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A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucki

A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.

대표청구항 ▼

What is claimed is: 1. A spin head, comprising:a rotatable support plate;first chucking pins and second chucking pins installed on a top surface of the rotatable support plate to support an edge portion of a substrate and prevent the substrate loaded on the rotatable support plate from separating fr

What is claimed is: 1. A spin head, comprising:a rotatable support plate;first chucking pins and second chucking pins installed on a top surface of the rotatable support plate to support an edge portion of a substrate and prevent the substrate loaded on the rotatable support plate from separating from the rotatable support plate when the rotatable support plate rotates; anda driving unit for selectively moving the first and second chucking pins in an outside radial direction of the rotatable support plate via a magnetic force such that the first and second chucking pins are not in contact with the edge portion of the substrate during a process, the driving unit includes:first follower parts each including a first magnet which is connected to the first chucking pins and travels with the first chucking pin in a radial inside direction of the support plate by the magnetic force;second follower parts each including a second magnet which is connected to the second chucking pins and traveling with the second chucking pin in a radial inside direction of the support plate by the magnetic force;a driving magnet disposed inside the first and second follower parts; andan elevating member for selectively applying a magnetic force to the first magnet disposed at a first height and the second magnet disposed at a second height to elevate the driving magnet.