초록 ▼

A scanning optical microscope, including: a light source to generate a beam of probe light; collimation optics to substantially collimate the probe beam; a probe-result beamsplitter; a long working-distance, infinity-corrected objective; scanning means to scan a beam spot of the focused probe beam o

A scanning optical microscope, including: a light source to generate a beam of probe light; collimation optics to substantially collimate the probe beam; a probe-result beamsplitter; a long working-distance, infinity-corrected objective; scanning means to scan a beam spot of the focused probe beam on or within a sample; relay optics; and a detector. The collimation optics are disposed in the probe beam. The probe-result beamsplitter is arranged in the optical paths of the probe beam and the resultant light from the sample. The beamsplitter reflects the probe beam into the objective and transmits resultant light. The long working-distance, infinity-corrected objective is also arranged in the optical paths of the probe beam and the resultant light. It focuses the reflected probe beam onto the sample, and collects and substantially collimates the resultant light. The relay optics are arranged to relay the transmitted resultant light from the beamsplitter to the detector.

대표청구항 ▼

What is claimed is: 1. A scanning optical microscope, comprising: a light source to generate a beam of probe light; collimation optics disposed in an optical path of the beam of probe light to substantially collimate the beam of probe light; a probe-result beamsplitter arranged: in the optical path

What is claimed is: 1. A scanning optical microscope, comprising: a light source to generate a beam of probe light; collimation optics disposed in an optical path of the beam of probe light to substantially collimate the beam of probe light; a probe-result beamsplitter arranged: in the optical path of the beam of probe light to reflect at least a portion of the substantially collimated beam of probe light into a long working-distance, infinity-corrected objective; and in an optical path of resultant light from a sample illuminated by the probe light to transmit at least a portion of the resultant light, the probe-result beamsplitter substantially reflects a reflected portion of the resultant light substantially collimated by the long working-distance, infinity-corrected objective and transmits a transmitted portion of the resultant light substantially collimated by the long working-distance, infinity-corrected objective; the long working-distance, infinity-corrected objective arranged: in the optical path of the beam of probe light to focus the reflected portion of the beam of probe light onto the sample; and in the optical path of resultant light from the sample to collect and substantially collimate the resultant light; scanning means to scan a beam spot of the focused beam of probe light on or within the sample; relay optics arranged in the optical path of resultant light from the sample to relay the transmitted portion of the resultant light from the beamsplitter to a detector including a first detection element and a second detection element, the relay optics include optical elements arranged in the optical path of the transmitted portion of the resultant light such that the transmitted portion of the resultant light is incident on the first detection element and the relay optics include a relay beamsplitter arranged in the optical path of the reflected portion of the resultant light such that at least a portion of the reflected portion of the resultant light is reflected by the relay beamsplitter and is incident on the second detection element; and the detector. 2. A scanning optical microscope according to claim 1, wherein the light source is a laser source. 3. A scanning optical microscope according to claim 2, wherein the probe-result beamsplitter is a dichroic beamsplitter adapted to substantially reflect a band of wavelengths that includes a peak wavelength of the beam of probe light. 4. A scanning optical microscope according to claim 1, wherein the collimation optics include: a pinhole; a first lens to focus the probe light on the pinhole; and a second lens to substantially collimate probe light that passes through the pinhole. 5. A scanning optical microscope according to claim 4, wherein: the scanning optical microscope is a confocal scanning optical microscope; and the relay optics include: another pinhole; a third lens to focus the portion of the resultant light transmitted by the probe-result beamsplitter on the other pinhole; and a fourth lens to focus the resultant light that passes through the other pinhole on the detector. 6. A scanning optical microscope according to claim 1, wherein the scanning means includes an X-Y translation stage coupled to the sample. 7. A scanning optical microscope according to claim 6, wherein the scanning means further includes a Z translation stage coupled to the sample. 8. A scanning optical microscope according to claim 6, wherein the scanning means further includes a Z translation stage coupled to the long working-distance, infinity-corrected objective. 9. A scanning optical microscope according to claim 1, wherein the relay optics include at least one of a lens, a filter, a reflector, a diffractive optical element, a beamsplitter, an optical fiber, or a planar waveguide. 10. A scanning optical microscope according to claim 1, wherein: the detector includes a first detection element and a second detection element; and the relay optics include a relay beamsplitter arranged in the optical path of the resultant light such that: a first sub-portion of the resultant light transmitted by the probe-result beamsplitter is transmitted by the relay beamsplitter and is incident on the first detection element; and a second sub-portion of the resultant light transmitted by the probe-result beamsplitter is reflected by the relay beamsplitter and is incident on the second detection element. 