[미국특허]
Wick systems for complexed gas technology
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B01D-050/00
B01D-053/02
B01D-019/00
출원번호
UP-0743925
(2007-05-03)
등록번호
US-7648682
(2010-02-22)
발명자
/ 주소
McDermott, Wayne Thomas
Tempel, Daniel Joseph
Henderson, Philip Bruce
Pearlstein, Ronald Martin
출원인 / 주소
Air Products and Chemicals, Inc.
대리인 / 주소
Yang, Lina
인용정보
피인용 횟수 :
1인용 특허 :
17
초록▼
The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from t
The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising: (a) a reactive liquid having Lewis acidity or basicity; (b) a gas liquid complex in a reversible reacted state formed under conditions of pressure and temperature by contacting the gas having Lewis acidity with the reactive liquid having Lewis basicity or the gas having Lewis basicity with the reactive liquid having Lewis acidity; (c) a non-reactive wick medium holding and dispersing the reactive liquid and the gas liquid complex therein.
대표청구항▼
The invention claimed is: 1. An apparatus for effecting storage and delivery of a gas, the storage and delivery apparatus comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvemen
The invention claimed is: 1. An apparatus for effecting storage and delivery of a gas, the storage and delivery apparatus comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising: (a) a reactive liquid having Lewis acidity or basicity; (b) a gas liquid complex in a reversible reacted state formed under conditions of pressure and temperature by contacting the gas having Lewis acidity with the reactive liquid having Lewis basicity or the gas having Lewis basicity with the reactive liquid having Lewis acidity; (c) a non-reactive wick medium holding and dispersing the reactive liquid and the gas liquid complex therein. 2. The apparatus of claim 1 wherein the non-reactive wick medium is selected from the group consisting of: polymer fabric, woven or non-woven polypropylene, high density polyethylene fiber, microporous membrane of fluoropolymer or other polymer materials, hydrogel, aquagel liquid retention granule, aerogels, xerogels, sintered glass, sintered metal, metal felt of fine metal fibers, stainless steel fibers, fibers of metal alloys, woven metal fibers, woven or non-woven cellulose fibers, metal foams, super absorbent polymers and the mixture therefore. 3. The apparatus of claim 1 wherein the non-reactive wick medium has a structure with multiple wick pads alternately layered with open spacers and a cylindrical support spacer oriented in an axial direction within the vessel, wherein the wick pads and the open spacer are having structures selected from the group consisting of cylindrical layers around a centrally located cylindrical support spacer, circular plates with central holes stacked axially within an outer cylindrical support spacer, and a pleated structure wherein the pleats are oriented along the cylinder axis to provide maximum wick volume, maximum layer surface and maximum system capacity. 4. The apparatus of claim 1 wherein the non-reactive wick medium has a single wick layer and a single spacer layer formed into a cylindrical structure by spiral winding around a central cylindrical support spacer. 5. The apparatus of claim 4, wherein the single wick layer and the single spacer layer are folded into a pleated structure wherein the pleats are oriented along the central axis of the cylindrical structure to provide maximum wick volume, maximum layer surface and maximum system capacity. 6. The apparatus of claim 1, wherein the non-reactive wick medium has a structure with the vessel filled with multiple wicking sticks formed by inserting wick medium into thin spacer tubes of inert netting material to have maximum system capacity. 7. The apparatus of claim 1 wherein the non-reactive wick medium is a wick granular bed or a wick bed with various structural shapes arranged randomly or in an orderly pattern along a centrally located cylindrical support spacer optionally containing a centrally located microporous tube. 8. The apparatus of claim 1 wherein the non-reactive wick medium has a single wick layer and a single spacer layer folded into a pleated structure wherein the pleats are oriented radically to form a bellows-type cylindrical structure. 9. The apparatus of claim 1 wherein the reactive liquid has a vapor pressure below about 10−2 Torr at 25° C. 10. The apparatus of claim 1 wherein the Lewis acidic gas is selected from the group consisting of boron trifluoride, boron trichloride, diborane, borane, silicon tetrafluoride, germanium tetrafluoride, germane, phosphorous trifluoride, phosphorous pentafluoride, arsenic pentafluoride, sulfur tetrafluoride, tin tetrafluoride, tungsten hexafluoride, molybdenum hexafluoride, hydrogen cyanide, hydrogen fluoride, hydrogen chloride, hydrogen iodide, hydrogen bromide, isotopically-enriched analogs and mixtures thereof. 