[미국특허]
Integrated optical rotation sensor and method for sensing rotation rate
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01C-019/72
G01C-019/66
G01C-019/64
G02B-006/00
출원번호
UP-0433965
(2006-05-15)
등록번호
US-7535576
(2009-07-01)
발명자
/ 주소
Keyser, Thomas
Sanders, Glen A.
Hughes, Grenville
Strandjord, Lee K.
출원인 / 주소
Honeywell International, Inc.
대리인 / 주소
Black Lowe & Graham PLLC
인용정보
피인용 횟수 :
5인용 특허 :
94
초록▼
Methods and apparatus are provided for a low cost optical gyro using thin film waveguides to direct light beams among the components of the gyro. The gyro includes a substrate having an insulator layer, a silicon waveguide formed on the insulator layer, and a resonator coupled to the silicon wavegui
Methods and apparatus are provided for a low cost optical gyro using thin film waveguides to direct light beams among the components of the gyro. The gyro includes a substrate having an insulator layer, a silicon waveguide formed on the insulator layer, and a resonator coupled to the silicon waveguide and configured to circulate a portion of a first light beam in a first counter-propagating direction and circulate a portion of a second light beam in a second counter-propagating direction. The first silicon waveguide propagates the first and second light beams therethrough. Each of the first and second light beams has a resonance frequency when circulating in the resonator.
대표청구항▼
What is claimed is: 1. An optical gyro for measuring a rotation rate, the optical gyro comprising: a substrate comprising an insulator layer; a first silicon waveguide formed on said insulator layer, said first silicon waveguide configured to propagate first and second light beams therethrough; and
What is claimed is: 1. An optical gyro for measuring a rotation rate, the optical gyro comprising: a substrate comprising an insulator layer; a first silicon waveguide formed on said insulator layer, said first silicon waveguide configured to propagate first and second light beams therethrough; and a resonator coupled to said first silicon waveguide and having at least one reflecting element and first and second counter-propagating directions, said at least one reflecting element configured to circulate a portion of said first light beam in said first counter-propagating direction and circulate a portion of said second light beam in said second counter-propagating direction, each of said first and second counter-propagating directions having a resonance frequency for light propagation within said resonator, a difference between said resonance frequencies indicating the rotation rate. 2. An optical gyro according to claim 1, wherein said substrate, said first silicon waveguide, and said resonator together form a monolithic structure. 3. An optical gyro according to claim 1, wherein said substrate further comprises a silicon layer; and wherein said at least one ref1ecting element comprises a set of reflecting elements formed in said silicon layer, each of said set of reflecting elements comprising at least one of a dielectric material and a metal material, a first reflecting element of said set of reflecting elements coupled to said first silicon waveguide and configured to receive said first and second light beams, said set of reflecting elements configured to circulate said portions of said first and second light beams in a closed optical path in said silicon layer. 4. An optical gyro according to claim 3, wherein each of said set of reflecting elements comprises a surface configured to reflect said portions of said first and second light beams. 5. An optical gyro according to claim 1, wherein said substrate further comprises a silicon layer; and wherein said resonator comprises: an input element formed in said silicon layer and comprising at least one of the group consisting of SiO.sub.2, a dielectric material, and a metal; and wherein the at least one reflecting element comprises a set of reflecting elements each comprising a structure of photonic crystal holes formed in said silicon layer, said input element and said set of reflecting elements together configured to circulate said portions of said first and second light beams in a closed optical path in said silicon layer. 6. An optical gyro according to claim 1, wherein said resonator comprises: a silicon layer; an input element formed in said silicon layer and comprising a dielectric material and silicon, said input element configured to receive said first and second light beams; and a second silicon waveguide coupled to said input element and configured to circulate said portions of said first and second light beams therethrough. 7. An optical gyro according to claim 1, wherein said substrate further comprises a silicon layer; and wherein said resonator comprises: a trench formed in said silicon layer, said trench having a surface configured to circulate said portions of said first and second light beams through a free space. 8. An optical gyro according to claim 7, wherein said resonator further comprises a reflective coating on said surface of said trench. 