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Composite stamper for imprint lithography 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B29C-043/32
  • B29C-059/00
출원번호 UP-0741316 (2003-12-19)
등록번호 US-7632087 (2009-12-24)
발명자 / 주소
  • Homola, Andrew M.
출원인 / 주소
  • WD Media, Inc.
대리인 / 주소
    Blakely, Sokoloff, Taylor & Zafman LLP
인용정보 피인용 횟수 : 70  인용 특허 : 19

초록

A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.

대표청구항

What is claimed is: 1. A production stamper, comprising: a patterned layer comprising a hard material and having a first diameter, the patterned layer having a back plane bounded by an outer wall forming a cavity; and a back plane layer directly bonded to the back plane of the patterned layer withi

이 특허에 인용된 특허 (19)

  1. Nuij Pieter W. J. M. (Farum DKX) van den Bekerom Peter P. W. L. (Eindhoven NLX) Mulder Evert-Jan (\s Hertogenbosch NLX), Apparatus for manufacturing a disc-shaped information carrier.
  2. Llabres Raymond (Paris FRX) Fournier Liliane (Paris FRX) Lemonon Claire (Paris FRX), Arrangement for pressing flexible discs and a pressing process using this arrangement.
  3. Stanton Lawrence E. ; Landry Phillip, Compression mold with rubber shims.
  4. Renoux Robert A. (Poissy FRX), Device for pressing objects made from a thermoplastic material, and particularly phonographic records.
  5. Johnston Samuel J. B. (Ashford GB2), Disc record preparation.
  6. Jacobson, Joseph M.; Bulthaup, Colin A.; Wilhelm, Eric J.; Hubert, Brian N., Fabrication of finely featured devices by liquid embossing.
  7. Gauzner, Gennady; Wago, Koichi; Kuo, David Shiao-Min, Heat-transfer-stamp process for thermal imprint lithography.
  8. Biebuyck Hans Andre,CHX ; Michel Bruno,CHX, Lithographic surface or thin layer modification.
  9. Vedamuttu Paul,GBX, Manufacture of optical data storage disc.
  10. Nishizawa Akira (Yokohama JPX) Kondo Tetsuya (Yokohama JPX), Method and apparatus for the fabrication of optical record media such as a digital audio disc.
  11. Mentz Brian R. ; Dolan Timothy F., Method for embossing holograms into aluminum and other hard substrates.
  12. Suleski Thomas J., Method of making optical replicas by stamping in photoresist and replicas formed thereby.
  13. Wago, Koichi; Gauzner, Gennady; Formato, Christopher Joseph, Multi-level stamper for improved thermal imprint lithography.
  14. Chou Stephen Y., Nanoimprint lithography.
  15. Okubo Yukitoshi (Yokohama JPX) Santoh Tsuyoshi (Yokohama JPX) Tamura Miki (Yokohama JPX) Mihara Chieko (Kawasaki JPX) Sugata Hiroyuki (Yamato JPX) Kanome Osamu (Kawasaki JPX) Yashima Masataka (Yokoha, Optical recording medium substrate sheet producing apparatus having roll stamper with elastomer layer of predetermined h.
  16. Chou Stephen Y., Release surfaces, particularly for use in nanoimprint lithography.
  17. Bernard, Andre; Delamarche, Emmanuel; Donzel, Christian; Hilborn, Jons G.; Michel, Bruno; Stutz, Richard; Wolf, Heiko, Silicone elastomer stamp with hydrophilic surfaces and method of making same.
  18. Biebuyck Hans Andre,CHX ; Michel Bruno,CHX, Stamp for a lithographic process.
  19. Greschner Johann (Pliezhausen DEX) Schmid Gerhard (Leinfelden-Echterdingen DEX) Steiner Werner (Bblingen DEX) Trippel Gerhard (Sindelfingen DEX) Wolter Olaf (Schnaich DEX), System for stamping an optical storage disk.

이 특허를 인용한 특허 (70)

