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Localized biasing for silicon on insulator structures 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/84
출원번호 UP-0930001 (2004-08-30)
등록번호 US-7659152 (2010-04-02)
발명자 / 주소
  • Gonzalez, Fernando
  • Zahurak, John K.
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Schwegman, Lundberg & Woessner, P.A.
인용정보 피인용 횟수 : 33  인용 특허 : 27

초록

A silicon-on-insulator device has a localized biasing structure formed in the insulator layer of the SOI. The localized biasing structure includes a patterned conductor that provides a biasing signal to distinct regions of the silicon layer of the SOI. The conductor is recessed into the insulator la

대표청구항

We claim: 1. A method of forming a silicon-on-insulator structure, comprising: providing a silicon-on-insulator substrate; forming a recess in an insulator layer disposed on the silicon-on-insulator substrate; depositing a conductor in the recess that is electrically isolated from the substrate; an

이 특허에 인용된 특허 (27)

  1. Koh Risho,JPX, Body driven SOI-MOS field effect transistor.
  2. Brent Keeth ; Charles H. Dennison, DRAM fabricated on a silicon-on-insulator (SOI) substrate having bi-level digit lines.
  3. Henley Francois J. ; Cheung Nathan W., Economical silicon-on-silicon hybrid wafer assembly.
  4. Henley Francois J. ; Cheung Nathan W., Gettering technique for silicon-on-insulator wafers.
  5. Harari Eliyahou (2320 Friars La. Los Altos CA 94022), Highly scalable dynamic RAM cell with self-signal amplification.
  6. Lee Sahng Kyoo,KRX ; Park Sang Kyun,KRX, Method for fabricating semiconductor wafers.
  7. Ichikawa Takeshi (Zama JPX) Yonehara Takao (Atsugi JPX) Sakaguchi Kiyofumi (Atsugi JPX), Method for preparing semiconductor member.
  8. Bertagnolli Emmerich,DEX ; Klose Helmut,DEX, Method for the production of a three-dimensional circuit arrangement.
  9. Goesele Ulrich M. ; Tong Q.-Y., Method for the transfer of thin layers of monocrystalline material to a desirable substrate.
  10. Dennard Robert Heath (Croton-on-Hudson NY) Rideout Vincent Leo (Mohegan Lake NY), Method of fabricating field effect transistors having self-registering electrical connections between gate electrodes an.
  11. Reisman Arnold (Raleigh NC) Chu Wei-Kan (Chapel Hill NC), Method of forming a nonsilicon semiconductor on insulator structure.
  12. Chan Tsiu C. (Carrollton TX) Han Yu-Pin (Dallas TX), Method of making a trench capacitor and dram memory cell.
  13. Short Kenneth T. (New Providence NJ) White Alice E. (New Providence NJ), Method of making an article comprising a buried SiO2 layer.
  14. Kadosh Daniel ; Garnder Mark I. ; Cheek Jon D., Multi-level transistor fabrication method with a patterned upper transistor substrate and interconnection thereto.
  15. Kadosh Daniel ; Gardner Mark I. ; Hause Fred N., Multi-level transistor fabrication method with high performance drain-to-gate connection.
  16. Ma William Hsioh-Lien ; Schepis Dominic Joseph, Multistack 3-dimensional high density semiconductor device and method for fabrication.
  17. Baerg William (Palo Alto CA) Ting Chiu H. (Saratoga CA) Siu Byron B. (Sunnyvale CA) Tzeng J. C. (Sunnyvale CA), Process for forming MOS transistor with buried oxide regions for insulation.
  18. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
  19. Jaso Mark A. ; Mandelman Jack A. ; Tonti William R. ; Wordeman Matthew R., SOI/bulk hybrid substrate and method of forming the same.
  20. Kim Jae-Kap,KRX, Semiconductor device having a SOI structure with substrate bias formed through the insulator and in contact with one of.
  21. Yonehara Takao,JPX, Semiconductor member and process for preparing semiconductor member.
  22. Kikuchi Hiroaki (Tokyo JPX), Semiconductor substrate having a silicon-on-insulator structure and method of fabricating the same.
  23. Ohshima Hisayoshi,JPX ; Matsui Masaki,JPX ; Onoda Kunihiro,JPX ; Yamauchi Shoichi,JPX, Semiconductor substrate manufacturing method.
  24. Kobayashi Kenya,JPX ; Hamajima Tomohiro,JPX ; Okonogi Kensuke,JPX, Silicon on insulating substrate.
  25. Srikrishnan Kris V., Smart-cut process for the production of thin semiconductor material films.
  26. Matsushita Takeshi,JPX, Three-dimensional integrated circuit device and its manufacturing method.
  27. Murari Bruno,ITX ; Villa Flavio,ITX ; Mastromatteo Ubaldo,ITX, Wafer of semiconductor material for fabricating integrated devices, and process for its fabrication.