9. An optical gyro according to claim 1 further comprising: at least one modulator coupled to said first silicon waveguide and configured to modulate at least one of said first and second light beams; and at least one detector coupled to said first silicon waveguide, wherein said resonance frequency of said first light beam indicates a resonance frequency of said first counter-propagating direction and a frequency of said second light beam is tuned to indicate a resonance frequency of said second counter-propagating direction, and wherein said at least one detector is configured to determine a difference between said resonance frequency of said first counter-propagating direction and said resonance frequency of said second counter-propagating direction, said difference proportional to a rotation rate of said resonator. 10. An optical gyro for measuring a rotation rate, the optical gyro comprising: a substrate comprising an insulator layer; at least one monochromatic light source on said substrate and configured to produce first and second light beams; a first silicon waveguide formed on top of said insulator layer, said first silicon waveguide configured to propagate said first and second light beams therethrough; and a resonator coupled to said first silicon waveguide and having at least one reflecting element configured to direct a first circulating light beam in a first counter-propagating direction and direct a second circulating light beam in a second counter-propagating direction, said first circulating light beam derived from a portion of said first light beam, said second circulating light beam derived from a portion of said second light beam, each of said first and second circulating light beams having a resonance frequency when circulating in said resonator, a difference between said first and second resonance frequencies indicating the rotation rate. 11. An optical gyro according to claim 10 further comprising: an optical phase modulation network coupled to said first silicon waveguide, said first silicon waveguide having an electrical carrier concentration and a refractive index, said optical phase modulation network configured to modulate said electrical carrier concentration and said refractive index to modulate said first and second light beams; a detector array coupled to said first silicon waveguide and configured to sample said first and second circulating light beams; and a detection circuit coupled to said detector array and configured to determine said resonance frequencies of said first and second circulating light beams. 12. An optical gyro according to claim 11, wherein said substrate further comprises a silicon layer, wherein said first silicon waveguide comprises a thin film, and wherein at least one of said optical phase modulation network, said detector array, and said detection circuit is formed in one of said silicon layer and said thin film. 13. An optical gyro according to claim 11, wherein at least one of said optical phase modulation network, said detector array, and said detection circuit is a discrete element coupled to said substrate. 14. An optical gyro according to claim 11, wherein said optical phase modulation network comprises at least one element selected from a p-type intrinsic n-type (PIN) diode and a metal oxide semiconductor (MOS) capacitor. 15. An optical gyro according to claim 11, wherein said detector array comprises at least one diode containing germanium. 16. A method for sensing a rotation rate of a ring resonator formed on a substrate, the substrate having a silicon layer and an insulator layer, the method comprising the steps of: directing first and second light beams to the ring resonator via a first silicon waveguide formed in the insulator layer; circulating, with at least one reflecting element of the ring resonator, a portion of the first light beam in a first counter-propagating direction of the ring resonator and a portion of the second light beam in a second counter-propagating direction of the ring resonator; and measuring a frequency shift between a first resonance frequency of the first counter-propagating direction of the ring resonator and a second resonance frequency of the second counter-propagating direction of the ring resonator, the frequency shift indicating the rotation rate. 17. A method according to claim 16, wherein said circulating step comprises directing the portions of the first and second light beams along a closed optical path in a portion of the silicon layer. 18. A method according to claim 16, wherein the at least one reflecting element comprises a set of reflecting elements formed in the silicon layer, each of the set of reflecting elements comprising one of at least one dielectric material and at least one metal material, and wherein said circulating step comprises directing the portions of the first and second light beams along a closed optical path in the silicon layer by the set of reflecting elements. 19. A method according to claim 16, wherein the at least one reflecting element comprises a set of reflecting elements each comprising a structure of photonic crystal holes formed in the silicon layer, and wherein said circulating step comprises directing the portions of the first and second light beams along a closed optical path in the silicon layer by the set of reflecting elements. 20. A method according to claim 16, wherein the ring resonator comprises a trench formed in the silicon layer, the trench having a reflective surface, and wherein said circulating step comprises directing portions of the first and second light beams along a closed optical path in free space via the reflective surface of the trench.
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