초록 ▼

The present invention relates to electrostatically actuated device components and methods of making the same. In an embodiment, the invention includes a method of making an electrostatically actuated device component including providing a multilayered structure comprising a first layer comprising a

The present invention relates to electrostatically actuated device components and methods of making the same. In an embodiment, the invention includes a method of making an electrostatically actuated device component including providing a multilayered structure comprising a first layer comprising a first polymer, a second layer comprising a conductive material, the second layer disposed over the first layer, a third layer comprising a dielectric material, the third layer disposed over the second layer, positioning the multilayered structure within an injection mold, and injecting a second polymer into the mold and bonding the first layer to the second polymer to produce an electrostatically actuated device component. In an embodiment, the invention includes a method of injection molding a stator component for an electrostatically actuated valve.

대표청구항 ▼

We claim: 1. A method of making an electrostatically actuated device component for an electrostatically actuated device, comprising:providing a multilayered structure comprising a first layer comprising a first polymer;a second layer comprising a conductive material, the second layer disposed over t

We claim: 1. A method of making an electrostatically actuated device component for an electrostatically actuated device, comprising:providing a multilayered structure comprising a first layer comprising a first polymer;a second layer comprising a conductive material, the second layer disposed over the first layer; anda third layer comprising a dielectric material, the third layer disposed over the second layer, the third layer having a surface roughness (Rq) of greater than about 100 angstroms to less than about 1000 angstroms;positioning the multilayered structure within an injection mold such that when a second polymer is injected into the injection mold, the second polymer engages the first polymer of the first layer but does not significantly engage the third layer; andinjecting the second polymer into the injection mold and forming a bond between the first polymer of the first layer and the second polymer to produce an electrostatically actuated device component that has the third layer of the multilayered structure being exposed in order to selectively contact an electrostatically actuated diaphragm of an electrostatically actuated device.