[특허]Optical interference display panel and manufacturing method thereof

[미국특허] Optical interference display panel and manufacturing method thereof 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G02B-026/00
출원번호	US-0463312 (2009-05-08)
등록번호	US8004736 (2011-08-08)
우선권정보	TW-2003-2122676 A(2003-08-18)
발명자 / 주소	Lin, Wen-Jian Arbuckle, Brian Gally, Brian Floyd, Philip Palmateer, Lauren
출원인 / 주소	Qualcomm MEMS Technologies, Inc.
대리인 / 주소	Knobbe Martens Olson & Bear LLP
인용정보	피인용 횟수 : 0 인용 특허 : 84

초록 ▼

A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

대표청구항 ▼

What is claimed is: 1. An optical interference display panel, comprising:a substrate;a protection structure;a micro electro mechanical structure comprising a sacrificial layer disposed between a first electrode and a second electrode of the micro electro mechanical structure; andan adhesive, adhering the protection structure to the substrate to form at least one cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has an opening for input of an etching reagent used to remove the sacrificial layer and form an optical interference reflection structure.

이 특허에 인용된 특허 (84) 인용/피인용 타임라인 분석

Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
상세보기
Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
상세보기
Hornbeck Larry J. (Van Alstyne TX), Architecture and process for integrating DMD with control circuit substrates.
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Kimura Koichi,JPX ; Sawano Mitsuru,JPX, Array-type exposing device and flat type display incorporating light modulator and driving method thereof.
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Peterson, Kenneth A.; Watson, Robert D., Bi-level microelectronic device package with an integral window.
상세보기
Kenneth A. Peterson ; Robert D. Watson, Bi-level multilayered microelectronic device package with an integral window.
상세보기
Shichman Daniel (Trumbull CT) Brown David L. (Wallingford CT) Malinowski Stanley J. (Guilford CT), Clear package for bioabsorbable articles.
상세보기
Kuwagaki Hiroshi (Joyo JPX) Kato Hiroaki (Tenri JPX) Takechi Sadatoshi (Nara JPX) Nakauchi Hiroshi (Tenri JPX) Inami Yasuhiko (Tenri JPX), Electrochromic display with one porous separator.
상세보기
Yamada, Tsutomu; Komiya, Naoaki, Electroluminescence display device having a desiccant.
상세보기
Yoneda,Kiyoshi, Electroluminescent display device.
상세보기
Hauser, Christian; Winderl, Johann; Reiss, Martin, Electronic devices and a sheet strip for packaging bonding wire connections of electronic devices and method for producing them.
상세보기
Robert L. Wood ; Bruce W. Dudley, Encapsulated microelectromechanical (MEMS) devices.
상세보기
Mark Allan Ginter ; Earl James Lowrance, Enclosure for electronic components.
상세보기
Shores A. Andrew (212 Carroll Canal Venice CA 90291), Enclosure for electronic devices.
상세보기
Smith,Mark A.; Boucher,William R; Haluzak,Charles C, Fluidic MEMS device.
상세보기
Jacobs, Simon Joshua, Getter for enhanced micromechanical device performance.
상세보기
Kothari, Manish; Chui, Clarence, Hermetic seal and method to create the same.
상세보기
Raychaudhuri, Pranab K.; Madathil, Joseph K., High contrast light-emitting diode devices.
상세보기
Sone, Takanori; Kaneda, Osamu, Infrared light detection array and method of producing the same.
상세보기
Harvey Martin,BEX ; Rueckeshaeuser Karl-Heinz,DEX ; Hautekeer Jean-Paul,BEX ; Wolf Andreas,BEX, Insulating glass units.
상세보기
Lin,Wen Jian, Interference display unit.
상세보기
Barbarossa,Giovanni, Interferometers for optical communications utilizing photo-sensitive materials.
상세보기
Miles Mark W., Interferometric modulation.
상세보기
Miles Mark W., Interferometric modulation.
상세보기
Miles, Mark W., Interferometric modulation of radiation.
상세보기
Miles, Mark W., Interferometric modulation of radiation.
상세보기
Miles, Mark W., Interferometric modulation of radiation.
상세보기
Miles,Mark W., Interferometric modulation of radiation.
상세보기
Burton ; Henry W. G., Kit for converting single-glazed window to double-glazed window.
상세보기
Weigers David G. ; Bremigan ; III Charles F., Laminated acoustic wave touch panel.
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Stafford, John; Tam, Gordon; Shen, Jun, Latching micro magnetic relay packages and methods of packaging.
상세보기
Kanezawa Tatsuo,JPX, Liquid crystal display device and manfacturing method therefor.
상세보기
Nishiyama, Seiji; Nakao, Kenji; Uemura, Tsuyoshi, Liquid crystal display element and manufacturing method thereof.
상세보기
Hornbeck Larry J. (Van Alstyne TX), Low reset voltage process for DMD.
상세보기
Natarajan, Bangalore R.; Ganti, Surya, MEMS devices and processes for packaging such devices.
상세보기
Christopher Gudeman, Method and apparatus for interferometric modulation of light.
상세보기
Miles,Mark W., Method and device for modulating light with a time-varying signal.
