[미국특허]
Pyrotechnic microsystem and method for fabricating a microsystem
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
F15B-015/19
F15B-015/00
출원번호
UP-0585356
(2005-01-20)
등록번호
US-7587977
(2009-09-24)
우선권정보
FR-04 00720(2004-01-27)
국제출원번호
PCT/FR05/050034
(2005-01-20)
§371/§102 date
20060706
(20060706)
국제공개번호
WO05/075835
(2005-08-18)
발명자
/ 주소
Broyer, Patrick
Colin, Bruno
Roller, Denis
출원인 / 주소
Biomerieux
SNPE Materiaux Energetiques
대리인 / 주소
Oliff & Berridge, PLC
인용정보
피인용 횟수 :
3인용 특허 :
5
초록▼
The invention relates to a microsystem and a method for fabricating a microsystem. The pyrotechnic microsystem (7, 1') comprises a substrate having at least two separate electrical initiation zones, each of which provides separate electrical initiation of a pyrotechnic material deposited on the subs
The invention relates to a microsystem and a method for fabricating a microsystem. The pyrotechnic microsystem (7, 1') comprises a substrate having at least two separate electrical initiation zones, each of which provides separate electrical initiation of a pyrotechnic material deposited on the substrate. This microsystem (7, 1') is characterized in that the same pyrotechnic material deposit (721, 721', 13) covers both initiation zones, said deposit (721, 721', 13) produced on the substrate having a thickness sufficiently small for the initiation of the pyrotechnic material in the initiation zone to remain localized and not propagate to the other initiation zone, but sufficient to generate a specific gas quantity.
대표청구항▼
The invention claimed is: 1. A pyrotechnic microsystem comprising a substrate having at least two separate electrical initiation zones of a pyrotechnic material deposited on the substrate for ignition by at least one initiator, wherein the same pyrotechnic material deposit covers both initiation zo
The invention claimed is: 1. A pyrotechnic microsystem comprising a substrate having at least two separate electrical initiation zones of a pyrotechnic material deposited on the substrate for ignition by at least one initiator, wherein the same pyrotechnic material deposit covers both initiation zones, said deposit having a thickness sufficiently small for the initiation of the pyrotechnic material at one initiation zone to remain localized and self-extinguishing and not propagate to the other initiation zone, but sufficient to generate a specific gas quantity. 2. The microsystem as claimed in claim 1, wherein the pyrotechnic material deposit has a thickness of less than 100 μm. 3. The microsystem as claimed in claim 1, wherein the substrate comprises an assembly of superimposed layers. 4. The microsystem as claimed in claim 3, wherein the pyrotechnic material deposit constitutes one of the superimposed layers. 5. The microsystem as claimed in claim 4, wherein the pyrotechnic material deposit is an adhesive between a layer lying above said deposit and a layer lying below said deposit. 6. The microsystem as claimed in claim 3, comprising a deformable membrane partially delimiting a combustion chamber to receive gases generated by at least one part of the pyrotechnic material deposit in contact with one of the initiation zones. 7. The microsystem as claimed in claim 6, comprising a layer through which an orifice forming the combustion chamber is formed, said layer being between the membrane, itself forming a layer, and the pyrotechnic substance deposit. 8. The microsystem as claimed in claim 1, wherein the deposited pyrotechnic material is in the form of a nitrocellulose-based varnish. 9. The microsystem as claimed in claim 8, wherein the varnish has a thickness of between 5 and 40 μm after drying. 10. The microsystem as claimed in claim 1, wherein each of the initiation zones can be initiated by an electrical resistance on the substrate. 11. The micro system as claimed in claim 1, wherein each of the initiation zones can be produced at the point of contact of a conductive finger, connected to an electrical generator on the substrate, and wherein the substrate is made of metallic substance, which is also connected to said generator. 12. The micro system as claimed in claim 1, comprising at least one microactuator on said substrate. 13. The microsystem as claimed in claim 12, wherein said microactuator comprises a chamber covered by a deformable membrane. 14. The microsystem as claimed in claim 12, comprising a plurality of microactuators on said substrate. 15. A method for fabricating a microsystem comprising a plurality of adjacent microactuators established on a substrate, each microactuator being capable of having a specific effect owing to the gases generated by the combustion of a pyrotechnic material initiated from an electrical initiation zone associated with each microactuator, the method comprising: depositing a pyrotechnic material layer common to all the microactuators on the substrate with a thickness sufficiently small for the initiation of the pyrotechnic substance in one initiation zone to remain localized and not propagate to the other initiation zone, but sufficient to generate a specific gas quantity. 16. The method as claimed in claim 15, consisting of stacking superimposed layers, the pyrotechnic material layer constituting one of the layers of the stack. 17. The method as claimed in claim 15, wherein the pyrotechnic material layer is deposited with a thickness of less than 100 μm. 18. The method as claimed in claim 15, wherein the pyrotechnic material layer is deposited by coating, screen printing, pad printing, immersion or spraying.
Shih, Christopher C.; Campbell, Douglas P.; Bergerson, Lee D.; Esterberg, Dean M.; Bowers, Paul A.; Faigle, Ernst M.; Fogle, Jr., Homer W.; Stonich, Ivan L.; Lewis, Jr., David H.; Streif, Eric N.; Pi, Seat belt webbing pretensioner using MEMS devices.
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