초록 ▼

A method and apparatus for extending a polishing article lifetime on a polishing tool with multiple platens is described. The apparatus includes an advanceable roll to roll platen with multiple embodiments of a polishing article to be used thereon. The polishing article is adapted to perform a polis

A method and apparatus for extending a polishing article lifetime on a polishing tool with multiple platens is described. The apparatus includes an advanceable roll to roll platen with multiple embodiments of a polishing article to be used thereon. The polishing article is adapted to perform a polishing process by removing conductive and dielectric material from a substrate while minimizing downtime of the polishing tool. In some embodiments, the polishing article may be a dielectric material or a conductive material and is configured to include a longer usable lifetime to minimize replacement and downtime of the tool.

대표청구항 ▼

The invention claimed is: 1. A polishing article for a roll to roll polishing system, comprising:a linear strip wound on a supply roll, the linear strip comprising a first conductive layer disposed on a second conductive layer with a dielectric layer therebetween, wherein the first conductive layer

The invention claimed is: 1. A polishing article for a roll to roll polishing system, comprising:a linear strip wound on a supply roll, the linear strip comprising a first conductive layer disposed on a second conductive layer with a dielectric layer therebetween, wherein the first conductive layer comprises a metal foam, a metal mesh, metal fibers, a metal/polymer composite, or combinations thereof.