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[미국특허] Delivery of vapor precursor from solid source 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0326792 (2008-12-02)
등록번호 US8012876 (2011-08-23)
발명자 / 주소
  • Oosterlaken, Theodorus G. M.
출원인 / 주소
  • ASM International N.V.
대리인 / 주소
    Knobbe, Martens, Olson & Bear LLP
인용정보 피인용 횟수 : 0  인용 특허 : 114

초록 ▼

A method is disclosed that uses solid precursors for semiconductor processing. A solid precursor is provided in a storage container. The solid precursor is transformed into a liquid state in the storage container. The liquid state precursor is transported from the storage container to a liquid holdi

대표청구항 ▼

What is claimed is: 1. A method for semiconductor processing comprising:providing a precursor in a solid state in a storage container;intermittently heating the storage container to a temperature above the melting temperature of the precursor, thereby intermittently transforming the precursor from t

이 특허에 인용된 특허 (114) 인용/피인용 타임라인 분석

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