초록 ▼

In at least one aspect, a second multi-axis vacuum motor assembly is provided. The second multi-axis vacuum motor assembly includes (1) a first rotor; (2) a first stator adapted to commutate so as to rotate the first rotor across a vacuum barrier and control rotation of a first axis of a robot arm w

In at least one aspect, a second multi-axis vacuum motor assembly is provided. The second multi-axis vacuum motor assembly includes (1) a first rotor; (2) a first stator adapted to commutate so as to rotate the first rotor across a vacuum barrier and control rotation of a first axis of a robot arm within a vacuum chamber; (3) a second rotor below the first rotor; (4) a second stator below the first stator and adapted to commutate so as to rotate the second rotor across the vacuum barrier and control rotation of a second axis of the robot arm within the vacuum chamber; (5) a first feedback device adapted to monitor rotation of the first axis of the robot arm; and (6) a second feedback device adapted to monitor rotation of the second axis of the robot arm. Numerous other aspects are provided.

대표청구항 ▼

The invention claimed is: 1. A multi-axis vacuum motor assembly comprising: a first rotor; a first stator adapted to magnetically couple with the first rotor across a vacuum barrier so as to control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first roto

The invention claimed is: 1. A multi-axis vacuum motor assembly comprising: a first rotor; a first stator adapted to magnetically couple with the first rotor across a vacuum barrier so as to control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first rotor; a second stator below the first stator and adapted to magnetically couple with the second rotor across the vacuum barrier so as to control rotation of a second axis of the robot arm within the vacuum chamber; a first feedback device located on an atmospheric side of the vacuum barrier, nested with the first stator and adapted to monitor rotation of the first axis of the robot arm via a first passive magnetic coupling across the vacuum barrier, the first passive magnetic coupling including a first passive rotary magnetic coupling within the vacuum chamber and a second passive rotary magnetic coupling coupled to the first feedback device; and a second feedback device located on the atmospheric side of the vacuum barrier, nested with the second stator and adapted to monitor rotation of the second axis of the robot arm via a second passive magnetic coupling across the vacuum barrier, the second passive magnetic coupling including a third passive rotary magnetic coupling within the vacuum chamber and a fourth passive rotary magnetic coupling coupled to the second feedback device. 2. The multi-axis vacuum motor assembly of claim 1 wherein the first and second stators are located on the atmospheric side of the vacuum barrier. 3. The multi-axis vacuum motor assembly of claim 2 wherein the first and second stators are aligned vertically. 4. The multi-axis vacuum motor assembly of claim 2 wherein the first and second stators are directly attached to the vacuum barrier with substantially no air gap between the first and second stators and the vacuum barrier. 5. The multi-axis vacuum motor assembly of claim 1 wherein commutation of the first stator controls rotation of the first rotor across the vacuum barrier. 6. The multi-axis vacuum motor assembly of claim 1 wherein commutation of the second stator controls rotation of the second rotor across the vacuum barrier. 7. The multi-axis vacuum motor assembly of claim 1 wherein the first stator and the first rotor reside in the same horizontal plane. 8. The multi-axis vacuum motor assembly of claim 1 wherein first stator, second stator, first feedback device and second feedback device are arranged so as not to extend below a bottom of the vacuum chamber. 9. A multi-axis vacuum motor assembly comprising: a first rotor; a first stator adapted to commutate so as to rotate the first rotor across a vacuum barrier and control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first rotor; a second stator below the first stator and adapted to commutate so as to rotate the second rotor across the vacuum barrier and control rotation of a second axis of the robot arm within the vacuum chamber; a first passive rotary magnetic coupling; a second passive rotary magnetic coupling magnetically coupled to the first passive rotary magnetic coupling across the vacuum barrier; a first feedback device nested with the first stator and adapted to monitor rotation of the first axis of the robot arm, the first feedback device coupled to the second passive rotary magnetic coupling; a third passive rotary magnetic coupling; a fourth passive rotary magnetic coupling magnetically coupled to the third passive rotary magnetic coupling across the vacuum barrier; and a second feedback device nested with the second stator and adapted to monitor rotation of the second axis of the robot arm, the second feedback device coupled to the fourth passive rotary magnetic coupling. 10. The multi-axis vacuum motor assembly of claim 9 wherein the first and second stators are located on the atmospheric side of the vacuum barrier. 11. The multi-axis vacuum motor assembly of claim 9 wherein the first and second stators are aligned vertically. 