초록 ▼

An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass. The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is

An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass. The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is measured with respect to additional arrays of capacitive plates inter-digitated in a comb like pattern.

대표청구항 ▼

We claim: 1. An accelerometer comprising: a) a planar substrate having an upper surface and a lower surface, b) a proof mass having at least a portion disposed within a principle plane parallel to the plane of the substrate, and further comprising; i) at least one support beam disposed parallel to

We claim: 1. An accelerometer comprising: a) a planar substrate having an upper surface and a lower surface, b) a proof mass having at least a portion disposed within a principle plane parallel to the plane of the substrate, and further comprising; i) at least one support beam disposed parallel to the upper surface of said planar substrate, ii) a first plurality of branched electrodes, which comprise; (1) a plurality of support arms extending laterally from the at least one support beam, (2) a plurality of movable electrode plates distributed along each of the plurality of support arms, the plates being disposed perpendicular to the upper surface of said planar substrate, c) a plurality of folded springs coupling said proof mass to said substrate for confining the movement of said proof mass in a plane parallel with the plane of the substrate and in the direction parallel to the plane of the movable electrode plates, d) a second and third plurality of branched electrodes coupled to said substrate, each branched electrode comprising; i) a plurality of static electrode plates distributed along the branched electrodes, the static electrode plates being disposed parallel and interlaced in capacitive communication with the movable electrode plates and perpendicular to said substrate, e) wherein at least two pairs of capacitors are defined by the electrical communication between the static electrode plates on the second and third plurality of branched electrodes and at least a portion of the first plurality of electrodes on said proof mass wherein alternating adjacent branched electrodes on the proof mass are electrically isolated to form a first and second subset. 2. An accelerometer according to claim 1 wherein the alternating adjacent branched electrodes connected to the substrate are electrically isolated to form the second and third plurality of branched electrodes. 3. An accelerometer according to claim 1 wherein the branched electrodes on the proof mass are bilaterally branched such that the moving electrode plates extend in opposite directions from the support arms. 4. An accelerometer according to claim 3 wherein the second and third plurality of branched electrodes are bilaterally branched such that the moving electrode plates extend in opposite directions from the support arms. 5. An accelerometer according to claim 1 wherein the static electrode plates extend up from the substrate and the movable electrode plates extend vertically from at least a portion of the proof mass. 6. An accelerometer according to claim 1 wherein the first and second plurality of branched electrodes extend inward from an open frame formed in the substrate and wherein at least a portion of the proof mass has a portion in the common plane of the first and second plurality of branched electrodes. 7. An accelerometer according to claim 1 wherein the first and second plurality of branched electrodes extend inward from an open frame formed in the substrate and wherein the proof mass comprises; a) a first portion in the common plane of the first and second plurality of branched electrodes. b) a second portion vertically disposed with respect to the common plane of the first and second plurality of branched electrodes. 8. An accelerometer according to claim 1 wherein the folded spring have protruding stops at the fold portion for limiting spring compression. 9. An accelerometer according to claim 1 wherein the folded spring have outward extending protruding stops to prevent the straight portion of the springs from making contact when the spring is compressed. 10. An accelerometer according to claim 1 the edge of the frame have a plurality of fingers to prevent stiction with portions said proof mass. 11. An accelerometer according to claim 10 wherein said fingers are disposed between the springs.