이 특허를 인용한 특허 (33)

  1. Willard, Simon Edward; Ranta, Tero Tapio, AC coupling modules for bias ladders.
  2. Dribinsky, Alexander; Kim, Tae Youn; Kelly, Dylan J.; Brindle, Christopher N., Circuit and method for controlling charge injection in radio frequency switches.
  3. Ranta, Tero Tapio; Bawell, Shawn; Greene, Robert W.; Brindle, Christopher N.; Englekirk, Robert Mark, Devices and methods for improving voltage handling and/or bi-directionality of stacks of elements when connected between terminals.
  4. Ranta, Tero Tapio; Bawell, Shawn; Greene, Robert W.; Brindle, Christopher N.; Englekirk, Robert Mark, Devices and methods for improving voltage handling and/or bi-directionality of stacks of elements when connected between terminals.
  5. Englekirk, Robert Mark, Differential charge pump.
  6. Bawell, Shawn; Broughton, Robert; Bacon, Peter; Greene, Robert W.; Ranta, Tero Tapio, Digitally tuned capacitors with tapered and reconfigurable quality factors.
  7. Nobbe, Dan William; Olson, Chris; Kovac, David, Hot carrier injection compensation.
  8. Burgener, Mark L.; Cable, James S., Integrated RF front end with stacked transistor switch.
  9. Burgener, Mark L.; Cable, James S., Integrated RF front end with stacked transistor switch.
  10. Burgener, Mark L.; Cable, James S., Integrated RF front end with stacked transistor switch.
  11. Burgener, Mark L.; Cable, James S., Integrated RF front end with stacked transistor switch.
  12. Kim, Tae Youn; Englekirk, Robert Mark; Kelly, Dylan J., Level shifter with output spike reduction.
  13. Gonzalez, Fernando; Zahurak, John K., Localized biasing for silicon on insulator structures.
  14. Gonzalez, Fernando; Zahurak, John K., Localized biasing for silicon on insulator structures.
  15. Burgener, Mark L.; Kelly, Dylan J.; Cable, James S., Low noise charge pump method and apparatus.
  16. Burgener, Mark L.; Kelly, Dylan J.; Cable, James S., Low noise charge pump method and apparatus.
  17. Kim, Tae Youn; Englekirk, Robert Mark; Kelly, Dylan J., Low-noise high efficiency bias generation circuits and method.
  18. Kim, Tae Youn; Englekirk, Robert Mark; Kelly, Dylan J., Low-noise high efficiency bias generation circuits and method.
  19. Ranta, Tero Tapio, Method and apparatus for use in digitally tuning a capacitor in an integrated circuit device.
  20. Brindle, Christopher N.; Stuber, Michael A.; Kelly, Dylan J.; Kemerling, Clint L.; Imthurn, George; Welstand, Robert B.; Burgener, Mark L., Method and apparatus for use in improving linearity of MOSFETs using an accumulated charge sink.
  21. Brindle, Christopher N.; Deng, Jie; Genc, Alper; Yang, Chieh-Kai, Method and apparatus for use in improving linearity of MOSFETs using an accumulated charge sink-harmonic wrinkle reduction.
  22. Brindle, Christopher N.; Deng, Jie; Genc, Alper; Yang, Chieh-Kai, Method and apparatus for use in improving linearity of MOSFETs using an accumulated charge sink-harmonic wrinkle reduction.
  23. Stuber, Michael A.; Brindle, Christopher N.; Kelly, Dylan J.; Kemerling, Clint L.; Imthurn, George P.; Burgener, Mark L.; Dribinsky, Alexander; Kim, Tae Youn, Method and apparatus improving gate oxide reliability by controlling accumulated charge.
  24. Stuber, Michael A.; Brindle, Christopher N.; Kelly, Dylan J.; Kemerling, Clint L.; Imthurn, George P.; Welstand, Robert B.; Burgener, Mark L.; Dribinsky, Alexander; Kim, Tae Youn, Method and apparatus improving gate oxide reliability by controlling accumulated charge.
  25. Reedy, Ronald Eugene; Nobbe, Dan William; Ranta, Tero Tapio; Liss, Cheryl V.; Kovac, David, Methods and apparatuses for use in tuning reactance in a circuit device.
  26. Ranta, Tero Tapio, Positive logic digitally tunable capacitor.
  27. Facchini, Marc; Bacon, Peter, Power splitter with programmable output phase shift.
  28. Olson, Chris, Semiconductor devices with switchable ground-body connection.
  29. Burgener, Mark L.; Cable, James S., Switch circuit and method of switching radio frequency signals.
  30. Burgener, Mark L.; Cable, James S., Switch circuit and method of switching radio frequency signals.
  31. Englekirk, Robert Mark, Tuning capacitance to enhance FET stack voltage withstand.
  32. Englekirk, Robert Mark, Tuning capacitance to enhance FET stack voltage withstand.
  33. Englekirk, Robert Mark, Variable frequency charge pump.
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