초록 ▼

A component for use in a combustion turbine (10) is provided that includes a substrate (212) and a microelectromechanical system (MEMS) device (50, 250) affixed to the substrate (212). At least one connector (52) may be deposited in electrical communication with the MEMS device (50, 250) for routing

A component for use in a combustion turbine (10) is provided that includes a substrate (212) and a microelectromechanical system (MEMS) device (50, 250) affixed to the substrate (212). At least one connector (52) may be deposited in electrical communication with the MEMS device (50, 250) for routing a data signal from the MEMS device (50, 250) to a termination location (59). A barrier coating (216) may be deposited on the substrate (212) wherein the MEMS device (50, 250) is affixed beneath a surface of the barrier coating (216). A plurality of trenches (142) may be formed in the barrier coating (216) at respective different depths below the surface of the barrier coating (216) and a MEMS device (50, 250) deposited within each of the plurality of trenches (142). A monitoring system (30) is provided that may include a processing module (34) programmed for receiving data from the MEMS device (50, 250).

대표청구항 ▼

We claim as our invention: 1. A component for use in a combustion turbine, the component comprising: a substrate; a MEMS device affixed to the substrate; and at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination locat

We claim as our invention: 1. A component for use in a combustion turbine, the component comprising: a substrate; a MEMS device affixed to the substrate; and at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination location. 2. The component of claim 1 further comprising: a transmitter in electrical communication with the at least one connector for wirelessly transmitting the data signal outside the combustion turbine. 3. The component of claim 1 further comprising a barrier coating deposited on the substrate wherein the MEMS device is affixed beneath a surface of the barrier coating. 4. The component of claim 3 further comprising a trench formed in the barrier coating wherein the MEMS device is affixed to the barrier coating within the trench. 5. The component of claim 4 further comprising a backfill material deposited in the trench over the MEMS device. 6. The component of claim 3 further comprising a plurality of trenches formed in the barrier coating at respective different depths below the surface of the barrier coating and a MEMS device deposited within each of the plurality of trenches. 7. The component of claim 3, the MEMS device comprising a proximity sensor configured to detect intrusion of an object into the barrier coating. 8. The component of claim 1, the MEMS device selected from the group consisting of a MEMS accelerometer, a MEMS load cell, a MEMS strain gauge, a MEMS temperature sensor, a MEMS heat flux sensor, a MEMS flow sensor and a MEMS pressure transducer. 9. A turbine comprising: a turbine comprising a row of turbine blades and a row of ring segments circumscribing the row of blades; a MEMS device affixed to a component within the turbine; at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination location; a monitoring system comprising a processing module programmed for receiving data from the MEMS device; and a transmitter for receiving the data signal from the termination location and transmitting the data signal to the monitoring system. 10. The turbine of claim 9, the MEMS device selected from the group consisting of a MEMS accelerometer, a MEMS load cell, a MEMS strain gauge, a MEMS temperature sensor, a MEMS heat flux sensor, a MEMS flow sensor and a MEMS pressure transducer. 11. The turbine of claim 9 further comprising a barrier coating deposited on a ring segment wherein the MEMS device is affixed beneath a surface of the barrier coating. 12. The turbine of claim 11 further comprising a trench formed in the barrier coating wherein the MEMS device is affixed to the barrier coating within the trench. 13. The turbine of claim 9 further comprising: an abradable coating system deposited on a ring segment; the MEMS device comprising a proximity sensor affixed beneath a surface of the abradable coating system configured to detect intrusion of an object into the abradable coating system; and wherein the processing module is programmed to calculate a clearance between a tip of at least one blade of the row of blades and the MEMS device based on data received from the MEMS device. 14. The turbine of claim 9 further comprising: a barrier coating deposited on the component; the MEMS device comprising a pressure transducer affixed beneath a surface of the barrier coating; and wherein the processing module is programmed to detect wear of the barrier coating based on data received from the MEMS device. 15. The turbine of claim 9 further comprising: a barrier coating deposited on the component; and a plurality of trenches formed in the barrier coating at respective different depths below the surface of the barrier coating and a MEMS device deposited within each of the plurality of trenches. 16. The turbine of claim 9, the MEMS device comprising a load cell configured to measure static and dynamic contact forces between the first component and a second component within the turbine. 17. The turbine of claim 9, the MEMS device comprising a strain gauge affixed to at least one of the plurality of turbine blades configured to measure static and dynamic strains on the at least one of the plurality of turbine blades. 18. The turbine of claim 9, the MEMS device comprising a heat flux sensor affixed to the first component configured to measure a thermal state of the component. 19. The turbine of claim 9 further comprising: an abradable coating system deposited on a surface of the ring segment; a trench formed in the abradable coating system; the MEMS device deposited in the trench; and a backfill material deposited in the trench over the MEMS device. 20. A monitoring system for use with a turbine, the monitoring system comprising: at least one MEMS device configured for use with the turbine; a processing module programmed to receive data from the at least one MEMS device and to develop information based on the received data; and a transmitter for transmitting data from the at least one MEMS device to the processing module. 21. The monitoring system of claim 20, the processing module programmed to generate a control signal responsive to the received data, the control signal useful for controlling an operating parameter of the turbine. 22. The monitoring system of claim 21, the at least one MEMS device comprising a MEMS proximity sensor wherein the control signal is useful for controlling a clearance between a row of turbine blades and a ring segment. 23. The monitoring system of claim 20, the at least one MEMS device comprising a load cell wherein the processing module is programmed to develop information with respect to static and dynamic contact forces between a first component within the turbine and a second component within the turbine. 24. The monitoring system of claim 20, the at least one MEMS device comprising a heat flux sensor wherein the processing module is programmed to develop information with respect to a thermal state of a component within the turbine. 25. The monitoring system of claim 20, the at least one MEMS device comprising a strain gauge wherein the processing module is programmed to develop information with respect to static and dynamic strains on at least one turbine blade.