대표
청구항
▼
What is claimed is: 1. A fluid control device for controlling the flow of a fluid, the fluid control device comprising: a valve comprising: a port plate comprising ports through which fluid may flow, the ports being associated so as to have alpha pairs of the ports and beta pairs of the ports; a manifold plate adapted to receive and distribute actuation gas, the manifold plate comprising: opposing first and second end surfaces; alpha and beta passages for receiving actuation gas; and an annular first groove formed in the first end surface and an annular...
What is claimed is: 1. A fluid control device for controlling the flow of a fluid, the fluid control device comprising: a valve comprising: a port plate comprising ports through which fluid may flow, the ports being associated so as to have alpha pairs of the ports and beta pairs of the ports; a manifold plate adapted to receive and distribute actuation gas, the manifold plate comprising: opposing first and second end surfaces; alpha and beta passages for receiving actuation gas; and an annular first groove formed in the first end surface and an annular second groove formed in the second end surface, the first groove being connected to the alpha passage and the second groove being connected to the beta passage; and wherein the first end surface has a plurality of alpha and beta depressions formed therein, the alpha and beta depressions being arranged in a circular configuration and in an alternating manner, with the alpha depressions being separated from each other by the beta depressions and the beta depressions being separated from each other by the alpha depressions, the alpha depressions being connected to the alpha passage and being associated with the alpha pairs of the ports, and the beta depressions being connected to the beta passage and being associated with the beta pairs of the ports; and a diaphragm disposed between the port plate and the manifold plate, the diaphragm being deflectable in response to the distribution of actuation gas by the manifold plate to move the valve between alpha and beta operating states, wherein in the alpha operating state, the ports in each of the alpha pairs are connected and the ports in each of the beta pairs are disconnected, and in the beta operating state, the ports in each of the beta pairs are connected and the ports in each of the alpha pairs are disconnected; wherein when the alpha passage does not receive the actuation gas, the fluid deflects the diaphragm into the alpha depressions, thereby connecting the ports in each of the alpha pairs, and when the alpha passage receives the actuation gas, the fluid does not deflect the diaphragm into the alpha depressions, thereby disconnecting the ports in each of the alpha pairs; and wherein when the beta passage does not receive the actuation gas, the fluid deflects the diaphragm into the beta depressions, thereby connecting the ports in each of the beta pairs, and when the beta passage receives the actuation gas, the fluid does not deflect the diaphragm into the beta depressions, thereby disconnecting the ports in each of the beta pairs. 2. The fluid control device of claim 1, wherein the port plate is disc-shaped and has a peripheral surface disposed between opposing first and second end surfaces, and wherein the ports do not extend through the peripheral surface. 3. The fluid control device of claim 2, wherein the manifold plate is disc-shaped and has a peripheral surface disposed between opposing first and second end surfaces, and wherein the peripheral surface does not have any opening through which the actuation gas may flow. 4. The fluid control device of claim 1, wherein the manifold plate further comprises first bores and second bores, the first bores connecting the first groove to the alpha depressions and the second bores connecting the second groove to the beta depressions. 5. The fluid control device of claim 4, wherein the first and second grooves are disposed radially inward from the alpha and beta depressions. 6. The fluid control device of claim 1, further comprising: a second valve comprising: a second port plate comprising ports through which fluid may flow, the ports being associated so as to have alpha pairs of the ports and beta pairs of the ports; the manifold plate, which is disposed between the port plate and the second port plate; and a second diaphragm disposed between the port plate and manifold plate, the second diaphragm being deflectable in response to the distribution of actuation gas by the manifold plate to move the second valve between alpha and beta operating states, wherein in the alpha operating state, the ports in each of the alpha pairs are connected and the ports in each of the beta pairs are disconnected, and in the beta operating state, the ports in each of the beta pairs are connected and the ports in each of the alpha pairs are disconnected. 7. The fluid control device of claim 6, wherein the second end surface has a plurality of alpha and beta depressions formed therein, the alpha depressions of the second end surface being connected to the alpha passage and being associated with the alpha pairs of the ports of the second port plate, and the beta depressions of the second end surface being connected to the beta passage and being associated with the beta pairs of the ports of the second port plate. 8. The fluid control device of claim 7, wherein when the alpha passage does not receive the actuation gas, the fluid deflects the second diaphragm into the alpha depressions of the second end surface, thereby connecting the ports in each of the alpha pairs of the second valve, and when the alpha passage receives the actuation gas, the fluid does not deflect the second diaphragm into the alpha depressions of the second end surface, thereby disconnecting the ports in each of the alpha pairs of the second valve; and wherein when the beta passage does not receive the actuation gas, the fluid deflects the second diaphragm into the beta depressions of the second end surface, thereby connecting the ports in each of the beta pairs of the second valve, and when the beta passage receives the actuation gas, the fluid does not deflect the second diaphragm into the beta depressions of the second end surface, thereby disconnecting the ports in each of the beta pairs of the second valve. 9. The fluid control device of claim 1, wherein the alpha depressions are connected to the alpha passage by the first groove and first bores, and wherein the beta depressions are connected to the beta passage by the second groove and second bores. 