초록 ▼

A burner for a vapor deposition process has a cylindrical central gas passage and a plurality of external gas passages surrounding the central gas passage. The burner has a back block defining an initial section of the gas passages, a face block defining a final section of the gas passages and a man

A burner for a vapor deposition process has a cylindrical central gas passage and a plurality of external gas passages surrounding the central gas passage. The burner has a back block defining an initial section of the gas passages, a face block defining a final section of the gas passages and a manifold plate positioned between the back block and the face block and defining an intermediate section of the external gas passages; the face block, the manifold plate and the back block have inner integral walls that define respective sections of the central gas passage.

대표청구항 ▼

What is claimed is: 1. A burner for a vapour deposition process, the burner having a longitudinal axis and comprising:a gas-receiving block and a gas-ejecting block releasably coupled to each other;said gas-receiving block being longitudinally independent from the gas-ejecting block;the gas-receivin

What is claimed is: 1. A burner for a vapour deposition process, the burner having a longitudinal axis and comprising:a gas-receiving block and a gas-ejecting block releasably coupled to each other;said gas-receiving block being longitudinally independent from the gas-ejecting block;the gas-receiving block and the gas-ejecting block each having a wall defining respective sections of a central gas passage extending substantially coaxially along the longitudinal axis and a plurality of external gas passages surrounding the central gas passage;the wall of the central gas passage defined in the gas-receiving block defining a first, a second, and a third section of said central gas passage,wherein the first, second, and third sections of said central gas passage defined in the gas-receiving block extend substantially coaxially along the longitudinal axis.