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A light emitting device which is capable of suppressing deterioration by diffusion of impurities such as moisture, oxygen, alkaline metal and alkaline earth metal, and concretely, a flexible light emitting device which has light emitting element formed on a plastic substrate. On the plastic substrat

A light emitting device which is capable of suppressing deterioration by diffusion of impurities such as moisture, oxygen, alkaline metal and alkaline earth metal, and concretely, a flexible light emitting device which has light emitting element formed on a plastic substrate. On the plastic substrate, disposed are two layers and more of barrier films comprising a layer represented by AlNxOy which is capable of blocking intrusion of moisture and oxygen in a light emitting layer and blocking intrusion of impurities such as an alkaline metal and an alkaline earth metal in an active layer of TFT, and further, a stress relaxation film containing resin is disposed between two layers of barrier films.

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What is claimed is: 1. A light emitting device comprising: a substrate; a first insulating film over the substrate; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact wi

What is claimed is: 1. A light emitting device comprising: a substrate; a first insulating film over the substrate; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the layer comprising Al, N and O. 2. A light emitting device according to claim 1, wherein the layer comprising Al, N and O contains nitrogen of 2.5 atm % to 47.5 atm %. 3. A light emitting device according to claim 1, wherein the layer comprising Al, N and O contains a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 4. A light emitting device according to claim 1, wherein the layer comprising Al, N and O contains a phosphorous element or boron element of 0.1 atm % to 5atm %. 5. An electronic apparatus comprising the light emitting device according to claim 1, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 6. A light emitting device according to claims 1, wherein the second insulating film is attached to the layer comprising Al, N and O and the conductive film by an adhesive layer. 7. A light emitting device according to claims 1, wherein the second insulating film comprises a plastic substrate. 8. A light emitting device comprising: a substrate; a first layer comprising Al, N and O on the substrate; a first insulating film over the first layer comprising Al, N and O; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a second layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the second layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the second layer comprising Al, N and O. 9. A light emitting device according to claim 8, wherein the first layer and the second layer comprising Al, N and O contain nitrogen of 2.5 atm % to 47.5 atm %. 10. A light emitting device according to claim 8, wherein the first layer and the second layer comprising Al, N and O contain a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 11. A light emitting device according to claim 8, wherein the first layer and the second layer comprising Al, N and O contain a phosphorous element or boron element of 0.1 atm % to 5 atm %. 12. An electronic apparatus comprising the light emitting device according to claim 8, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 13. A light emitting device according to claims 8, wherein the second insulating film is attached to the layer comprising Al, N and O and the conductive film by an adhesive layer. 14. A light emitting device according to claims 8, wherein the second insulating film comprises a plastic substrate. 15. A light emitting device comprising: a substrate; a first layer comprising Al, N and O on the substrate; a layer comprising organic resin on the first layer comprising Al, N and O; a second layer comprising Al, N and O on the layer comprising organic resin; a first insulating film over the second layer comprising Al, N and O; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a third layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the third layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the third layer comprising Al, N and O. 16. A light emitting device according to claim 15, wherein the first layer, the second layer and the third layer comprising Al, N and O contain nitrogen of 2.5 atm % to 47.5 atm %. 17. A light emitting device according to claim 15, wherein the first layer, the second layer and the third layer comprising Al, N and O contain a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 18. A light emitting device according to claim 15, wherein the first layer, the second layer and the third layer comprising Al, N and O contain a phosphorous element or boron element of 0.1 atm % to 5 atm %. 19. A light emitting device according to claim 15, wherein stress of the layer comprising organic resin is smaller than that of the first layer and the second layer comprising Al, N and O. 20. A light emitting device according to claims 15, wherein the layer comprising organic resin comprises a layer adhering the substrate. 21. An electronic apparatus comprising the light emitting device according to claim 15, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 22. A light emitting device according to claims 15, wherein the second insulating film is attached to the third layer comprising Al, N and O and the conductive film by an adhesive layer. 23. A light emitting device according to claims 15, wherein the second insulating film comprises a plastic substrate. 