12. The multi-axis vacuum motor assembly of claim 9 wherein the first and second stators are directly attached to the vacuum barrier with substantially no air gap between the first and second stators and the vacuum barrier. 13. The multi-axis vacuum motor assembly of claim 9 wherein the first stator and the first rotor reside in the same horizontal plane. 14. The multi-axis vacuum motor assembly of claim 9 wherein first stator, second stator, first feedback device and second feedback device are arranged so as not to extend below a bottom of the vacuum chamber. 15. A multi-axis vacuum motor assembly comprising: a first rotor; a first stator adapted to magnetically couple with the first rotor across a vacuum barrier so as to control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first rotor; a second stator below the first stator and adapted to magnetically couple with the second rotor across the vacuum barrier so as to control rotation of a second axis of the robot arm within the vacuum chamber; a first feedback device located on an atmospheric side of the vacuum chamber adapted to monitor rotation of the first axis of the robot arm via a first passive magnetic coupling across the vacuum barrier, the first passive magnetic coupling including a first passive rotary magnetic coupling within the vacuum chamber and a second passive rotary magnetic coupling on the atmospheric side coupled to the first feedback device; a second feedback device located on an atmospheric side of the vacuum chamber adapted to monitor rotation of the second axis of the robot arm via a second passive magnetic coupling across the vacuum barrier, the second passive magnetic coupling including a third passive rotary magnetic coupling within the vacuum chamber and a fourth passive rotary magnetic coupling on the atmospheric side coupled to the second feedback device; and wherein the first stator is disposed radially inward relative to the first rotor, the first feedback device is disposed radially inward relative to the first stator, the second stator is disposed radially inward relative to the second rotor, and the second feedback device is disposed radially inward relative to the second stator. 16. A multi-axis vacuum motor assembly comprising: a first rotor; a first stator adapted to magnetically couple with the first rotor across a vacuum barrier so as to control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first rotor; a second stator below the first stator and adapted to magnetically couple with the second rotor across the vacuum barrier so as to control rotation of a second axis of the robot arm within the vacuum chamber; a first feedback device adapted to monitor rotation of the first axis of the robot arm via passive magnetic coupling across the vacuum barrier; and a second feedback device adapted to monitor rotation of the second axis of the robot arm via passive magnetic coupling across the vacuum barrier; wherein the first stator is disposed radially inward relative to the first rotor, the first rotor is attached to a first hub, the first hub is attached to the robot arm, and a first hub minimum width is more than twice a first hub maximum height; and wherein the second stator is disposed radially inward relative to the second rotor, the second rotor is attached to a second hub, the second hub is attached to the robot arm, and a second hub minimum width is more than twice a second hub maximum height. 17. The multi-axis vacuum motor assembly of claim 16 wherein the first hub minimum width substantially equals the second hub minimum width. 18. The multi-axis vacuum motor assembly of claim 16 wherein the first hub maximum height substantially equals the second hub maximum height. 19. The multi-axis vacuum motor assembly of claim 16 wherein the first hub minimum width is greater than the first hub maximum height plus the second hub maximum height. 20. A multi-axis vacuum motor assembly comprising: an outer housing including a vacuum barrier and a cover, the cover being removably attachable to the vacuum barrier to form an airtight seal; a first rotor; a first stator adapted to magnetically couple with the first rotor across a vacuum barrier so as to control rotation of a first axis of a robot arm within a vacuum chamber; a second rotor below the first rotor; a second stator below the first stator and adapted to magnetically couple with the second rotor across the vacuum barrier so as to control rotation of a second axis of the robot arm within the vacuum chamber; a first feedback device adapted to monitor rotation of the first axis of the robot arm via passive magnetic coupling across the vacuum barrier; and a second feedback device adapted to monitor rotation of the second axis of the robot arm via passive magnetic coupling across the vacuum barrier; wherein the first stator, the first feedback device, the second stator, and the second feedback device are disposed within the vacuum barrier; wherein the first rotor and the second rotor are disposed outside the vacuum barrier; and wherein the cover may be removed to gain access to the first stator, the first feedback device, the second stator, and the second feedback device. 21. The multi-axis vacuum motor assembly of claim 20 wherein the cover includes a first sealing member, and wherein the outer housing includes a second sealing member with which the outer housing may form an airtight seal when attached to a vacuum chamber.