상세보기
Miles, Mark W., Method for fabricating a structure for a microelectromechanical systems (MEMS) device.
상세보기
Watanabe Takayuki,JPX, Method for preserving polished inorganic glass and method for preserving article obtained by using the same.
상세보기
Shook James Gill, Method of and apparatus for sealing an hermetic lid to a semiconductor die.
상세보기
David Horsley, Method of fabricating suspended microstructures.
상세보기
te Velde Ties S. (Eindhoven NLX), Method of manufacturing a display device.
상세보기
Atobe Mitsuro,JPX ; Koeda Hiroshi,JPX ; Yotsuya Shinichi,JPX, Method of manufacturing spatial light modulator and electronic device employing it.
상세보기
Atobe Mitsuro,JPX ; Koeda Hiroshi,JPX ; Yotsuya Shinichi,JPX, Method of manufacturing spatial light modulator and electronic device employing it.
상세보기
Fisher Edward C. ; Jascott Ronald ; Gale Richard O., Method of passivating a micromechanical device within a hermetic package.
상세보기
Alwan James J., Methods of fabricating flat panel evacuated displays.
상세보기
Fushinobu Kazuyoshi,JPX, Micro-electromechanical device.
상세보기
Stefan Pinter DE; Harald Emmerich DE; Hans-Peter Trah DE; Helmut Baumann DE, Micromechanical cap structure and the respective manufacturing method.
상세보기
Nelson, William E., Micromechanical device and method for non-contacting edge-coupled operation.
상세보기
Klonis Homer B. ; Yeh Arlene Y. ; Reed Mark, Micromechanical device including time-release passivant.
상세보기
Stern Ernest, Micromechanical optical switch and flat panel display.
상세보기
Thomas P. Glenn ; Steven Webster ; Roy Dale Hollaway, Micromirror device package.
상세보기
Grandjean, Pierre-Andre; Cadman, Martyn-Andrew; Vuilleumier, Raymond; Guye, Raymond, Miniature display device.
상세보기
Peterson, Kenneth A.; Watson, Robert D., Multilayered microelectronic device package with an integral window.
상세보기
Yanagisawa, Yoshiyuki, Optical device, optical unit and projector.
상세보기
Lin,Wen Jian; Tsai,Hsiung Kuang, Optical interference display panel.
상세보기
Tsai,Hsiung Kuang, Optical interference display panel.
상세보기
Tsai,Hsiung Kuang; Miles,Mark W., Optical interference display panel.
상세보기
Lin, Wen Jian; Arbuckle, Brian; Gally, Brian; Floyd, Philip; Palmateer, Lauren, Optical interference display panel and manufacturing method thereof.
상세보기
Ishikawa, Hiroichi, Optical multilayer structure, optical switching device, and image display.
상세보기
Brandenburg, Scott D.; Degenkolb, Thomas A.; Myers, Bruce A., Overmolded electronic package including circuit-carrying substrate.
상세보기
Chen,Chih An, Package for the display module with the electromagnetic module.
상세보기
Low, Yee Leng; Ramsey, David Andrew, Packaging micromechanical devices.
상세보기
Miles,Mark W., Photonic MEMS and structures.
상세보기
Miles, Mark W., Photonic mems and structures.
상세보기
Sogard Michael R., Position resolution of an interferometrially controlled moving stage by regression analysis.
상세보기
Kenneth A. Peterson ; William R. Conley, Pre-release plastic packaging of MEMS and IMEMS devices.
상세보기
Kovacs Alan L. (Long Beach CA) Johnson Gary W. (Irvine CA) Vitriol William A. (Anaheim CA) Shock ; Jr. Clifford L. (San Luis Obispo CA), Pre-stressed laminated lid for electronic circuit package.
상세보기
Cho Steve T., Process for bonding a shell to a substrate for packaging a semiconductor.
상세보기
Offenberg Michael (Tubingen DEX), Process for producing surface micromechanical structures.
상세보기
Elliot F. Olster ; Dennis Joseph Peterlin ; Thomas Dannenhoffer, Processed fiber for emission of energy into a medium and method therefor.
상세보기
Jokerst Nan M. (Atlanta GA) Brooke Martin A. (Atlanta GA) Allen Mark G. (Atlanta GA), Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical.
상세보기
Kenneth A. Peterson ; Robert D. Watson, Sealed symmetric multilayered microelectronic device package with integral windows.
상세보기
Wilkinson, Timothy D; Crossland, William A, Sealing of cells having active backplanes.
상세보기
Peterson, Kenneth A.; Watson, Robert D., Single level microelectronic device package with an integral window.
상세보기
Bozler Carl O. ; Rabe Steven, Spatial light modulator.
상세보기
Bozler Carl O. ; Rabe Steven, Spatial light modulator.
상세보기
Hornbeck Larry J. (Van Alstyne TX), Spatial light modulator.
상세보기
Lin, Wen-Jian; Tsai, Hsiung-Kuang, Structure of an optical interference display cell.
상세보기
Larry J. Hornbeck, Support post architecture for micromechanical devices.
상세보기
Roger A. Robbins, Surface treatment material deposition and recapture.
상세보기
Frischknecht, Kyle D., Transport balancing diffusion layer for rate limited scavenging systems.
상세보기
Miles Mark W., Visible spectrum modulator arrays.
상세보기
Miles Mark W., Visible spectrum modulator arrays.
상세보기

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[미국특허] Optical interference display panel and manufacturing method thereof 원문보기