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Production of silicon through a closed-loop process 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C01B-033/027
  • C01B-033/033
  • C01B-033/03
출원번호 UP-0735234 (2007-04-13)
등록번호 US-7780938 (2010-09-13)
발명자 / 주소
  • Kutsovsky, Yakov E.
  • Davis, Sheldon B.
출원인 / 주소
  • Cabot Corporation
인용정보 피인용 횟수 : 3  인용 특허 : 51

초록

The inventive method of producing silicon comprises reacting gaseous trichlorosilane with hydrogen to deposit silicon onto a substrate and to produce silicon tetrachloride by-product, vaporizing the silicon tetrachloride by-product to form gaseous silicon tetrachloride, converting the gaseous silico

대표청구항

The invention claimed is: 1. A method of producing silicon, comprising: (a) providing gaseous trichlorosilane, (b) reacting the gaseous trichlorosilane with hydrogen in the presence of a substrate at a temperature to cause the deposition of silicon onto the substrate and the production of silicon t

이 특허에 인용된 특허 (51)

  1. Flagan Richard C. (Pasadena CA) Wu Jin J. (Pasadena CA), Aerosol reactor production of uniform submicron powders.
  2. Gould Robert K. (E. Windsor NJ) Dickson Charles R. (Princeton NJ), Apparatus for producing high purity silicon from flames of sodium and silicon tetrachloride.
  3. Mazelsky ; Robert ; Fey ; Maurice G. ; Harvey ; Francis J., Arc heater method for the production of single crystal silicon.
  4. Fey ; Maurice G. ; Harvey ; II ; Francis J. ; McDonald ; Jack, Arc heater production of silicon involving alkali or alkaline-earth metals.
  5. Fey Maurice G. (Plum Borough PA) Harvey ; II Francis J. (Murrysville PA) McDonald Jack (Penn Hills PA), Arc heater production of silicon involving alkali or alkaline-earth metals.
  6. Sellers Charles H. ; Branagan Daniel J. ; Hyde Timothy A., Atomization methods for forming magnet powders.
  7. Witter David E. (Richardson TX) Bawa Mohendra S. (Plano TX), Deposition of silicon at temperatures above its melting point.
  8. Witter, David E.; Bawa, Mohendra S., Deposition of silicon at temperatures above its melting point.
  9. Dietze ; Wolfgang ; Stut ; Hans, Device for deposition of semi-conductor material.
  10. Pratsinis Sotiris E. ; Vemury Srinivas, Electrically assisted synthesis of particles and film with precisely controlled characteristic.
  11. Bourbina Michael (Midland MI) McCormick James R. (Midland MI) Wheelock Scott A. (Bay City MI), Float zone processing of particulate silicon.
  12. van Kesteren, Tom A.; Zinger, Jan, Heat treatment apparatus with temperature control system.
  13. Breneman William C. (East Amherst NY), High purity silane and silicon production.
  14. Jewett ; David N., Manufacture of silicon on the inside of a tube.
  15. Bruinsma Paul J. ; Baskaran Suresh ; Bontha Jagannadha R. ; Liu Jun, Mesoporous-silica films, fibers, and powders by evaporation.
  16. Reagen William Kevin ; Janikowski Stuart Kevin, Method and apparatus for low temperature destruction of halogenated hydrocarbons.
  17. Axelbaum Richard L. (St. Louis MO) DuFaux Douglas P. (St. Louis MO), Method and apparatus for producing high purity and unagglomerated submicron particles.
  18. Dietze Wolfgang (Munich DEX) Fenzl Hans J. (Munich DEX), Method and apparatus for the manufacture of high purity silicon granulate.
  19. Nagai Naoki,JPX ; Harada Isamu,JPX ; Tashiro Chihiro,JPX ; Oda Michiaki,JPX, Method for feeding granular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocr.
  20. Berhan Tecle, Method for isolating ultrafine and fine particles and resulting particles.
  21. Kimura Masanori (Annaka JPX) Yamagishi Hirotoshi (Annaka JPX), Method for producing a silicon single crystal by a float-zone method.
  22. Wakamatsu, Satoru; Oda, Hiroyuki, Method for producing silicon.
  23. Kitagawa, Koji; Sonokawa, Susumu, Method for producing silicon single crystal.
  24. Herman John Eric, Method for recovering particulate silicon from a by-product stream.
