초록 ▼

In a reaction chamber (20), a used alkaline permanganate etching solution (12) is accommodated and an alkaline earth hydroxide (14) such as calcium hydroxide is added in the reaction chamber, a liquid inside of the reaction chamber is agitated, the liquid is exhausted from a side portion or a top po

In a reaction chamber (20), a used alkaline permanganate etching solution (12) is accommodated and an alkaline earth hydroxide (14) such as calcium hydroxide is added in the reaction chamber, a liquid inside of the reaction chamber is agitated, the liquid is exhausted from a side portion or a top portion of the reaction chamber through a filter (28), a precipitate (26) adhered to the filter is scraped off, and a precipitate containing a hardly soluble or insoluble matter incapable of passing through the filter and accumulated on a bottom portion of the reaction chamber is exhausted from the reaction chamber.

대표청구항 ▼

What is claimed is: 1. A process for regenerating an alkaline permanganate etching solution, comprising the steps of: contacting a used alkaline permanganate etching solution and an alkaline earth hydroxide together in a reaction chamber; agitating the used alkaline permanganate etching solution an

What is claimed is: 1. A process for regenerating an alkaline permanganate etching solution, comprising the steps of: contacting a used alkaline permanganate etching solution and an alkaline earth hydroxide together in a reaction chamber; agitating the used alkaline permanganate etching solution and the alkaline earth hydroxide in the reaction chamber; exhausting from a side portion or a top portion of the reaction chamber through a filter a liquid including a regenerated alkaline permanganate etching solution; and exhausting from a bottom portion of the reaction chamber a precipitate including a hardly soluble or insoluble matter that is incapable of passing through the filter. 2. The process according to claim 1, wherein the alkaline earth hydroxide is calcium hydroxide or barium hydroxide. 3. The process according to claim 1, wherein the hardly soluble or insoluble matter that is incapable of passing through the filter is partially scraped off by use of a squeegee door. 4. The process according to claim 1, further comprising the steps of: accommodating the liquid exhausted from the reaction chamber into a second reaction chamber; precipitating a hardly soluble or insoluble matter from the liquid in the second reaction chamber; exhausting the liquid in the second reaction chamber through a second filter from a side portion of the second reaction chamber; and exhausting from a bottom portion of the second reaction chamber a precipitate including a hardly soluble or insoluble matter that is incapable of passing through the second filter. 5. The regeneration process of an etching solution according to claim 4, wherein the hardly soluble or insoluble matter that is incapable of passing through the second filter is scraped off by use of a second squeegee door.