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RF circuits including transistors having strained material layers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/00
출원번호 UP-0032413 (2005-01-10)
등록번호 US-7709828 (2010-06-03)
발명자 / 주소
  • Braithwaite, Glyn
  • Hammond, Richard
  • Currie, Matthew
출원인 / 주소
  • Taiwan Semiconductor Manufacturing Company, Ltd.
대리인 / 주소
    Slater & Matsil, L.L.P.
인용정보 피인용 횟수 : 126  인용 특허 : 158

초록

Circuits for processing radio frequency (“RF”) and microwave signals are fabricated using field effect transistors (“FETs”) that have one or more strained channel layers disposed on one or more planarized substrate layers. FETs having such a configuration exhibit improved

대표청구항

What is claimed is: 1. A circuit for processing an RF signal comprising at least one FET to which the RF signal is applied, the at least one FET comprising: a semiconductor substrate including at least one planarized layer; a channel region including at least one strained channel layer disposed on

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  15. Hoffmann, Thomas; Ranade, Pushkar; Thompson, Scott E., CMOS gate stack structures and processes.
  16. Hoffmann, Thomas; Ranade, Pushkar; Thompson, Scott E., CMOS gate stack structures and processes.
  17. Hoffmann, Thomas; Thompson, Scott E.; Ranade, Pushkar, CMOS gate stack structures and processes.
  18. Thompson, Scott E.; Hoffmann, Thomas; Scudder, Lance; Sridharan, U. C.; Zhao, Dalong; Ranade, Pushkar; Duane, Michael; Gregory, Paul E., CMOS structures and processes based on selective thinning.
  19. Thompson, Scott E.; Hoffmann, Thomas; Scudder, Lance; Sridharan, Urupattur C.; Zhao, Dalong; Ranade, Pushkar; Duane, Michael; Gregory, Paul, CMOS structures and processes based on selective thinning.
  20. Clark, Lawrence T.; McWilliams, Bruce; Rogenmoser, Robert, Circuit devices and methods having adjustable transistor body bias.
  21. Lee, Sang-Soo; Boling, Edward J.; Kuo, Augustine; Rogenmoser, Robert, Circuits and devices for generating bi-directional body bias voltages, and methods therefor.
  22. Clark, Lawrence T.; Roy, Richard S., Circuits and methods for measuring circuit elements in an integrated circuit device.
  23. Clark, Lawrence T; Roy, Richard S, Circuits and methods for measuring circuit elements in an integrated circuit device.
  24. Hoffmann, Thomas; Shifren, Lucian; Thompson, Scott E.; Ranade, Pushkar; Wang, Jing; Gregory, Paul E.; Sonkusale, Sachin R.; Scudder, Lance; Zhao, Dalong; Bakhishev, Teymur; Liu, Yujie; Wang, Lingquan; Zhang, Weimin; Pradhan, Sameer; Duane, Michael; Kim, Sung Hwan, Deeply depleted MOS transistors having a screening layer and methods thereof.
  25. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  26. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  27. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  28. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  29. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  30. Thompson, Scott E.; Clark, Lawrence T., Digital circuits having improved transistors, and methods therefor.
  31. Clark, Lawrence T.; Shifren, Lucian; Roy, Richard S., Dynamic random access memory (DRAM) with low variation transistor peripheral circuits.
  32. Shifren, Lucian; Ranade, Pushkar, Electronic device with controlled threshold voltage.
  33. Shifren, Lucian; Ranade, Pushkar, Electronic device with controlled threshold voltage.
  34. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using same.
  35. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  36. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  37. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  38. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  39. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  40. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  41. Thompson, Scott E.; Thummalapally, Damodar R., Electronic devices and systems, and methods for making and using the same.
  42. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Gas sensor materials and methods for preparation thereof.
  43. Thompson, Scott E.; Shifren, Lucian; Ranade, Pushkar; Liu, Yujie; Kim, Sung Hwan; Wang, Lingquan; Zhao, Dalong; Bakhishev, Teymur; Hoffmann, Thomas; Pradhan, Sameer; Duane, Michael, High uniformity screen and epitaxial layers for CMOS devices.
  44. Cummins, Timothy, Integrated CMOS porous sensor.
  45. Cummins, Timothy, Integrated CMOS porous sensor.
  46. Cummins, Timothy, Integrated CMOS porous sensor having sensor electrodes formed with the interconnect conductors of a MOS circuit.