  25. Dietze Wolfgang (Munich DT) Reuschel Konrad (Vaterstetten DT) Kasper Andreas (Garching-Hochbruck DT), Method for the manufacture of tubular bodies of semiconductor material.
  26. Dietze Wolfgang (Munich DEX), Method of deposition of silicon in fine crystalline form.
  27. Rucha Ulrich (Neufahrn DEX) Dietze Wolfgang (Munich DEX), Method of deposition of silicon in fine crystalline form.
  28. Zachariah Michael R. ; Hendricks Jay H., Method of forming metallic and ceramic thin film structures using metal halides and alkali metals.
  29. Andreas H. Montree NL; Jurriaan Schmitz NL; Pierre H. Woerlee NL, Method of manufacturing a semiconductor device.
  30. Ito Tatsuo (Joetsu JPX), Method of manufacturing a substrate for manufacturing silicon semiconductor elements.
  31. Wakamatsu, Satoru; Oda, Hiroyuki, Method of manufacturing silicon.
  32. Nagai Naoki,JPX ; Mizuishi Koji,JPX ; Oda Michiaki,JPX, Method of manufacturing silicon monocrystal by continuously charged Czochralski method.
  33. Nagai Naoki,JPX ; Harada Isamu,JPX ; Oda Michiaki,JPX, Method of manufacturing silicon monocrystal using continuous czochralski method.
  34. Hyh Aarno (Helsinki FIX), Method of preparing silicon.
  35. Frosch Robert A. Administrator of the National Aeronautics and Space Administration ; with respect to an invention of ( Irwin PA) Wolf Charles B. (Irwin PA) Meyer Thomas N. (Murrysville PA), Method of producing silicon.
  36. Park Jea-gun,KRX ; Cho Kyoo-chul,KRX ; Lee Gon-sub,KRX, Methods of manufacturing monocrystalline silicon ingots and wafers by controlling pull rate profiles in a hot zone furnance.
  37. Ikeda Yasuhiro (Annaka JPX) Oguro Kyoji (Annaka JPX), Polycrystalline silicon rod for floating zone method and process for making the same.
  38. Calcote Hartwell F. (Princeton NJ) Felder William (Lawrenceville NJ), Process and apparatus for the flame preparation of ceramic powders.
  39. Reuschel ; Konrad ; Dietze ; Wolfgang ; Rucha ; Ulrich, Process for depositing elemental silicon semiconductor material from a gas phase.
  40. Reuschel Konrad (Vaterstetten DEX) Dietze Wolfgang (Munich DEX) Rucha Ulrich (Munich DEX), Process for depositing elemental silicon semiconductor material from a gas phase.
  41. Shih Jenn S. (Paramus NJ), Process for producing particulate silicon encapsulated products.
  42. Woerner, Lloyd M.; Moore, Edward B., Process for producing polycrystalline silicon.
  43. Sanjurjo Angel (San Jose CA) Pressacco Sylvia (Palo Alto CA), Process for purification of solid silicon.
  44. Blocher ; Jr. ; John M. ; Browning ; Melvin F., Process for silicon and trichlorosilane production.
  45. Coleman Larry M. (Tonawanda NY), Process for the production of ultrahigh purity silane with recycle from separation columns.
  46. Padovani ; Francois A. ; Miller ; Michael Brant ; Moore ; James A. ; Fo wler ; James H. ; June ; Malcolm Neville ; Matthews ; James D. ; Morton ; T. R. ; Stotko ; Norbert A. ; Palmer ; Lewis B., Process of refining impure silicon to produce purified electronic grade silicon.
  47. Harvey ; II Francis J. (Murrysville PA) Ciliberti David F. (Murrysville PA) Meyer Thomas N. (Murrysville PA) Fey Maurice G. (Pittsburgh PA), Production of high purity silicon by a heterogeneous arc heater reduction.
  48. Dietze Wolfgang (Munich DT) Kasper Andreas (Garching-Hochbrueck DT) Rucha Ulrich (Munich DT), Shaped bodies and production of semiconductor material.
  49. Dietze Wolfgang (Munich DT) Kasper Andreas (Garching-Hochbrueck DT) Rucha Ulrich (Munich DT), Shaped bodies and production of semiconductor material.
  50. Minami Masaki,JPX ; Ikai Keizo,JPX ; Matsuno Mitsuo,JPX, Silane compound.
  51. Fuerhoff Robert H. (St. Charles MO), System for controlling growth of a silicon crystal.

이 특허를 인용한 특허 (3)

  1. Nichol, Scott, Method for processing silicon powder to obtain silicon crystals.
  2. Nichol, Scott, Method for processing silicon powder to obtain silicon crystals.
  3. Nichol, Scott; Chen, Jian J., Use of acid washing to provide purified silicon crystals.
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