10. A fluid control device for controlling the flow of a fluid, the fluid control device comprising: first and second valves each having alpha and beta operating states and a plurality of ports, wherein in each of the first and second valves, the ports are associated to have alpha pairs of the ports and beta pairs of the ports, wherein in the alpha operating state of each of the first and second valves, the ports in each of the alpha pairs are connected and the ports in each of the beta pairs are disconnected, and in the beta operating state of each of the first and second valves, the ports in each of the beta pairs are connected and the ports in each of the alpha pairs are disconnected, the first and second valves collectively comprising: a first plate comprising the ports of the first valve; a second plate comprising the ports of the second valve; a manifold plate disposed between the first and second plates, the manifold plate being adapted to receive and distribute actuation gas; a first diaphragm disposed between the first plate and the manifold plate, the first diaphragm being deflectable in response to the distribution of actuation gas by the manifold plate to move the first valve between the alpha and beta operating states; and a second diaphragm disposed between the second plate and the manifold plate, the second diaphragm being deflectable in response to the distribution of actuation gas by the manifold to move the second valve between the alpha and beta operating states. 11. The fluid control device of claim 10, wherein the first and second valves move between the alpha and beta operating states together. 12. The fluid control device of claim 10, wherein the manifold plate comprises opposing first and second end surfaces and alpha and beta passages for receiving actuation gas, the first and second end surfaces each have a plurality of alpha and beta depressions formed therein, the alpha depressions being connected to the alpha passage and the beta depressions being connected to the beta passage; wherein the alpha depressions of the of the first end surface are associated with the alpha pairs of the ports of the first valve and the alpha depressions of the second end surface being associated with the alpha pairs of the ports of the second valve; and wherein the beta depressions of the of the first end surface are associated with the beta pairs of the ports of the first valve and the beta depressions of the second end surface being associated with the beta pairs of the ports of the second valve. 13. The fluid control device of claim 12, wherein the manifold plate further comprises: an annular first groove formed in the first end surface and connected to the alpha passage; an annular second groove formed in the second end surface and connected to the beta passage; first bores connecting the first groove to the alpha depressions in the first and second end surfaces; and second bores connecting the second groove to the beta depressions in the first and second end surfaces. 14. The fluid control device of claim 13, further comprising: a pilot valve connected to the manifold plate and operable to control the flow of actuation gas to the manifold plate, the pilot valve only providing actuation gas to one of the alpha and beta passages at a time. 15. A gas chromatograph for analyzing fluid, the gas chromatograph comprising: (a.) a separation device operable to separate components of the fluid; and (b.) a valve connected to the separation device and operable to control the provision of the fluid to the separation device, the valve comprising: a disc-shaped port plate having a peripheral surface disposed between opposing first and second end surfaces, the port plate comprising ports through which the fluid may flow, the ports not extending through the peripheral surface and being associated so as to have alpha pairs of the ports and beta pairs of the ports; a manifold plate adapted to receive and distribute actuation gas, the manifold plate being disc-shaped and having a peripheral surface disposed between opposing first and second end surfaces, the peripheral surface not having any opening through which the actuation gas may flow; and a diaphragm disposed between the port plate and the manifold plate, the diaphragm being deflectable in response to the distribution of actuation gas by the manifold plate to move the valve between alpha and beta operating states, wherein in the alpha operating state, the ports in each of the alpha pairs are connected and the ports in each of the beta pairs are disconnected, and in the beta operating state, the ports in each of the beta pairs are connected and the ports in each of the alpha pairs are disconnected; (c.) a detector plate secured to the manifold plate and the port plate; and (d.) a detector for detecting the components of the fluid, the detector being at least partially disposed in the detector plate; and wherein the separation device is a column wound around the port plate and the manifold plate. 16. The gas chromatograph of claim 15, further comprising: a circuit board mounted to the detector plate; and wherein the detector is mounted to the circuit board and extends into an opening in the detector plate. 17. The gas chromatograph of claim 15, further comprising a sample loop connected to the valve and the column; and wherein the beta operating state of the valve is a backflush mode in which the valve directs the fluid into the sample loop and the actuation gas into the column; and wherein the alpha operating state of the valve is an inject mode in which the valve directs the carrier gas into the sample loop, thereby forcing the fluid out of the sample loop and into the column. 18. The gas chromatograph of claim 15, wherein the manifold plate comprises alpha and beta passages for receiving actuation gas, the first end surface having a plurality of alpha and beta depressions formed therein, the alpha depressions being connected to the alpha passage and being associated with the alpha pairs of the ports, and the beta depressions being connected to the beta passage and being associated with the beta pairs of the ports. 19. The gas chromatograph of claim 18, wherein when the alpha passage does not receive the actuation gas, the fluid deflects the diaphragm into the alpha depressions, thereby connecting the ports in each of the alpha pairs, and when the alpha passage receives the actuation gas, the fluid does not deflect the diaphragm into the alpha depressions, thereby disconnecting the ports in each of the alpha pairs; and wherein when the beta passage does not receive the actuation gas, the fluid deflects the diaphragm into the beta depressions, thereby connecting the ports in each of the beta pairs, and when the beta passage receives the actuation gas, the fluid does not deflect the diaphragm into the beta depressions, thereby disconnecting the ports in each of the beta pairs.