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다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | UP-0344565 (2006-01-30) |
등록번호 | US-7699021 (2010-05-20) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 18 인용 특허 : 537 |
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history. In one
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history. In one embodiment, non-orthogonal robot trajectories are used to assure reliable and high speed substrate transfer. In another embodiment, at least one buffering station is used to avoid collision and improve throughput. In another embodiment, optimal positioning of the robots are used to improve throughput.
The invention claimed is: 1. A cluster tool for processing a substrate, comprising: a first module comprising: a first processing rack having vertically stacked processing chambers; a second processing rack having vertically stacked processing chambers, wherein the first and second processing racks
The invention claimed is: 1. A cluster tool for processing a substrate, comprising: a first module comprising: a first processing rack having vertically stacked processing chambers; a second processing rack having vertically stacked processing chambers, wherein the first and second processing racks are positioned substantially parallel to each other; and a first robot disposed between the first and second processing racks; a second module comprising: a third processing rack having vertically stacked processing chambers; a fourth processing rack having vertically stacked processing chambers, wherein the third and fourth processing racks are positioned substantially parallel to each other; and a second robot disposed between the third and fourth processing racks; a third module comprising: a fifth processing rack having vertically stacked processing chambers; a sixth processing rack having vertically stacked processing chambers, wherein the fifth and sixth processing racks are positioned substantially parallel to each other; and a third robot disposed between the fifth and sixth processing racks, wherein the third module and the first module are positioned on opposite sides of the second module; and at least one buffering station, wherein the second module is positioned on one side of the first module such that the first processing rack is next to the third processing rack and the second processing rack is next to the fourth processing rack, and the at least one buffering station is disposed in a location so that the at least one buffering station is accessible by both the first and second robots. 2. The cluster tool of claim 1, wherein the first and second robots are 6-axis articulated robots. 3. The cluster tool of claim 2, wherein at least one of the first and second robot is movable along a track. 4. The cluster tool of claim 1, wherein the at least one buffering station is attached to the first processing rack. 5. The cluster tool of claim 1, wherein at least one of the processing chambers is accessible to at least one of the first and second robots following a non-orthogonal trajectory. 6. The cluster tool of claim 5, wherein the at least one of the processing chambers has an entrance substantially wider than a diameter of the substrate. 7. The cluster tool of claim 1, further comprising a factory enclosure having a plurality of pods, wherein the factor enclosure is positioned near the first module, on an opposite site of the second module, and wherein a gap is between the first module and the factory enclosure. 8. The cluster tool of claim 1, wherein the first robot comprise a single blade assembly and the second robot comprises a dual blade assembly.
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