11. The apparatus of claim 1 wherein the Lewis basic gas is selected from the group consisting of phosphine, arsine, stibine, ammonia, hydrogen sulfide, hydrogen selenide, hydrogen telluride, isotopically-enriched analogs, basic organic or organometallic compounds and mixtures thereof. 12. The apparatus of claim 1 wherein the reactive liquid is an ionic liquid. 13. The apparatus of claim 12 wherein the ionic liquid is comprised of a salt selected from the group consisting of alkylphosphonium, alkylammonium, tetra alkylphosphonium, tetra alkylammonium N-alkylpyridinium, N,N-dialkylpyrrolidinium, N,N′-dialkylimidazolium cations and the mixture therefore. 14. The apparatus of claim 13 wherein the ionic liquid having Lewis acidity is comprised of a anion component from a metal halide selected from the group consisting of copper, aluminum, iron, zinc, tin, antimony, titanium, niobium, tantalum, gallium, and indium halide and the mixture therefore. 15. The apparatus of claim 14 wherein the anion component is selected from the group consisting of CuCl2−, CuBr2−, CuClBr−, Cu2Cl3−, Cu2Cl2Br−, Cu2ClBr2−, Cu2Br3−, AlCl4−, Al2Cl7−, ZnCl3−, ZnCl42−, Zn2Cl5−, FeCl3−, FeCl4−, Fe2Cl7−, TiCl5−, TiCl62−, SnCl5, and SnCl62−, and the mixture therefore. 16. The apparatus of claim 13 wherein the ionic liquid having Lewis basicity is selected from the group consisting of carboxylates, fluorinated carboxylates, sulfonates, fluorinated sulfonates, imides, borates, halides and the mixture therefore. 17. The apparatus of claim 16 wherein the ionic liquid having Lewis basicity is comprised of an anion component selected from the group consisting of BF4−, PF6−, AsF6−, SbF6−, CH3COO−, CF3COO−, CF3SO3−, CH3OSO3−, CH3CH2OSO3−, p-CH3—C6H4SO3−, (CF3SO2)2N−, (NC)2N−, (CF3SO2)3C−, chloride, F(HF)n and the mixture therefore. 18. A process for effecting storage and delivery of a gas within a storage and delivery apparatus comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising: (a) storing a reactive liquid having Lewis acidity or basicity in a non-reactive wick medium; (b) storing a gas liquid complex in a reversible reacted state formed under conditions of pressure and temperature by contacting the gas having Lewis acidity with the reactive liquid having Lewis basicity or the gas having Lewis basicity with the reactive liquid having Lewis acidity in the non-reactive wick medium. 19. The process of claim 18 wherein the non-reactive wick medium is selected from the group consisting of polymer fabric, woven or non-woven polypropylene, high density polyethylene fiber, microporous membrane of fluoropolymer or other polymer materials, hydrogel, aquagel liquid retention granule, aerogels, xerogels, sintered glass, sintered metal, metal felt of fine metal fibers, stainless steel fibers, fibers of metal alloys, woven metal fibers, woven or non-woven cellulose fibers, metal foams, super absorbent polymers and mixtures thereof. 20. The process of claim 18 wherein the non-reactive wick medium has a structure with multiple wick pads alternately layered with open spacers and a cylindrical support spacer oriented in an axial direction within the vessel, wherein the wick pads and the open spacer are having structures selected from the group consisting of cylindrical layers around a centrally located cylindrical support spacer, circular plates with central holes stacked axially within an outer cylindrical support spacer, and a pleated structure wherein the pleats are oriented along the cylinder axis to provide maximum wick volume, maximum layer surface and maximum system capacity. 21. The process of claim 18 wherein the non-reactive wick medium has a single wick layer and a single spacer layer formed into a cylindrical structure by spiral winding around a central cylindrical support spacer. 22. The process of claim 21, wherein the single wick layer and the single spacer are folded into a pleated structure wherein the pleats are oriented along the central axis of the cylindrical structure to provide maximum wick volume, maximum layer surface and maximum system capacity. 23. The process of claim 18 wherein the non-reactive wick medium is a wick granular bed or a wick bed with various structural shapes arranged randomly or in an orderly pattern along a centrally located cylindrical support spacer optionally containing a centrically located microporous tube. 24. The process of claim 18, wherein the non-reactive wick medium has a single wick layer and a single spacer folded into a pleated structure wherein the pleats are oriented radically to form a bellows-type cylindrical structure. 25. The process of claim 18, wherein the non-reactive wick medium has a structure with the vessel filled with multiple wicking sticks formed by inserting wick medium into thin spacer tubes of inert netting material to have maximum system capacity.
Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
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