said transport hand hold the mask with the pellicle in said first chamber, and making said transport hand transport the mask with the pellicle through the transport space into said second chamber, a gas is injected from said gas injector after inserting said transport hand into said first chamber and making said transport hand hold the mask with the pellicle in said first chamber. 17. A device manufacturing apparatus comprising: (a) a transport apparatus; and (b) an exposure section which transfers a pattern onto a substrate using a mask with a pellicle which is transported by the transport apparatus, wherein (i) the transport apparatus has a transport hand and holds and transports the mask with the pellicle by said transport hand, (ii) said transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and (iii) the transport apparatus is arranged to transport the mask with the pellicle at least between a first chamber and a second chamber. 18. A device manufacturing method comprising: (a) a step of transferring a pattern onto a substrate coated with a photosensitive agent using a device manufacturing apparatus; and (b) a step of developing the substrate, the device manufacturing apparatus comprising: (i) a transport apparatus; and (ii) an exposure section which transfers the pattern onto the substrate using a mask with a pellicle which is transported by the transport apparatus, wherein the transport apparatus has a transport hand and holds and transports the mask with the pellicle by the transport hand, the transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and the transport apparatus is arranged to transport the mask with the pellicle at least between a first chamber and a second chamber. 19. A transport apparatus comprising: a transport hand, which hold and transports a mask with a pellicle, said transport hand comprising a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section arranged to suck at least part of the gas which is injected from said gas injector and is supplied into the mask with the pellicle. 20. A device manufacturing apparatus comprising: a transport apparatus; and an exposure section which transfers a pattern onto a substrate using a mask with a pellicle which is transported by the transport apparatus, wherein the transport apparatus has a transport hand and holds and transports the mask with the pellicle by said transport hand, and said transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section arranged to suck at least part of the gas which is injected from said gas injector and is supplied into the mask with the pellicle. 21. A device manufacturing method comprising: (a) a step of transferring a pattern onto a substrate coated with a photosensitive agent using a device manufacturing apparatus; and (b) a step of developing the substrate, the device manufacturing apparatus comprising: (i) a transport apparatus; and (ii) an exposure section which transfers the pattern onto the substrate using a mask with a pellicle which is transported by the transport apparatus, wherein the transport apparatus has a transport hand and holds and transports the mask with the pellicle by the transport hand, the transport hand comprises a gas injector arranged to inject a gas to at least a portion of a periphery of a pellicle support frame of the mask with the pellicle, and a gas sucking section arranged to suck at least part of the gas which is injected from the gas injector and is supplied into the mask with the pellicle.
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이 특허에 인용된 특허 (8)
Nakano, Hitoshi, Exposure apparatus, device manufacturing method, gas substituting apparatus, and gas substituting method.
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