  47. Cummins, Timothy, Integrated MOS gas or humidity sensor having a wireless transceiver.
  48. Clark, Lawrence T.; Kidd, David A.; Kuo, Augustine, Integrated circuit device body bias circuits and methods.
  49. Clark, Lawrence T.; Kidd, David A.; Kuo, Augustine, Integrated circuit device body bias circuits and methods.
  50. Clark, Lawrence T.; Kidd, David A.; Kuo, Augustine, Integrated circuit device body bias circuits and methods.
  51. Wang, Jing, Integrated circuit device methods and models with predicted device metric variations.
  52. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Rogenmoser, Robert; Thummalapally, Damodar R., Integrated circuit devices and methods.
  53. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Rogenmoser, Robert; Thummalapally, Damodar R., Integrated circuit devices and methods.
  54. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Rogenmoser, Robert; Thummalapally, Damodar R., Integrated circuit devices and methods.
  55. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Rogenmoser, Robert; Thummalapally, Damodar R., Integrated circuit devices and methods.
  56. Clark, Lawrence T.; Kidd, David A.; Chen, Chao-Wu, Integrated circuit process and bias monitors and related methods.
  57. Clark, Lawrence T.; Kidd, David A.; Chen, Chao-Wu, Integrated circuit process and bias monitors and related methods.
  58. Zhao, Dalong; Ranade, Pushkar; McWilliams, Bruce, Integrated circuits having a plurality of high-K metal gate FETs with various combinations of channel foundation structure and gate stack structure and methods of making same.
  59. Zhao, Dalong; Ranade, Pushkar; McWilliams, Bruce, Integrated circuits having a plurality of high-K metal gate FETs with various combinations of channel foundation structure and gate stack structure and methods of making same.
  60. Cummins, Timothy, Integrated electronic sensor.
  61. Speer, Raymond; Cavanagh, Leon; Smith, Peter, Integrated gas sensor.
  62. Shifren, Lucian; Ranade, Pushkar; Thompson, Scott E.; Sonkusale, Sachin R.; Zhang, Weimin, Low power semiconductor transistor structure and method of fabrication thereof.
  63. Shifren, Lucian; Ranade, Pushkar; Thompson, Scott E.; Sonkusale, Sachin R.; Zhang, Weimin, Low power semiconductor transistor structure and method of fabrication thereof.
  64. Shifren, Lucian; Ranade, Pushkar; Thompson, Scott E.; Sonkusale, Sachrin R.; Zhang, Weimin, Low power semiconductor transistor structure and method of fabrication thereof.
  65. Clark, Lawrence T.; Leshner, Samuel, Memory circuits and methods of making and designing the same.
  66. Cheng, Kangguo; Adam, Thomas N.; Khakifirooz, Ali; Reznicek, Alexander, Method and structure for forming ETSOI capacitors, diodes, resistors and back gate contacts.
  67. Cheng, Kangguo; Doris, Bruce B.; Khakifirooz, Ali; Shahidi, Ghavam, Method and structure for forming on-chip high quality capacitors with ETSOI transistors.
  68. Cheng, Kangguo; Doris, Bruce B.; Khakifirooz, Ali; Shahidi, Ghavam, Method and structure for forming on-chip high quality capacitors with ETSOI transistors.
  69. Bakhishev, Teymur; Pradhan, Sameer; Hoffmann, Thomas; Sonkusale, Sachin R., Method for fabricating a transistor device with a tuned dopant profile.
  70. Bakhishev, Teymur; Pradhan, Sameer; Hoffmann, Thomas; Sonkusale, Sachin R., Method for fabricating a transistor device with a tuned dopant profile.
  71. Bakhishev, Teymur; Pradhan, Sameer; Hoffmann, Thomas; Sonkusale, Sachin R., Method for fabricating a transistor device with a tuned dopant profile.
  72. Thompson, Scott E.; Shifren, Lucian; Ranade, Pushkar; Liu, Yujie; Kim, Sung Hwan; Wang, Lingquan; Zhao, Dalong; Bakhishev, Teymur; Hoffmann, Thomas; Pradhan, Sameer; Duane, Michael, Method for fabricating a transistor with reduced junction leakage current.
