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[미국특허] High aspect ratio performance coatings for biological microfluidics 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
출원번호 US-0048513 (2005-01-31)
등록번호 US7879396 (2011-01-18)
발명자 / 주소
  • Kobrin, Boris
  • Chinn, Jeffrey D.
  • Nowak, Romuald
  • Yi, Richard C.
출원인 / 주소
  • Applied Microstructures, Inc.
대리인 / 주소
    Martine Penilla & Gencarella, LLP
인용정보 피인용 횟수 : 2  인용 특허 : 36

초록

We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of biotechnologically functional devices, Bio-MEMS devices, and in the fabrication of microfluidic device

대표청구항

We claim: 1. A method of improving the ability of a fluid being charged to a conduit to be drawn into and to flow easily within said conduit, wherein an interior surface of said conduit is vapor deposition coated with a material having a hydrophilicity or hydrophobicity which is related to the surfa

이 특허에 인용된 특허 (36) 인용/피인용 타임라인 분석

  1. Sneh, Ofer; Seidel, Thomas E.; Galewski, Carl, Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition.
  2. Bittner Hans J. (Ingelheim DEX) Klein Hans-Jrgen (Bad Gandersheim DEX) Kpper Thomas (Bad Gandersheim DEX) Mrsen Ewald (Mrfelden DEX), Apparatus for supplying CVD coating devices.
  3. Goodman Ronald D. (Toledo OH) Tausch Peter J. (Perrysburg OH), Coated glass articles.
  4. Winarta Handani ; Cai Xiaohua ; Seto Fung ; Young Chung Chang, Disposable sub-microliter volume sensor and method of making.
  5. Goodwin George B. (Mars PA), Durable water repellant glass surface.
  6. Ogawa Kazufumi (Hirakata JPX) Soga Mamoru (Osaka JPX), Fluorocarbon-based coating film and method of manufacturing the same.
  7. Barsotti,Robert J.; Winter,Derek John, Gas barrier coating system for polymeric films and rigid containers.
  8. Jalisi Marc Mehrzad ; Biagtan Emmanuel C., Guidewires having a vapor deposited primer coat.
  9. Murphy, Nestor P.; Petrmichl, Rudolph H., Highly durable hydrophobic coatings and methods.
  10. Hornbeck Larry J. (Van Alstyne TX), Low surface energy passivation layer for micromechanical devices.
  11. Wei, Ronghua; Rincon, Christopher; Arps, James, Method for depositing coatings on the interior surfaces of tubular walls.
  12. Aves ; Jr. William L. (1703 Hilltop La. Arlington TX 76013) Aves Gary A. (2600 Partridge La. Arlington TX 76017), Method for treating continuous extended lengths of tubular member interiors.
  13. Landau Manfred (Southport GB2), Method of coating glass and glass coated thereby.
  14. Croitoru Natan (Kfar Saba ILX) Deutscher Guy (Herzliya Pituach ILX) Gruenbaum Enrique (Kfar Saba ILX), Method of depositing coatings on the inner surface of a tube by chemical vapor deposition.
  15. Ishikawa Yoshimitsu (Nagasaki JPX), Method of forming oxide film.
  16. Lim Mahn-Jick (Lower Makefield Township ; Bucks County PA), Method of forming silicon dioxide.
  17. Walther Marten,DEX ; Heming Martin,DEX ; Spallek Michael,DEX ; Zschaschler Gudrun,DEX, Method of making a vessel having a wall surface having a barrier coating.
  18. Ogawa Kazufumi (Hirakata JPX) Mino Norihisa (Settu JPX) Soga Mamoru (Osaka JPX) Higashino Hidetaka (Soraku JPX), Method of manufacturing a chemically adsorbed film.
  19. Hornbeck Larry J. (Van Alstyne TX), Method of producing micromechanical devices.
  20. Leung, Toi Yue Becky; Chinn, Jeffrey D., Methods of forming microstructure devices.
  21. Wagner, Peter; Ault-Riche, Dana; Nock, Steffen; Itin, Christian, Microdevices for screening biomolecules.
  22. Jedrzejewski, Paul; Nock, Steffen; Wagner, Peter; Indermuhle, Pierre; Zaugg, Frank G., Microfluidic devices and methods.
  23. Richard, David A., Multilayered hydrophobic coating and method of manufacturing the same.
  24. Michio Arai JP; Hiroshi Yamamoto JP, Organic electroluminescent device.
  25. Flynn Paul L. (5139 Fox Park Dr. Fairview PA 16415) Giammarise Anthony W. (527 Lincoln Ave. Erie PA 16505), Process for depositing hard coating in a nozzle orifice.
  26. Kazutaka Kamitani JP; Toyoyuki Teranishi JP; Kazuhiro Doushita JP; Takashi Sunada JP; Hiroaki Kobayashi JP; Hiroaki Yamamoto JP; Hisashi Ogawa JP, Process for the production of articles covered with silica-base coats.
  27. Amazawa Takao (Atsugi JPX) Nakamura Hiroaki (Fujisawa JPX), Process of forming a film by low pressure chemical vapor deposition.
  28. Hatano Tatsuo,JPX, Process-gas supply apparatus.
  29. Mardian, Allen P.; Sandhu, Gurtej S., Reactive gaseous deposition precursor feed apparatus.
  30. Hinkle Luke D. ; Lischer D. Jeffrey, System for delivering a substantially constant vapor flow to a chemical process reactor.
  31. Yano Kousaku (Osaka JPX) Endo Masayuki (Osaka JPX) Terai Yuka (Osaka JPX) Nomura Noboru (Kyoto JPX) Murakami Tomoyasu (Osaka JPX) Ueda Tetsuya (Osaka JPX) Ueda Satoshi (Osaka JPX), Thin layer forming method wherein hydrophobic molecular layers preventing a BPSG layer from absorbing moisture.
  32. Ogawa, Kazufumi; Mino, Norihisa; Soga, Mamoru, Transparent substrate and method of manufacturing the same.
  33. David Le Bellac FR; Claude Bernard FR, Transparent substrate provided with hydrophobic/oleophobic coating formed by plasma CVD.
  34. Okuda, Kazuyuki; Yagi, Yasushi; Kagaya, Toru; Sakai, Masanori, Vertical type semiconductor device producing apparatus.
  35. Gadgil Prasad N. ; Seidel Thomas E., Vertically-stacked process reactor and cluster tool system for atomic layer deposition.
  36. Banholzer William F. (Columbus OH) Anthony Thomas R. (Schenectady NY) Gilmore Robert S. (Burnt Hills NY) Siemers Paul A. (Clifton Park NY) McCloskey John C. (No. Attleboro MA), Water jet mixing tubes used in water jet cutting devices and method of preparation thereof.

이 특허를 인용한 특허 (2) 인용/피인용 타임라인 분석

  1. Kobrin, Boris; Nowak, Romuald; Yi, Richard C.; Chinn, Jeffrey D., Apparatus and method for controlled application of reactive vapors to produce thin films and coatings.
  2. Legein, Filip; Vanlandeghem, Anthony; Martens, Peter, Coated electronic devices and associated methods.

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