초록 ▼

A substrate carrying tray capable of horizontally placing a substrate thereon and enabling a plurality of trays to be stacked on each other, comprising an upper contact part coming into contact with one tray disposed on the upper side of the tray when the plurality of the substrates are stacked on e

A substrate carrying tray capable of horizontally placing a substrate thereon and enabling a plurality of trays to be stacked on each other, comprising an upper contact part coming into contact with one tray disposed on the upper side of the tray when the plurality of the substrates are stacked on each other and a lower contact part coming into contact with the other tray disposed on the lower side. The shapes of the upper contact part and the lower contact part are formed such that, when one tray is placed on the upper side of the tray, the one tray can be moved in the direction that the gravity center of the one tray is disposed just above the gravity center of the tray.

대표청구항 ▼

The invention claimed is: 1. A stackable substrate carrying tray for placing a substrate horizontally thereon, being stackable by making an upper contact section of the substrate carrying tray contact a lower surface of an upper tray and by making a lower contact section of the substrate carrying tr

The invention claimed is: 1. A stackable substrate carrying tray for placing a substrate horizontally thereon, being stackable by making an upper contact section of the substrate carrying tray contact a lower surface of an upper tray and by making a lower contact section of the substrate carrying tray contact an upper surface of a lower tray, comprising:a loading bed for loading the substrate; anda frame provided to surround an outer edge of the loading bed,wherein the frame includes a frame body, an upper side fixing section and a lower side fixing section, the upper side fixing section and the lower side fixing section inwardly protruding from an inner edge surface of the frame body so as to sandwich an outer edge of the loading bed,wherein the frame includes the upper contact section having an upper inclined section and the lower contact section having a lower inclined section,wherein:the loading bed includes a frame section whose inner perimeter is larger than an outer perimeter of the substrate, andthere is a gap between the upper side fixing section and the frame section.