  73. Shifren, Lucian; Ranade, Pushkar; Hoffmann, Thomas; Thompson, Scott E., Method for fabricating multiple transistor devices on a substrate with varying threshold voltages.
  74. Shifren, Lucian; Ema, Taiji, Method for reducing punch-through in a transistor device.
  75. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Methods and materials for forming gas sensor structures.
  76. Thompson, Scott E.; Ranade, Pushkar; Scudder, Lance; Stager, Charles, Monitoring and measurement of thin film layers.
  77. Roy, Richard S., Multiple VDD clock buffer.
  78. Hoffmann, Thomas; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E., Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer.
  79. Hoffmann, Thomas; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E., Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer.
  80. Hoffmann, Thomas; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E., Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer.
  81. Kuo, Augustine, Operational amplifier input offset correction with transistor threshold voltage adjustment.
  82. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Leshner, Samuel, Porting a circuit design from a first semiconductor process to a second semiconductor process.
  83. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Leshner, Samuel, Porting a circuit design from a first semiconductor process to a second semiconductor process.
  84. Clark, Lawrence T.; Thompson, Scott E.; Roy, Richard S.; Leshner, Samuel, Porting a circuit design from a first semiconductor process to a second semiconductor process.
  85. Boling, Edward J., Power up body bias circuits and methods.
  86. Thompson, Scott E.; Shifren, Lucian; Ranade, Pushkar; Scudder, Lance; Zhao, Dalong; Bakhisher, Teymur; Pradhan, Sameer, Process for manufacture of integrated circuits with different channel doping transistor architectures and devices therefrom.
  87. Shifren, Lucian; Thompson, Scott E.; Gregory, Paul E., Process for manufacturing an improved analog transistor.
  88. Scudder, Lance S.; Ranade, Pushkar; Stager, Charles; Sridharan, Urupattur C.; Zhao, Dalong, Reducing or eliminating pre-amorphization in transistor manufacture.
  89. Scudder, Lance S.; Ranade, Pushkar; Stager, Charles; Sridharan, Urupattur C.; Zhao, Dalong, Reducing or eliminating pre-amorphization in transistor manufacture.
  90. Scudder, Lance; Ranade, Pushkar; Stager, Charles; Sridharan, Urupattur C.; Zhao, Dalong, Reducing or eliminating pre-amorphization in transistor manufacture.
  91. Scudder, Lance; Ranade, Pushkar; Stager, Charles; Sridharan, Urupattur C.; Zhao, Dalong, Reducing or eliminating pre-amorphization in transistor manufacture.
  92. Roy, Richard S., Ring oscillator with NMOS or PMOS variation insensitivity.
  93. Tien, George; Kidd, David A.; Clark, Lawrence T., SRAM cell layout structure and devices therefrom.
  94. Tien, George; Kidd, David A.; Clark, Lawrence T., SRAM cell layout structure and devices therefrom.
  95. Kidd, David A.; Chen, Chao-Wu; Agrawal, Vineet, SRAM performance monitor.
  96. Hoffmann, Thomas; Thompson, Scott E., Semiconductor devices having fin structures and fabrication methods thereof.
  97. Pradhan, Sameer; Zhao, Dalong; Wang, Lingquan; Ranade, Pushkar; Scudder, Lance, Semiconductor devices with dopant migration suppression and method of fabrication thereof.
  98. Shifren, Lucian; Ranade, Pushkar; Sonkusale, Sachin R., Semiconductor structure and method of fabrication thereof with mixed metal types.
  99. Shifren, Lucian; Ranade, Pushkar; Sonkusale, Sachin R., Semiconductor structure and method of fabrication thereof with mixed metal types.
  100. Gregory, Paul E.; Ranade, Pushkar; Shifren, Lucian, Semiconductor structure with improved channel stack and method for fabrication thereof.
  101. Gregory, Paul E.; Shifren, Lucian; Ranade, Pushkar, Semiconductor structure with improved channel stack and method for fabrication thereof.
  102. Zhao, Dalong; Bakhishev, Teymur; Scudder, Lance; Gregory, Paul E.; Duane, Michael; Sridharan, U. C.; Ranade, Pushkar; Shifren, Lucian; Hoffmann, Thomas, Semiconductor structure with multiple transistors having various threshold voltages.
  103. Zhao, Dalong; Bakhishev, Teymur; Scudder, Lance; Gregory, Paul E.; Duane, Michael; Sridharan, U. C.; Ranade, Pushkar; Shifren, Lucian; Hoffmann, Thomas, Semiconductor structure with multiple transistors having various threshold voltages.