11. A scanning optical microscope according to claim 1, wherein the detector includes at least one of: a photodetector; a spectrometer; a bolometer; or a focal plane array. 12. A scanning optical microscope according to claim 1, further comprising an environmental chamber surrounding the sample, the environmental chamber including a window which is substantially transmissive to: the focused beam of probe light; and the resultant light to be collected by the long working-distance, infinity-corrected objective. 13. A scanning optical microscope according to claim 12, wherein the environmental chamber further surrounds at least one of: an X-Y translation stage of the scanning means, the X-Y translation stage being coupled to the sample; or a Z translation stage of the scanning means, the Z translation stage being coupled to the sample. 14. A scanning optical microscope according to claim 13, wherein the environmental chamber is coupled to at least one of: an X-Y translation stage of the scanning means; or a Z translation stage of the scanning means. 15. A scanning optical microscope according to claim 12, wherein the environmental chamber is at least one of: a high temperature environmental chamber; a cryogenic environmental chamber; a barometric chamber; a fluidic chamber; a gas discharge chamber; a blast chamber; or an electrochemistry chamber. 16. A scanning optical microscope, comprising: a light source to generate a beam of probe light; collimation optics disposed in an optical path of the beam of probe light to substantially collimate the beam of probe light; a probe-result beamsplitter arranged: in the optical path of the beam of probe light to transmit at least a portion of the substantially collimated beam of probe light into a long working-distance, infinity-corrected objective; and in an optical path of resultant light from a sample illuminated by the probe light to reflect at least a portion of the resultant light; the long working-distance, infinity-corrected objective arranged: in the optical path of the beam of probe light to focus the transmitted portion of the beam of probe light onto the sample; and in the optical path of resultant light from the sample to collect and substantially collimate the resultant light; scanning means to scan a beam spot of the focused beam of probe light on or within the sample; relay optics arranged in the optical path of resultant light from the sample to relay the reflected portion of the resultant light from the beamsplitter to a detector including a first detection element and a second detection element, the relay optics include a relay beamsplitter arranged in the optical path of the resultant light such that a first sub-portion of the resultant light reflected by the probe-result beamsplitter is transmitted by the relay beamsplitter and is incident on the first detection element and a second sub-portion of the resultant light reflected by the probe-result beamsplitter is reflected by the relay beamsplitter and is incident on the second detection element; and the detector. 17. A scanning optical microscope according to claim 16, wherein the light source is a laser source. 18. A scanning optical microscope according to claim 17, wherein the probe-result beamsplitter is a dichroic beamsplitter adapted to substantially reflect a band of wavelengths that includes a peak wavelength of the beam of probe light. 19. A scanning optical microscope according to claim 16, wherein the collimation optics include: a pinhole; a first lens to focus the probe light on the pinhole; and a second lens to substantially collimate probe light that passes through the pinhole. 20. A scanning optical microscope according to claim 19, wherein: the scanning optical microscope is a confocal scanning optical microscope; and the relay optics include: another pinhole; a third lens to focus the portion of the resultant light reflected by the probe-result beamsplitter on the other pinhole; and a fourth lens to focus the resultant light that passes through the other pinhole on the detector. 21. A scanning optical microscope according to claim 16, wherein the scanning means includes an X-Y translation stage coupled to the sample. 22. A scanning optical microscope according to claim 21, wherein the scanning means further includes a Z translation stage coupled to the sample. 23. A scanning optical microscope according to claim 21, wherein the scanning means further includes a Z translation stage coupled to the long working-distance, infinity-corrected objective. 24. A scanning optical microscope according to claim 16, wherein the relay optics include at least one of a free-space optical element, an optical fiber, or a planar waveguide. 25. A scanning optical microscope according to claim 16, wherein the detector includes at least one of: a photodetector; a spectrometer; a bolometer; or a focal plane array. 26. A scanning optical microscope according to claim 16, further comprising an environmental chamber surrounding the sample, the environmental chamber including a window which is substantially transmissive to: the focused beam of probe light; and the resultant light to be collected by the long working-distance, infinity-corrected objective. 27. A scanning optical microscope according to claim 26, wherein the environmental chamber further surrounds at least one of: an X-Y translation stage of the scanning means, the X-Y translation stage being coupled to the sample; or a Z translation stage of the scanning means, the Z translation stage being coupled to the sample. 28. A scanning optical microscope according to claim 26, wherein the environmental chamber is coupled to at least one of: an X-Y translation stage of the scanning means; or a Z translation stage of the scanning means. 29. A scanning optical microscope according to claim 26, wherein the environmental chamber is at least one of: a high temperature environmental chamber; a cryogenic environmental chamber; a barometric chamber; a fluidic chamber; a gas discharge chamber; a blast chamber; or an electrochemistry chamber.