|국가/구분||United States(US) Patent 등록|
|국제특허분류(IPC7판)||B65D-051/16 B65D-085/30 H01L-021/02|
|미국특허분류(USC)||206/710; 206/711; 137/508|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 5 인용 특허 : 11|
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between th...
The invention claimed is: 1. A substrate storage container including: a container body; a door for opening and closing the container body; a valve unit attached to a through-hole formed in the bottom of the container body, for regulating the gas flow with respect to the container body, characterized in that the valve unit comprises: a fixed sleeve for gas flow, fitted in the through-hole; a holding sleeve for gas flow, threadably mated with the fixed sleeve; and an elastic check valve built in between the fixed sleeve and the holding sleeve; wherein the...