  104. Zhao, Dalong; Bakhishev, Teymur; Scudder, Lance; Gregory, Paul E.; Duane, Michael; Sridharan, U. C.; Ranade, Pushkar; Shifren, Lucian; Hoffmann, Thomas, Semiconductor structure with multiple transistors having various threshold voltages.
  105. Zhao, Dalong; Bakhishev, Teymur; Scudder, Lance; Gregory, Paul E.; Duane, Michael; Sridharan, U. C.; Ranade, Pushkar; Shifren, Lucian; Hoffmann, Thomas, Semiconductor structure with multiple transistors having various threshold voltages.
  106. Wang, Lingquan; Bakhishev, Teymur; Zhao, Dalong; Ranade, Pushkar; Pradhan, Sameer; Hoffmann, Thomas; Shifren, Lucian; Scudder, Lance, Semiconductor structure with reduced junction leakage and method of fabrication thereof.
  107. Wang, Lingquan; Bakhishev, Teymur; Zhao, Dalong; Ranade, Pushkar; Pradhan, Sameer; Hoffmann, Thomas; Shifren, Lucian; Scudder, Lance, Semiconductor structure with reduced junction leakage and method of fabrication thereof.
  108. Scudder, Lance; Ranade, Pushkar; Stager, Charles; Shifren, Lucian; Zhao, Dalong; Sridharan, U.C.; Duane, Michael, Semiconductor structure with substitutional boron and method for fabrication thereof.
  109. Cummins, Timothy, Sensor device having MOS circuits, a gas or humidity sensor and a temperature sensor.
  110. Kidd, David A.; Boling, Edward J.; Agrawal, Vineet; Leshner, Samuel; Kuo, Augustine; Lee, Sang-Soo; Chen, Chao-Wu, Slew based process and bias monitors and related methods.
  111. Kidd, David A.; Boling, Edward J.; Agrawal, Vineet; Leshner, Samuel; Kuo, Augustine; Lee, Sang-Soo; Chen, Chao-Wu, Slew based process and bias monitors and related methods.
  112. Ranade, Pushkar; Shifren, Lucian; Sonkusale, Sachin R., Source/drain extension control for advanced transistors.
  113. Ranade, Pushkar; Shifren, Lucian; Sonkusale, Sachin R., Source/drain extension control for advanced transistors.
  114. Ranade, Pushkar; Shifren, Lucian; Sonkusale, Sachin R., Source/drain extension control for advanced transistors.
  115. Ranade, Pushkar; Shifren, Lucian; Sonkusale, Sachin R., Source/drain extension control for advanced transistors.
  116. Speer, Raymond; Cavanagh, Leon; Smith, Peter; Pavelka, John, Systems and methods for packaging integrated circuit gas sensor systems.
  117. Kidd, David A., Tipless transistors, short-tip transistors, and methods and circuits therefor.
  118. Kidd, David A., Tipless transistors, short-tip transistors, and methods and circuits therefor.
  119. Kidd, David A., Tipless transistors, short-tip transistors, and methods and circuits therefor.
  120. Kidd, David A., Tipless transistors, short-tip transistors, and methods and circuits therefor.
  121. Clark, Lawrence T.; Leshner, Samuel, Tools and methods for yield-aware semiconductor manufacturing process target generation.
  122. Roy, Richard S.; Leshner, Samuel, Transistor array structure.
  123. Thompson, Scott E.; Shifren, Lucian; Ranade, Pushkar; Liu, Yujie; Kim, Sung Hwan; Wang, Lingquan; Zhao, Dalong; Bakhishev, Teymur; Hoffmann, Thomas; Pradhan, Sameer; Duane, Michael, Transistor having reduced junction leakage and methods of forming thereof.
  124. Arghavani, Reza; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E.; de Villeneuve, Catherine, Transistor with threshold voltage set notch and method of fabrication thereof.
  125. Arghavani, Reza; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E.; de Villeneuve, Catherine, Transistor with threshold voltage set notch and method of fabrication thereof.
  126. Arghavani, Reza; Ranade, Pushkar; Shifren, Lucian; Thompson, Scott E.; de Villeneuve, Catherine, Transistor with threshold voltage set notch and method of fabrication thereof.

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