  1. Tan, Hooi In; Teoh, Chin Hoe, Acidic post-sputter wash for magnetic recording media.
  2. Giovenzana, Davide; Soderbloom, Paul E., Allowing fast data zone switches on data storage devices.
  3. Homola, Andrew M., Composite stamper for imprint lithography.
  4. Koo, Soh Kian; Yap, Kok Kin; Ayob, Kamaruddin; Kun, Lau Meng, Detergent composition with low foam and high nickel solubility.
  5. Hernanta, Determining storage media substrate material type.
  6. Kesvanathan, Prem Kumar; Chen, Shaun H., Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer.
  7. Varaprasad, Bollapragada; Takahashi, Yukiko; Hono, Kazuhiro; Ajan, Antony; Yuan, Hua; Chernyshov, Alexander S., Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates.
  8. Homola, Andrew; Zhang, Chunbin; Dorsey, Paul C.; Treves, David, Electro-deposited passivation coatings for patterned media.
  9. Bertero, Gerardo A.; Alex, Michael; Wolf, Christopher B.; Champion, Eric J., Energy assisted magnetic recording medium capable of suppressing high DC readback noise.
  10. Ozawa, Tsuyoshi, Evaluation method of magnetic disk, manufacturing method of magnetic disk, and magnetic disk.
  11. Wang, Bincheng; Chernyshov, Alexander S.; Yuan, Hua; Ajan, Antony; Acharya, B. Ramamurthy, Exchange break layer for heat-assisted magnetic recording media.
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  13. Ho, Hoan Cong; Yuan, Hua; Seki, Tomoko; Ajan, Antony; Dorsey, Paul C., HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers.
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  15. Bertero, Gerardo A.; Treves, David, Heat assisted magnetic recording method for media having moment keeper layer.
  16. Wang, Bincheng; Ajan, Antony; Mallary, Michael L., High damping cap layer for magnetic recording media.
  17. Treves, David; Dorsey, Paul C., Imprinting method with embossing foil free to expand for nano-imprinting of recording media.
  18. Liu, Jiaxing; Seki, Tomoko; Ajan, Antony; Zhang, Rui, Iridium underlayer for heat assisted magnetic recording media.
  19. Koo, Soh Kian; Yap, Kok Kin; Quah, EE Boon, Low foam media cleaning detergent.
  20. Suzuki, Kota; Shimokawa, Koichi; Hamakubo, Katsushi; Itoh, Kae, Lubricant compound for magnetic disk and magnetic disk.
  21. Knigge, Bernhard E.; Biswas, Mousumi M., Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure.
  22. Knigge, Bernhard; Mani Biswas, Mousumi, Lubricants with high thermal stability for heat-assisted magnetic recording.
  23. Shimokawa, Koichi; Hamakubo, Katsushi; Itoh, Kae, Magnetic disk and manufacturing method thereof.
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  30. Wang, Zhenguo; Okamoto, Iwao; Vu, Sy; Hong, Daehoon, Magnetic seed layer used with an unbalanced soft underlayer.
  31. Xu, Ge; Yao, Xiaofeng; Tan, Wei Kah, Magnetic-recording medium including a carbon overcoat implanted with nitrogen and hydrogen.
  32. Abdul Rashid, Ahmad Faisul B. HJ.; Gregory, Landdell, Mandrel for substrate transport system with notch.
  33. Dorsey, Paul C., Manufacturing of hard masks for patterning magnetic media.
  34. Choy, Yew Fai; Hashim, Hasmizan Bin; Kasmon, Syahrolnizam Bin, Media substrate gripper including a plurality of snap-fit fingers.
  35. Yi, Chang B.; Tanaka, Tatsuru; Ha, Phi Cam; Taburaza, Noe D.; Chiong, Yew Ming; Liu, Hongling, Method and apparatus for cryogenic dynamic cooling.
  36. Kong, Chee Chuan, Method for HDD disk defect source detection.
  37. Osugi, Masahiro; Yao, Lily; Jiang, Ming; Luo, Guanghong; Kan, Wai-Ming J., Method for providing a magnetic recording transducer using a chemical buffer.
  38. Sakamoto, Kazuaki; Kajiwara, Takenori, Method of manufacturing a perpendicular magnetic disc.
  39. Setuwanto, Hengky; Lee, Thien Seng; Ee, Lingpin, Method of testing a head for contamination.
  40. Desai, Mrugesh; Gee, Harold H.; Nichols, Mark A., Methods for measuring media performance associated with adjacent track interference.
  41. Srinivasan, Kumar; Li, Tuqiang; Desai, Mrugesh, NiFeX-based seed layer for magnetic recording media.
  42. Sato, Tokichiro; Kajiwara, Takenori, Perpendicular magnetic recording disc.
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  60. Zhao, Jinmin, Systems and methods for calibrating a load cell of a disk burnishing machine.
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  67. Girgis, Emad; Mani, Prakash; Papusoi, Cristian; Desai, Mrugesh; Acharya, Ramamurthy, TbFeCo in PMR media for SNR improvement.
  68. Zhang, Rui; Seki, Tomoko; Ajan, Antony; Dorsey, Paul C., Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media.
  69. Yang, Yang; Okamoto, Iwao, Thermally stabilized perpendicular magnetic recording medium.
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