24. A light emitting device comprising: a plastic substrate; a first insulating film over the plastic substrate; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the layer comprising Al, N and O. 25. A light emitting device according to claim 24, wherein the plastic substrate comprises at least one selected from the group consisting of polyimide, polyethylene sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 26. A light emitting device according to claim 24, wherein the layer comprising Al, N and O contains nitrogen of 2.5 atm % to 47.5 atm %. 27. A light emitting device according to claim 24, wherein the layer comprising Al, N and O contains a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 28. A light emitting device according to claim 24, wherein the layer comprising Al, N and O contains a phosphorous element or boron element of 0.1 atm % to 5 atm %. 29. An electronic apparatus comprising the light emitting device according to claim 24, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 30. A light emitting device according to claims 24, wherein the second insulating film is attached to the layer comprising Al, N and O and the conductive film by an adhesive layer. 31. A light emitting device according to claims 24, wherein the second insulating film comprises a second plastic substrate. 32. A light emitting device comprising: a plastic substrate; a first layer comprising Al, N and O on the plastic substrate; a first insulating film over the first layer comprising Al, N and O; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a second layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the second layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the second layer comprising Al, N and O. 33. A light emitting device according to claim 32, wherein the plastic substrate comprises at least one selected from the group consisting of polyimide, polyethylene sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 34. A light emitting device according to claim 32, wherein the first layer and the second layer comprising Al, N and O contain nitrogen of 2.5 atm % to 47.5 atm %. 35. A light emitting device according to claim 32, wherein the first layer and the second layer comprising Al, N and O contain a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 36. A light emitting device according to claim 32, wherein the first layer and the second layer comprising Al, N and O contain a phosphorous element or boron element of 0.1 atm % to 5 atm %. 37. An electronic apparatus comprising the light emitting device according to claim 32, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 38. A light emitting device according to claims 32, wherein the second insulating film is attached to the second layer comprising Al, N and O and the conductive film by an adhesive layer. 39. A light emitting device according to claims 32, wherein the second insulating film comprises a second plastic substrate. 40. A light emitting device comprising: a plastic substrate; a first layer comprising Al, N and O on the plastic substrate; a layer comprising organic resin on the first layer comprising Al, N and O; a second layer comprising Al, N and O on the layer comprising organic resin; a first insulating film over the second layer comprising Al, N and O; a light emitting element over the first insulating film, the light emitting element having a cathode, an organic compound layer in contact with the cathode, and an anode in contact with the organic compound layer; a third layer comprising Al, N and O over the light emitting element; a conductive film adhering a flexible print circuit in a terminal portion over the first insulating film; and a second insulating film over the third layer comprising Al, N and O and the conductive film, wherein the light emitting element is covered by the third layer comprising Al, N and O. 41. A light emitting device according to claim 40, wherein the plastic substrate comprises at least one selected from the group consisting of polyimide, polyethylene sulfone, polycarbonate, polyethylene terephthalate and polyethylene naphthalate. 42. A light emitting device according to claim 40, wherein the first layer, the second layer and the third layer comprising Al, N and O contain nitrogen of 2.5 atm % to 47.5 atm %. 43. A light emitting device according to claim 40, wherein the first layer, the second layer and the third layer comprising Al, N and O contain a 13 group element or a 15 group element of 0.1 atm % to 5 atm % as impurities. 44. A light emitting device according to claim 40, wherein the first layer, the second layer and the third layer comprising Al, N and O contain a phosphorous element or boron element of 0.1 atm % to 5 atm %. 45. A light emitting device according to claim 40, wherein stress of the layer comprising organic resin is smaller than that of the first layer and the second layer comprising Al, N and O. 46. A light emitting device according to claims 40, wherein the layer comprising organic resin comprises a layer adhering the plastic substrate. 47. An electronic apparatus comprising the light emitting device according to claim 40, wherein the electronic apparatus is selected from the group consisting of a video camera, a digital camera, a goggle type display, a car navigation, a personal computer, and a portable information terminal. 48. A light emitting device according to claims 40, wherein the second insulating film is attached to the third layer comprising Al, N and O and the conductive film by an adhesive layer. 49. A light emitting device according to claims 40, wherein the second insulating film comprises a second plastic substrate.